JP4216029B2 - 薄板搬送装置 - Google Patents

薄板搬送装置 Download PDF

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Publication number
JP4216029B2
JP4216029B2 JP2002276558A JP2002276558A JP4216029B2 JP 4216029 B2 JP4216029 B2 JP 4216029B2 JP 2002276558 A JP2002276558 A JP 2002276558A JP 2002276558 A JP2002276558 A JP 2002276558A JP 4216029 B2 JP4216029 B2 JP 4216029B2
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thin plate
cassette
frame
support member
supporting
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Japanese (ja)
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JP2004115137A (ja
JP2004115137A5 (enExample
Inventor
一郎 福渡
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Hitachi Ltd
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Hitachi Plant Technologies Ltd
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2002276558A 2002-09-24 2002-09-24 薄板搬送装置 Expired - Fee Related JP4216029B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002276558A JP4216029B2 (ja) 2002-09-24 2002-09-24 薄板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002276558A JP4216029B2 (ja) 2002-09-24 2002-09-24 薄板搬送装置

Publications (3)

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JP2004115137A JP2004115137A (ja) 2004-04-15
JP2004115137A5 JP2004115137A5 (enExample) 2005-05-19
JP4216029B2 true JP4216029B2 (ja) 2009-01-28

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JP2002276558A Expired - Fee Related JP4216029B2 (ja) 2002-09-24 2002-09-24 薄板搬送装置

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JP (1) JP4216029B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170002536U (ko) * 2017-06-21 2017-07-12 이이원 기판 운반 카세트

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005090211A1 (ja) * 2004-03-18 2005-09-29 Daiichi Institution Industry Co. Ltd. アライメント機能付き移載装置
JP7342840B2 (ja) * 2020-11-05 2023-09-12 トヨタ自動車株式会社 薄板材の搬送方法、及び搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170002536U (ko) * 2017-06-21 2017-07-12 이이원 기판 운반 카세트

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Publication number Publication date
JP2004115137A (ja) 2004-04-15

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