JP4206975B2 - 振動子、電子機器および振動子の周波数調整方法 - Google Patents

振動子、電子機器および振動子の周波数調整方法 Download PDF

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Publication number
JP4206975B2
JP4206975B2 JP2004183654A JP2004183654A JP4206975B2 JP 4206975 B2 JP4206975 B2 JP 4206975B2 JP 2004183654 A JP2004183654 A JP 2004183654A JP 2004183654 A JP2004183654 A JP 2004183654A JP 4206975 B2 JP4206975 B2 JP 4206975B2
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Japan
Prior art keywords
vibrator
sound
vibration
frequency
sound piece
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Expired - Fee Related
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JP2004183654A
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English (en)
Japanese (ja)
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JP2005098983A (ja
JP2005098983A5 (https=
Inventor
誠 江口
重男 神名
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Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2004183654A priority Critical patent/JP4206975B2/ja
Priority to US10/928,103 priority patent/US7246520B2/en
Priority to EP04020676A priority patent/EP1510783A3/en
Priority to CNB2004100741819A priority patent/CN100510632C/zh
Publication of JP2005098983A publication Critical patent/JP2005098983A/ja
Publication of JP2005098983A5 publication Critical patent/JP2005098983A5/ja
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Publication of JP4206975B2 publication Critical patent/JP4206975B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP2004183654A 2003-09-01 2004-06-22 振動子、電子機器および振動子の周波数調整方法 Expired - Fee Related JP4206975B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004183654A JP4206975B2 (ja) 2003-09-01 2004-06-22 振動子、電子機器および振動子の周波数調整方法
US10/928,103 US7246520B2 (en) 2003-09-01 2004-08-30 Transducer, electronic equipment, and method of adjusting frequency of transducer
EP04020676A EP1510783A3 (en) 2003-09-01 2004-08-31 Transducer, electronic equipment and method of adjusting the frequency of the transducer
CNB2004100741819A CN100510632C (zh) 2003-09-01 2004-09-01 振子、电子设备及振子的频率调整方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003308693 2003-09-01
JP2004183654A JP4206975B2 (ja) 2003-09-01 2004-06-22 振動子、電子機器および振動子の周波数調整方法

Publications (3)

Publication Number Publication Date
JP2005098983A JP2005098983A (ja) 2005-04-14
JP2005098983A5 JP2005098983A5 (https=) 2005-09-22
JP4206975B2 true JP4206975B2 (ja) 2009-01-14

Family

ID=34106974

Family Applications (1)

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JP2004183654A Expired - Fee Related JP4206975B2 (ja) 2003-09-01 2004-06-22 振動子、電子機器および振動子の周波数調整方法

Country Status (4)

Country Link
US (1) US7246520B2 (https=)
EP (1) EP1510783A3 (https=)
JP (1) JP4206975B2 (https=)
CN (1) CN100510632C (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005217903A (ja) * 2004-01-30 2005-08-11 Seiko Epson Corp 音叉型振動片及び電子機器
JP2006058101A (ja) * 2004-08-19 2006-03-02 Seiko Epson Corp 振動片、振動子および応用機器
DE102005045379A1 (de) * 2005-09-22 2007-03-29 Eads Deutschland Gmbh Drehratensensor
JPWO2007055133A1 (ja) * 2005-11-08 2009-04-30 パナソニック株式会社 角速度センサおよびその製造方法
JP4850572B2 (ja) * 2006-04-19 2012-01-11 富士通株式会社 角速度センサ
JP2008058062A (ja) * 2006-08-30 2008-03-13 Epson Toyocom Corp 角速度センサ
JP2008157810A (ja) * 2006-12-25 2008-07-10 Tdk Corp 角速度センサ素子および角速度センサ装置
JP4992512B2 (ja) * 2007-03-30 2012-08-08 Ｔｄｋ株式会社 角速度センサ素子および角速度センサ装置
JP2008249489A (ja) * 2007-03-30 2008-10-16 Tdk Corp 角速度センサ素子および角速度センサ装置
DE102007035770B4 (de) * 2007-07-27 2011-04-14 Continental Automotive Gmbh Vorrichtung zur Bestimmung der Viskosität und/oder Dichte einer Flüssigkeit
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
JP5516119B2 (ja) * 2010-06-21 2014-06-11 セイコーエプソン株式会社 振動型ジャイロ素子、振動型ジャイロセンサーおよび振動型ジャイロセンサーによる角速度の検出方法
KR101310408B1 (ko) * 2011-09-29 2013-09-23 삼성전기주식회사 관성센서 및 이를 이용한 각속도 검출방법
JP6003150B2 (ja) * 2012-03-28 2016-10-05 セイコーエプソン株式会社 振動片およびジャイロセンサー並びに電子機器および移動体
DE112017003796T5 (de) * 2016-07-26 2019-06-27 Kyocera Corporation Winkelgeschwindigkeitssensor, sensorelement und multi-achsen-winkelgeschwindigkeitssensor
CN120160682A (zh) * 2019-08-20 2025-06-17 高准有限公司 稳定模式分隔翅片传感器
CN111780735B (zh) * 2020-05-28 2022-03-08 深迪半导体(绍兴)有限公司 Mems陀螺仪驱动幅度校正装置及方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166571A (en) 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
JPH05240874A (ja) * 1991-12-06 1993-09-21 Canon Inc 角速度センサ
JPH0769180A (ja) 1994-05-17 1995-03-14 Mk Seiko Co Ltd 洗車装置
JP3326989B2 (ja) 1994-08-25 2002-09-24 株式会社豊田中央研究所 振動子とその調整方法および角速度センサ
US5763781A (en) * 1995-02-23 1998-06-09 Netzer; Yishay Coupled resonator vibratory rate sensor
US6065339A (en) * 1996-03-29 2000-05-23 Ngk Insulators, Ltd. Vibration gyro sensor, combined sensor and method for producing vibration gyro sensor
JPH1047971A (ja) 1996-08-05 1998-02-20 Nippon Soken Inc 角速度センサ
JPH10160479A (ja) 1996-12-03 1998-06-19 Toyota Motor Corp 角速度センサの共振周波数調整装置及び共振周波数調整方法
JPH10170272A (ja) 1996-12-10 1998-06-26 Seiko Epson Corp 圧電ジャイロセンサ及びその製造方法

Also Published As

Publication number Publication date
US20050086995A1 (en) 2005-04-28
US7246520B2 (en) 2007-07-24
EP1510783A3 (en) 2006-01-04
JP2005098983A (ja) 2005-04-14
CN1590960A (zh) 2005-03-09
EP1510783A2 (en) 2005-03-02
CN100510632C (zh) 2009-07-08

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