JP2007261738A - トレイ積層移載装置 - Google Patents
トレイ積層移載装置 Download PDFInfo
- Publication number
- JP2007261738A JP2007261738A JP2006088445A JP2006088445A JP2007261738A JP 2007261738 A JP2007261738 A JP 2007261738A JP 2006088445 A JP2006088445 A JP 2006088445A JP 2006088445 A JP2006088445 A JP 2006088445A JP 2007261738 A JP2007261738 A JP 2007261738A
- Authority
- JP
- Japan
- Prior art keywords
- tray
- stacking
- trays
- pressing body
- stacked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G59/00—De-stacking of articles
- B65G59/10—De-stacking nested articles
- B65G59/105—De-stacking nested articles by means of reciprocating escapement-like mechanisms
- B65G59/106—De-stacking nested articles by means of reciprocating escapement-like mechanisms comprising lifting or gripping means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0235—Containers
- B65G2201/0258—Trays, totes or bins
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Pile Receivers (AREA)
- Stacking Of Articles And Auxiliary Devices (AREA)
- De-Stacking Of Articles (AREA)
Abstract
【解決手段】複数のトレイ12が積み重ねられた段積みトレイ14の側縁部に当接し押圧するとともに、押圧時の力により各トレイ12の側縁部13が食い込み可能な弾力性を有した押圧体16を備える。押圧体16は複数の側縁部13に亘って当接し、段積みトレイ14の両側に位置して一対設けられている。押圧体16は、段積みトレイ14の側方に位置した板状のゴム部材である。
【選択図】図1
Description
12 トレイ
13 側縁部
14 段積みトレイ
15 底部
15a 透孔部
16 押圧体
20 ガラス基板
22 昇降台
24 支持ピン
Claims (3)
- 複数のトレイが積み重ねられた段積みトレイを保持して移載するトレイ積層移載装置において、前記段積みトレイの各側縁部に当接し押圧するとともに、押圧時の力により前記側縁部が食い込み可能な弾力性を有した押圧体を備え、この押圧体は複数の側縁部に亘って当接し、前記段積みトレイの両側に位置して一対設けられていることを特徴とするトレイ積層移載装置。
- 前記押圧体は、前記段積みトレイ側方に位置し、前記複数のトレイの側縁部に跨って当接する弾性部材が複数接続されて成る請求項1記載のトレイ積層移載装置。
- 前記トレイは、基板を水平状態で収納可能に設けられ、底面には複数の透孔部が設けられ、搬入される前記トレイ底部の各透孔部に各々挿通可能であるとともに各上端部によって前記基板を水平状態で支持可能に配置された複数の支持ピンを備え、各支持ピンは、この支持ピン突出方向に積み重ねられた前記段積みトレイの前記各透孔部を上下方向に挿通可能な長さを有するものである請求項1記載のトレイ積層移載装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006088445A JP2007261738A (ja) | 2006-03-28 | 2006-03-28 | トレイ積層移載装置 |
KR1020087020211A KR20080099272A (ko) | 2006-03-28 | 2007-03-27 | 트레이 적층 이송장치 |
CNA2007800103580A CN101405208A (zh) | 2006-03-28 | 2007-03-27 | 托盘层叠移载装置 |
PCT/JP2007/056463 WO2007119530A1 (ja) | 2006-03-28 | 2007-03-27 | トレイ積層移載装置 |
TW096110796A TW200746346A (en) | 2006-03-28 | 2007-03-28 | Tray stack conveying apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006088445A JP2007261738A (ja) | 2006-03-28 | 2006-03-28 | トレイ積層移載装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008000793U Continuation JP3141328U (ja) | 2008-02-15 | 2008-02-15 | トレイ積層移載装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007261738A true JP2007261738A (ja) | 2007-10-11 |
Family
ID=38609309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006088445A Pending JP2007261738A (ja) | 2006-03-28 | 2006-03-28 | トレイ積層移載装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2007261738A (ja) |
KR (1) | KR20080099272A (ja) |
CN (1) | CN101405208A (ja) |
TW (1) | TW200746346A (ja) |
WO (1) | WO2007119530A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016003070A (ja) * | 2014-06-13 | 2016-01-12 | 株式会社ダイフク | コンテナ昇降搬送装置 |
WO2017033845A1 (ja) * | 2015-08-24 | 2017-03-02 | 株式会社ダイフク | 物品搬送用容器の昇降搬送装置 |
