WO2007119530A1 - トレイ積層移載装置 - Google Patents
トレイ積層移載装置 Download PDFInfo
- Publication number
- WO2007119530A1 WO2007119530A1 PCT/JP2007/056463 JP2007056463W WO2007119530A1 WO 2007119530 A1 WO2007119530 A1 WO 2007119530A1 JP 2007056463 W JP2007056463 W JP 2007056463W WO 2007119530 A1 WO2007119530 A1 WO 2007119530A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- tray
- stacking
- trays
- pressing body
- transferring apparatus
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G59/00—De-stacking of articles
- B65G59/10—De-stacking nested articles
- B65G59/105—De-stacking nested articles by means of reciprocating escapement-like mechanisms
- B65G59/106—De-stacking nested articles by means of reciprocating escapement-like mechanisms comprising lifting or gripping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0235—Containers
- B65G2201/0258—Trays, totes or bins
Definitions
- the present invention relates to a tray stacking / transferring apparatus for stacking and transferring trays for transporting glass substrates and the like used for liquid crystal displays and the like.
- a glass substrate used in a liquid crystal display is used by dividing a single large glass substrate into a plurality of glass substrates for individual displays.
- the substrate may be transported in a predetermined tray.
- a large number of trays are transported in a stacked state in order to increase transport efficiency.
- Patent Document 1 Japanese Patent Laid-Open No. 5-338804
- Patent Document 2 JP-A-6-255790
- Patent Document 3 Japanese Patent Laid-Open No. 2003-252436
- Patent Document 4 Japanese Patent Laid-Open No. 2004-186249
- the side clamp 6 is moved in parallel from the reference position L of the descending end to the side edge 3 of each tray 2 and engaged. Lift each tray 2 It is a thing. However, the number of trays 2 is increased, and there is a large difference in the overall weight when the tray 2 is empty and when a substrate is stored. The difference in the amount of deflection of the support member of the device that supports the tray 2 is the size of each tray 2. Due to the accumulation of errors in multiple stages, the tray position may shift slightly up and down.
- the side clamps 6 can enter between the side edge portions 3 of the respective trays 2 and can be lifted.
- the position between the side edges 3 of each tray 2 is lowered downward as shown in FIGS.
- the holding latch 4 of 6 could not be inserted between the side edges 3 of each tray 2.
- FIGS. 6 (e) and (f) when the tray 2 is empty, the position of the side edge 3 of the tray 2 may be higher than the reference position L. In some cases, the side clamp 6 could not be inserted between the side edges 3 of each tray 2.
- the side clamp 6 must also be replaced, and the versatility of the apparatus is low.
- Patent Documents 1 to 3 have the same problems as described above, and the positioning is performed by providing a complicated positioning mechanism, which increases the cost of the device. Man-hours and costs are also required for the upper maintenance.
- the present invention has been made in view of the above-described problems of the prior art, can hold trays stacked easily and reliably with a simple configuration, and is highly versatile.
- the purpose is to provide a mounting device.
- the present invention is a tray stacking / transferring apparatus that holds and transfers a stacking tray in which a plurality of trays are stacked, and abuts against and presses each side edge of the stacking tray.
- the side edge portion is eaten by the force of pressing, and a pressing body having elasticity that can be inserted is provided, and the pressing body abuts over a plurality of side edges and is positioned on both sides of the stacking tray.
- a pair of tray stacking / transferring apparatus is provided.
- the pressing body is located on the side of the stacking tray, and a plurality of elastic members that are in contact with each other across the side edge portions of the plurality of trays are connected.
- the pressing body also includes a plate-like or block-like rubber member, a flexible resin, foam rubber, foam resin, and the like.
- the tray is provided so that the substrate can be stored in a horizontal state, and a plurality of through-hole portions are provided on the bottom surface, and can be inserted through the through-hole portions at the bottom of the tray to be loaded.
- a plurality of support pins arranged so that the substrate can be supported in a horizontal state by an end portion, and each support pin vertically extends each through hole portion of the stacked tray stacked in the support pin protruding direction. It has a length that can be inserted.
- tray stacking / transferring apparatus of the present invention According to the tray stacking / transferring apparatus of the present invention, trays stacked in a reliable manner can be held regardless of the position and thickness of the tray, and the versatility is extremely high. This eliminates the need for fine positioning and switching of equipment for each tray, contributing to cost reduction.
