DE60326670D1 - Optisches Material, optisches Element; mehrfachschichtiges diffaktives optisches System , optisches System und Verfahren zum Formen eines optischen Elementes - Google Patents

Optisches Material, optisches Element; mehrfachschichtiges diffaktives optisches System , optisches System und Verfahren zum Formen eines optischen Elementes

Info

Publication number
DE60326670D1
DE60326670D1 DE60326670T DE60326670T DE60326670D1 DE 60326670 D1 DE60326670 D1 DE 60326670D1 DE 60326670 T DE60326670 T DE 60326670T DE 60326670 T DE60326670 T DE 60326670T DE 60326670 D1 DE60326670 D1 DE 60326670D1
Authority
DE
Germany
Prior art keywords
optical
optical system
optical element
forming
layer diffractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60326670T
Other languages
German (de)
English (en)
Inventor
Masanobu Ohgane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60326670D1 publication Critical patent/DE60326670D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F271/00—Macromolecular compounds obtained by polymerising monomers on to polymers of nitrogen-containing monomers as defined in group C08F26/00
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F271/00—Macromolecular compounds obtained by polymerising monomers on to polymers of nitrogen-containing monomers as defined in group C08F26/00
    • C08F271/02—Macromolecular compounds obtained by polymerising monomers on to polymers of nitrogen-containing monomers as defined in group C08F26/00 on to polymers of monomers containing heterocyclic nitrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L51/00—Compositions of graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • C08L51/003—Compositions of graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers grafted on to macromolecular compounds obtained by reactions only involving unsaturated carbon-to-carbon bonds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4211—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant correcting chromatic aberrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4222—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant in projection exposure systems, e.g. photolithographic systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • G02B27/4277—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path being separated by an air space
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4288—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having uniform diffraction efficiency over a large spectral bandwidth
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
DE60326670T 2002-04-18 2003-04-16 Optisches Material, optisches Element; mehrfachschichtiges diffaktives optisches System , optisches System und Verfahren zum Formen eines optischen Elementes Expired - Lifetime DE60326670D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002115613 2002-04-18
JP2003068112A JP4227442B2 (ja) 2002-04-18 2003-03-13 光学材料、光学素子、回折光学素子、積層型回折光学素子、光学系及び光学素子の成形方法

Publications (1)

Publication Number Publication Date
DE60326670D1 true DE60326670D1 (de) 2009-04-30

Family

ID=28677654

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60326670T Expired - Lifetime DE60326670D1 (de) 2002-04-18 2003-04-16 Optisches Material, optisches Element; mehrfachschichtiges diffaktives optisches System , optisches System und Verfahren zum Formen eines optischen Elementes

Country Status (6)

Country Link
US (1) US6870677B2 (https=)
EP (1) EP1354899B1 (https=)
JP (1) JP4227442B2 (https=)
KR (1) KR100553052B1 (https=)
CN (1) CN1267267C (https=)
DE (1) DE60326670D1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030180563A1 (en) * 2002-02-27 2003-09-25 Canon Kabushiki Kaisha Optical element and method of manufacturing the same, or laminated optical element and method of manufacturing the same
CA2426235A1 (en) * 2002-04-19 2003-10-19 Kenichi Nakama Diffraction optical element and transfer mold therefor
US6946384B2 (en) * 2003-06-06 2005-09-20 Intel Corporation Stacked device underfill and a method of fabrication
US7320928B2 (en) * 2003-06-20 2008-01-22 Intel Corporation Method of forming a stacked device filler
JP4451268B2 (ja) * 2004-03-04 2010-04-14 株式会社リコー 光学素子及びその製造方法と、これを用いた光学製品、光ピックアップ及び光情報処理装置
US8027089B2 (en) * 2005-10-07 2011-09-27 Nikon Corporation Minute structure and its manufacturing method
JP4847351B2 (ja) * 2007-01-11 2011-12-28 キヤノン株式会社 回折光学素子及びそれを用いた回折格子
EP1947488B1 (en) * 2007-01-22 2010-05-12 Canon Kabushiki Kaisha Laminated diffraction optical element
JP5361613B2 (ja) * 2008-09-22 2013-12-04 キヤノン株式会社 光学材料および光学素子
JP5590851B2 (ja) * 2008-12-10 2014-09-17 キヤノン株式会社 回折光学素子、積層型回折光学素子及びその製造方法
TWI577523B (zh) * 2011-06-17 2017-04-11 三菱麗陽股份有限公司 表面具有凹凸結構的模具、光學物品、其製造方法、面發光體用透明基材及面發光體
CN103764699B (zh) 2011-09-27 2016-02-10 丸善石油化学株式会社 光学元件材料及其制造方法
JP2014197166A (ja) * 2013-03-07 2014-10-16 セイコーエプソン株式会社 光学素子、光学素子の製造方法およびプロジェクター
CN104749673B (zh) * 2015-04-21 2017-04-05 中国科学院长春光学精密机械与物理研究所 大尺寸平面衍射光栅的复制拼接方法
KR102692564B1 (ko) * 2018-09-21 2024-08-06 삼성전자주식회사 다층 박막 구조물 및 이를 이용한 위상 변환 소자
US11305706B2 (en) * 2019-05-30 2022-04-19 Ford Global Technologies, Llc Vehicle appliques
KR102908379B1 (ko) * 2020-11-11 2026-01-06 한국전기연구원 구조색상 구조체 및 그 제조방법