KR20210043363A (ko) * | 2019-10-11 | 2021-04-21 | 주식회사 에스엠코어 | 트레이 병합 기능을 갖는 스토커 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101534023B1 (ko) * | 2009-06-30 | 2015-07-09 | 주성엔지니어링(주) | 라미네이팅 시스템 및 방법 |
CN103112726B (zh) * | 2013-03-11 | 2015-05-20 | 嘉诺资源再生技术(苏州)有限公司 | 一种自动垛脚放置机 |
CN103896057B (zh) * | 2014-04-16 | 2016-01-20 | 苏州博众精工科技有限公司 | 一种全自动下料机构 |
CN106711071B (zh) * | 2015-11-13 | 2020-06-19 | 北京北方华创微电子装备有限公司 | 装卸手 |
CN105383946B (zh) * | 2015-12-07 | 2018-10-02 | 广东生和堂健康食品股份有限公司 | 一种食品进出杀菌斧的自动装卸系统 |
KR102332806B1 (ko) * | 2016-06-28 | 2021-12-01 | 무라다기카이가부시끼가이샤 | 기판 캐리어 수송, 분류 및 로딩/언로딩 |
KR102332805B1 (ko) * | 2016-06-28 | 2021-12-01 | 무라다기카이가부시끼가이샤 | 개선된 고밀도 테크-셀 캐리어 |
CN106429473B (zh) * | 2016-10-13 | 2019-11-15 | 佛山市特福德自动化科技有限公司 | 便于从仓架逐件抽离的夹持部件 |
CN106363639B (zh) * | 2016-10-26 | 2018-08-14 | 重庆大学 | 智能扫雪机器人信标收放机构 |
CN107840153B (zh) * | 2017-12-01 | 2024-03-22 | 昆山精讯电子技术有限公司 | 一种面板存放装置 |
JP2020155628A (ja) * | 2019-03-20 | 2020-09-24 | 日本電産サンキョー株式会社 | トレイ搬送装置およびパネル搬送システム |
CN110435999A (zh) * | 2019-08-09 | 2019-11-12 | 苏州富强科技有限公司 | 一种拨距机构及拨距装置 |
CN110668184B (zh) * | 2019-10-27 | 2021-01-22 | 浙江博雅玻璃股份有限公司 | 一种玻璃生产加工用放置架 |
CN111170017B (zh) * | 2020-03-09 | 2021-05-18 | 吉林工程技术师范学院 | 一种物流周转箱分离装置 |
CN111559609A (zh) * | 2020-05-11 | 2020-08-21 | 杭州易灿网络科技有限公司 | 一种避免磕损的智能物流分发装置 |
TWI808748B (zh) * | 2022-05-06 | 2023-07-11 | 四方自動化機械股份有限公司 | 晶片托盤之換盤機構 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2995939B2 (ja) * | 1991-08-28 | 1999-12-27 | 松下電器産業株式会社 | 基板供給装置 |
JP3220568B2 (ja) * | 1993-06-23 | 2001-10-22 | 日本テトラパック株式会社 | 自動販売機 |
JPH09290927A (ja) * | 1996-04-25 | 1997-11-11 | Toyo Kanetsu Kk | ピッキング装置 |
JP2001326272A (ja) * | 2000-05-12 | 2001-11-22 | Meidensha Corp | 基板搬送用トレー |
JP2002200141A (ja) * | 2000-12-28 | 2002-07-16 | Yuyama Manufacturing Co Ltd | 薬剤シート取出装置 |
-
2006
- 2006-03-28 JP JP2006088445A patent/JP2007261738A/ja active Pending
-
2007
- 2007-03-27 CN CNA2007800103580A patent/CN101405208A/zh active Pending
- 2007-03-27 WO PCT/JP2007/056463 patent/WO2007119530A1/ja active Application Filing
- 2007-03-27 KR KR1020087020211A patent/KR20080099272A/ko not_active Application Discontinuation
- 2007-03-28 TW TW096110796A patent/TW200746346A/zh unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016003070A (ja) * | 2014-06-13 | 2016-01-12 | 株式会社ダイフク | コンテナ昇降搬送装置 |
WO2017033845A1 (ja) * | 2015-08-24 | 2017-03-02 | 株式会社ダイフク | 物品搬送用容器の昇降搬送装置 |
JP2017043417A (ja) * | 2015-08-24 | 2017-03-02 | 株式会社ダイフク | 物品搬送用容器の昇降搬送装置 |
RU2719049C2 (ru) * | 2015-08-24 | 2020-04-16 | Дайфуку Ко., Лтд. | Поднимающее/опускающее транспортировочное устройство контейнера для транспортировки изделия |
KR20210043363A (ko) * | 2019-10-11 | 2021-04-21 | 주식회사 에스엠코어 | 트레이 병합 기능을 갖는 스토커 |
KR102246502B1 (ko) | 2019-10-11 | 2021-04-29 | 주식회사 에스엠코어 | 트레이 병합 기능을 갖는 스토커 |
Also Published As
Publication number | Publication date |
---|---|
TW200746346A (en) | 2007-12-16 |
CN101405208A (zh) | 2009-04-08 |
KR20080099272A (ko) | 2008-11-12 |
WO2007119530A1 (ja) | 2007-10-25 |
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