- FIG. 1 is a perspective view showing trays stacked in a tray stacking / transferring apparatus according to an embodiment of the present invention.
- FIG. 2 is a schematic side view showing a state in which the stacking tray of the tray stacking / transferring apparatus of one embodiment of the present invention is held.
- FIG. 3 is a schematic side view showing each holding state of the stacking tray by the pressing body of the tray stacking / transferring apparatus of one embodiment of the present invention.
- FIG. 4 is a longitudinal sectional view showing the transfer operation of the tray stacking / transferring apparatus of one embodiment of the present invention.
- FIG. 5 is a schematic side view showing a state in which a stacking tray is held by a conventional tray stacking / transferring apparatus.
- FIG. 6 is a schematic side view showing each holding state of the stacking tray by the conventional tray stacking / transferring apparatus.
- a tray stacking / transferring apparatus 10 is an apparatus for storing, for example, a glass substrate used in a liquid crystal display in a tray 12 and transporting it to the next process, and is a stack in which a large number of trays 12 are stacked.
- the tray 12 is integrally formed into a thin rectangular parallelepiped shape by foamed polyethylene resin, and the like.
- the rectangular bottom portion 15 on which the glass substrate 20 to be transported is placed in a horizontal state, and the entire bottom portion 15 are formed. It consists of a frame portion 17 which stands up above the side edge over the circumference.
- the bottom portion 15 has a rectangular shape that is slightly larger than the glass substrate 20 to be accommodated, and has a thickness of, for example, about 15 mm.
- the glass substrate 20 is placed on the top surface of the bottom portion 15.
- a plurality of through-hole portions 15a are formed in the bottom portion 15 at predetermined intervals and at corners and central portions. For example, nine through holes 15a are provided in a matrix of 3 rows ⁇ 3 columns.
- Each through hole portion 15a provided in the bottom portion 15 is provided for inserting a support pin 24 described later as a support member in order to take out the glass substrate 20 stored on the bottom portion 15 from the tray 12,
- the frame portion 17 of the tray 12 is provided, for example, over the entire circumference with a width of about 30 mm from the side edge portion of the bottom portion 15, and the glass substrate 20 placed on the bottom portion 15 is arranged in the horizontal direction. It is formed to surround the entire circumference with a slight gap between them! Speak.
- a side edge portion 13 that protrudes like a flange in a horizontal state with a width of about 30 mm is provided over a pair of side surfaces or the entire circumference.
- the edge measuring portion 13 is configured to have a rectangular cross section. For example, several tens of trays 12 are stacked and conveyed in the vertical direction, with the glass substrates 20 housed therein. Thereby, the space efficiency during transportation and storage is remarkably improved, and a large amount of the glass substrate 20 can be handled efficiently.
- the lower end portion of the bottom portion 15 is engaged with a positioning portion (not shown) provided on the upper end portion of the lower substrate storage tray 12.
- the tray stacking / transferring apparatus 10 of this embodiment is used for taking out the glass substrate 20 accommodated in the tray 12 and moving it to the next step.
- the tray stacking / transferring apparatus 10 of this embodiment includes a pressing body 16 made of a soft elastic material such as rubber or soft synthetic resin, foam rubber or foamed resin at the end of a holding mechanism (not shown). It is a thing.
- the pressing bodies 16 are formed in a plate shape or a block shape, and are provided in pairs on both sides of the stacking tray 14.
- the pressing bodies 16 are separated from or close to each other by a holding mechanism (not shown) and can be moved up and down.
- the pressing body 16 sufficiently obtains friction with the side edge portion 13 of each tray 12, and is compressed and deformed while holding the tray 12, so that the side edge portion 13 of each tray 12 bites into the pressing body 16. It has possible elasticity.
- the pressing body 16 is located on the side of the stacking tray 14, and as shown in FIG. 2, a plurality of elastic members 16a that abut across the side edges of the plurality of trays 12 are continuously provided. It is a thing.
- the tray stacking / transferring apparatus 10 includes a lifting platform 22 provided so that the tray 12 is placed and can be moved up and down when the holding of the plurality of trays 12 stacked in the vertical direction is released. It is.
- the tray stacking / transferring apparatus 10 penetrates the lifting platform 22 in the vertical direction, and is inserted into the through holes 15a of one or more trays 12 placed on the lifting platform 22, A plurality of support pins 24 extending in the vertical direction are provided.
- the operation of the tray stacking / transferring apparatus 10 of this embodiment is such that a pair of pressing bodies 16 from the side of the stacked tray 14 has side edges 13 of each tray 12.