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58162617A (ja) 1982-03-19 1983-09-27 Konishiroku Photo Ind Co Ltd 光学用樹脂組成物および光学用素子
JPH01296214A (ja) * 1988-05-25 1989-11-29 Canon Inc 表示装置
US5170192A (en) 1990-11-29 1992-12-08 Pilkington Visioncare, Inc. Oxygen permeable bifocal contact lenses and their manufacture
JPH0616720A (ja) 1992-07-01 1994-01-25 Fujitsu Ltd プラスチック光導波路用組成物およびプラスチック光導波路の製造方法
US5368790A (en) * 1992-08-19 1994-11-29 Greshes; Martin Method for making lenses
EP0840183B1 (en) * 1992-09-03 2002-07-03 Denso Corporation Holography device
JP3084677B2 (ja) * 1993-05-11 2000-09-04 キヤノン株式会社 スチリルクマリン化合物、光増感剤、感光性樹脂組成物、ホログラム記録媒体
JP3717555B2 (ja) 1994-09-12 2005-11-16 オリンパス株式会社 回折光学素子
EP0752600B1 (en) * 1995-07-06 2003-12-17 Dai Nippon Printing Co., Ltd. Hologram color filter, and its fabrication method
US6157488A (en) * 1995-08-29 2000-12-05 Olympus Optical Company Ltd. Diffractive optical element
JP3618464B2 (ja) 1995-08-29 2005-02-09 オリンパス株式会社 回折光学素子、およびそれを用いる光学装置
JP3617584B2 (ja) 1997-03-27 2005-02-09 コニカミノルタフォトイメージング株式会社 回折光学素子
US6090332A (en) * 1997-05-16 2000-07-18 California Institute Of Technology Process of changing the refractive index of a composite containing a polymer and a compound having large dipole moment and polarizability and applications thereof
JP3495884B2 (ja) 1997-07-28 2004-02-09 キヤノン株式会社 回折光学素子及びそれを用いた光学系
JP3472092B2 (ja) * 1997-07-28 2003-12-02 キヤノン株式会社 回折光学素子及びそれを用いた光学系
WO2000049465A1 (en) 1999-02-17 2000-08-24 Victoria University Of Technology Erasable/rewritable optical data storage with photorefractive polymers
US20030180563A1 (en) * 2002-02-27 2003-09-25 Canon Kabushiki Kaisha Optical element and method of manufacturing the same, or laminated optical element and method of manufacturing the same

Also Published As

Publication number Publication date
US20030197941A1 (en) 2003-10-23
JP2004004605A (ja) 2004-01-08
KR20030082924A (ko) 2003-10-23
KR100553052B1 (ko) 2006-02-15
JP4227442B2 (ja) 2009-02-18
US6870677B2 (en) 2005-03-22
CN1267267C (zh) 2006-08-02
EP1354899A1 (en) 2003-10-22
CN1451531A (zh) 2003-10-29
EP1354899B1 (en) 2009-03-18

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