- the pair of pressing bodies 16 is pushed into the center side of the stacking tray 14 until the side edge 13 of the tray 12 bites into the pressing body 16.
- the side edge 13 of each tray 12 is securely held by the pressing body 16.
- the pressing body 16 is raised by the holding mechanism to which the pressing body 16 is attached, the stacked tray 14 above the portion held by the pressing body 16 is lifted simultaneously.
- the position of the stacking tray 14 is entirely at the reference position L as shown in Fig. 2 (b). May be shifted downwards. Even in this case, as shown in FIG. 3B, the pressing body 16 can be reliably held regardless of the positional deviation of the side edge portion 13 of the tray 12.
- the tray 12 is empty and light, even if the position of the tray 12 is shifted upward from the reference position L, as shown in FIG. The tray 12 can be held securely and lifted or transported.
- the tray 12 above the lowermost tray 12a is held by the pressing body 16 of the holding mechanism.
- the lowermost tray 12a is placed on the lifting platform 22 that is not held by the pressing body 16.
- the elevator 22 is lowered, as shown in FIG. 4, the lowermost tray 12a is also lowered integrally.
- the support pins 24 are inserted through the lifting platform 22 and inserted into the through holes 15a of the tray 12a.
- each support pin 24 comes into contact with the back surface of the glass substrate 20 stored in the tray 12a, and as the elevator 22 is lowered, the glass substrate 20 The support pin 24 lifts the tray 12a from the bottom 15 relatively. In this state, the support pins 24 are in a state where the glass substrate 20 is positioned relatively upward from the tray 12a and held horizontally at a predetermined height.
- the glass substrate 20 held horizontally on each support pin 24 is picked up from above each support pin 24 by a conveying means such as a suction hand and conveyed to a predetermined position.
- the stacking tray 14 is securely held as long as it is within the range of positions that can be held by the pressing body 16 regardless of the position and thickness of the tray 12. can do. Therefore, even if the depth and thickness of the tray 12 and the thickness of the side edge 13 are changed, or even if the installation position of the tray 12 is slightly shifted due to the presence or type of stored items, the tray 12 is securely held. It is possible. This eliminates the need for fine positioning of the holding device and switching of the device for each tray type, and contributes to cost reduction during product manufacturing.
- the pressing body may be any one that holds a plurality of trays for each pair of pressing bodies in a state of being divided into a plurality of parts, and the pressing body may have any shape, structure, or material.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- De-Stacking Of Articles (AREA)
- Pile Receivers (AREA)
- Stacking Of Articles And Auxiliary Devices (AREA)
- Packaging Frangible Articles (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006-088445 | 2006-03-28 | ||
JP2006088445A JP2007261738A (ja) | 2006-03-28 | 2006-03-28 | トレイ積層移載装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2007119530A1 true WO2007119530A1 (ja) | 2007-10-25 |
Family
ID=38609309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/056463 WO2007119530A1 (ja) | 2006-03-28 | 2007-03-27 | トレイ積層移載装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2007261738A (ja) |
KR (1) | KR20080099272A (ja) |
CN (1) | CN101405208A (ja) |
TW (1) | TW200746346A (ja) |
WO (1) | WO2007119530A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103896057A (zh) * | 2014-04-16 | 2014-07-02 | 苏州博众精工科技有限公司 | 一种全自动下料机构 |
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KR101534023B1 (ko) * | 2009-06-30 | 2015-07-09 | 주성엔지니어링(주) | 라미네이팅 시스템 및 방법 |
CN103112726B (zh) * | 2013-03-11 | 2015-05-20 | 嘉诺资源再生技术(苏州)有限公司 | 一种自动垛脚放置机 |
JP6179729B2 (ja) * | 2014-06-13 | 2017-08-16 | 株式会社ダイフク | コンテナ昇降搬送装置 |
JP6418397B2 (ja) * | 2015-08-24 | 2018-11-07 | 株式会社ダイフク | 物品搬送用容器の昇降搬送装置 |
CN106711071B (zh) * | 2015-11-13 | 2020-06-19 | 北京北方华创微电子装备有限公司 | 装卸手 |
CN105383946B (zh) * | 2015-12-07 | 2018-10-02 | 广东生和堂健康食品股份有限公司 | 一种食品进出杀菌斧的自动装卸系统 |
KR102332806B1 (ko) * | 2016-06-28 | 2021-12-01 | 무라다기카이가부시끼가이샤 | 기판 캐리어 수송, 분류 및 로딩/언로딩 |
KR102332805B1 (ko) * | 2016-06-28 | 2021-12-01 | 무라다기카이가부시끼가이샤 | 개선된 고밀도 테크-셀 캐리어 |
CN106429473B (zh) * | 2016-10-13 | 2019-11-15 | 佛山市特福德自动化科技有限公司 | 便于从仓架逐件抽离的夹持部件 |
CN106363639B (zh) * | 2016-10-26 | 2018-08-14 | 重庆大学 | 智能扫雪机器人信标收放机构 |
CN107840153B (zh) * | 2017-12-01 | 2024-03-22 | 昆山精讯电子技术有限公司 | 一种面板存放装置 |
JP2020155628A (ja) * | 2019-03-20 | 2020-09-24 | 日本電産サンキョー株式会社 | トレイ搬送装置およびパネル搬送システム |
CN110435999A (zh) * | 2019-08-09 | 2019-11-12 | 苏州富强科技有限公司 | 一种拨距机构及拨距装置 |
KR102246502B1 (ko) * | 2019-10-11 | 2021-04-29 | 주식회사 에스엠코어 | 트레이 병합 기능을 갖는 스토커 |
CN110668184B (zh) * | 2019-10-27 | 2021-01-22 | 浙江博雅玻璃股份有限公司 | 一种玻璃生产加工用放置架 |
CN111170017B (zh) * | 2020-03-09 | 2021-05-18 | 吉林工程技术师范学院 | 一种物流周转箱分离装置 |
CN111559609A (zh) * | 2020-05-11 | 2020-08-21 | 杭州易灿网络科技有限公司 | 一种避免磕损的智能物流分发装置 |
TWI808748B (zh) * | 2022-05-06 | 2023-07-11 | 四方自動化機械股份有限公司 | 晶片托盤之換盤機構 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0555785A (ja) * | 1991-08-28 | 1993-03-05 | Matsushita Electric Ind Co Ltd | 基板供給装置 |
JPH0710150A (ja) * | 1993-06-23 | 1995-01-13 | Nippon Tetrapack Kk | 包装容器及び自動販売機 |
JPH09290927A (ja) * | 1996-04-25 | 1997-11-11 | Toyo Kanetsu Kk | ピッキング装置 |
JP2001326272A (ja) * | 2000-05-12 | 2001-11-22 | Meidensha Corp | 基板搬送用トレー |
JP2002200141A (ja) * | 2000-12-28 | 2002-07-16 | Yuyama Manufacturing Co Ltd | 薬剤シート取出装置 |
-
2006
- 2006-03-28 JP JP2006088445A patent/JP2007261738A/ja active Pending
-
2007
- 2007-03-27 KR KR1020087020211A patent/KR20080099272A/ko not_active Application Discontinuation
- 2007-03-27 WO PCT/JP2007/056463 patent/WO2007119530A1/ja active Application Filing
- 2007-03-27 CN CNA2007800103580A patent/CN101405208A/zh active Pending
- 2007-03-28 TW TW096110796A patent/TW200746346A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0555785A (ja) * | 1991-08-28 | 1993-03-05 | Matsushita Electric Ind Co Ltd | 基板供給装置 |
JPH0710150A (ja) * | 1993-06-23 | 1995-01-13 | Nippon Tetrapack Kk | 包装容器及び自動販売機 |
JPH09290927A (ja) * | 1996-04-25 | 1997-11-11 | Toyo Kanetsu Kk | ピッキング装置 |
JP2001326272A (ja) * | 2000-05-12 | 2001-11-22 | Meidensha Corp | 基板搬送用トレー |
JP2002200141A (ja) * | 2000-12-28 | 2002-07-16 | Yuyama Manufacturing Co Ltd | 薬剤シート取出装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103896057A (zh) * | 2014-04-16 | 2014-07-02 | 苏州博众精工科技有限公司 | 一种全自动下料机构 |
CN103896057B (zh) * | 2014-04-16 | 2016-01-20 | 苏州博众精工科技有限公司 | 一种全自动下料机构 |
Also Published As
Publication number | Publication date |
---|---|
CN101405208A (zh) | 2009-04-08 |
JP2007261738A (ja) | 2007-10-11 |
KR20080099272A (ko) | 2008-11-12 |
TW200746346A (en) | 2007-12-16 |
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