JP2005098983A5 - - Google Patents
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- JP2005098983A5 JP2005098983A5 JP2004183654A JP2004183654A JP2005098983A5 JP 2005098983 A5 JP2005098983 A5 JP 2005098983A5 JP 2004183654 A JP2004183654 A JP 2004183654A JP 2004183654 A JP2004183654 A JP 2004183654A JP 2005098983 A5 JP2005098983 A5 JP 2005098983A5
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004183654A JP4206975B2 (ja) | 2003-09-01 | 2004-06-22 | 振動子、電子機器および振動子の周波数調整方法 |
| US10/928,103 US7246520B2 (en) | 2003-09-01 | 2004-08-30 | Transducer, electronic equipment, and method of adjusting frequency of transducer |
| EP04020676A EP1510783A3 (en) | 2003-09-01 | 2004-08-31 | Transducer, electronic equipment and method of adjusting the frequency of the transducer |
| CNB2004100741819A CN100510632C (zh) | 2003-09-01 | 2004-09-01 | 振子、电子设备及振子的频率调整方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003308693 | 2003-09-01 | ||
| JP2004183654A JP4206975B2 (ja) | 2003-09-01 | 2004-06-22 | 振動子、電子機器および振動子の周波数調整方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005098983A JP2005098983A (ja) | 2005-04-14 |
| JP2005098983A5 true JP2005098983A5 (https=) | 2005-09-22 |
| JP4206975B2 JP4206975B2 (ja) | 2009-01-14 |
Family
ID=34106974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004183654A Expired - Fee Related JP4206975B2 (ja) | 2003-09-01 | 2004-06-22 | 振動子、電子機器および振動子の周波数調整方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7246520B2 (https=) |
| EP (1) | EP1510783A3 (https=) |
| JP (1) | JP4206975B2 (https=) |
| CN (1) | CN100510632C (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005217903A (ja) * | 2004-01-30 | 2005-08-11 | Seiko Epson Corp | 音叉型振動片及び電子機器 |
| JP2006058101A (ja) * | 2004-08-19 | 2006-03-02 | Seiko Epson Corp | 振動片、振動子および応用機器 |
| DE102005045379A1 (de) * | 2005-09-22 | 2007-03-29 | Eads Deutschland Gmbh | Drehratensensor |
| JPWO2007055133A1 (ja) * | 2005-11-08 | 2009-04-30 | パナソニック株式会社 | 角速度センサおよびその製造方法 |
| JP4850572B2 (ja) * | 2006-04-19 | 2012-01-11 | 富士通株式会社 | 角速度センサ |
| JP2008058062A (ja) * | 2006-08-30 | 2008-03-13 | Epson Toyocom Corp | 角速度センサ |
| JP2008157810A (ja) * | 2006-12-25 | 2008-07-10 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| JP4992512B2 (ja) * | 2007-03-30 | 2012-08-08 | Ｔｄｋ株式会社 | 角速度センサ素子および角速度センサ装置 |
| JP2008249489A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| DE102007035770B4 (de) * | 2007-07-27 | 2011-04-14 | Continental Automotive Gmbh | Vorrichtung zur Bestimmung der Viskosität und/oder Dichte einer Flüssigkeit |
| JP5482250B2 (ja) * | 2010-02-02 | 2014-05-07 | セイコーエプソン株式会社 | 振動体および振動デバイス |
| JP5516119B2 (ja) * | 2010-06-21 | 2014-06-11 | セイコーエプソン株式会社 | 振動型ジャイロ素子、振動型ジャイロセンサーおよび振動型ジャイロセンサーによる角速度の検出方法 |
| KR101310408B1 (ko) * | 2011-09-29 | 2013-09-23 | 삼성전기주식회사 | 관성센서 및 이를 이용한 각속도 검출방법 |
| JP6003150B2 (ja) * | 2012-03-28 | 2016-10-05 | セイコーエプソン株式会社 | 振動片およびジャイロセンサー並びに電子機器および移動体 |
| DE112017003796T5 (de) * | 2016-07-26 | 2019-06-27 | Kyocera Corporation | Winkelgeschwindigkeitssensor, sensorelement und multi-achsen-winkelgeschwindigkeitssensor |
| CN120160682A (zh) * | 2019-08-20 | 2025-06-17 | 高准有限公司 | 稳定模式分隔翅片传感器 |
| CN111780735B (zh) * | 2020-05-28 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | Mems陀螺仪驱动幅度校正装置及方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5166571A (en) | 1987-08-28 | 1992-11-24 | Nec Home Electronics, Ltd. | Vibration gyro having an H-shaped vibrator |
| JPH05240874A (ja) * | 1991-12-06 | 1993-09-21 | Canon Inc | 角速度センサ |
| JPH0769180A (ja) | 1994-05-17 | 1995-03-14 | Mk Seiko Co Ltd | 洗車装置 |
| JP3326989B2 (ja) | 1994-08-25 | 2002-09-24 | 株式会社豊田中央研究所 | 振動子とその調整方法および角速度センサ |
| US5763781A (en) * | 1995-02-23 | 1998-06-09 | Netzer; Yishay | Coupled resonator vibratory rate sensor |
| US6065339A (en) * | 1996-03-29 | 2000-05-23 | Ngk Insulators, Ltd. | Vibration gyro sensor, combined sensor and method for producing vibration gyro sensor |
| JPH1047971A (ja) | 1996-08-05 | 1998-02-20 | Nippon Soken Inc | 角速度センサ |
| JPH10160479A (ja) | 1996-12-03 | 1998-06-19 | Toyota Motor Corp | 角速度センサの共振周波数調整装置及び共振周波数調整方法 |
| JPH10170272A (ja) | 1996-12-10 | 1998-06-26 | Seiko Epson Corp | 圧電ジャイロセンサ及びその製造方法 |
-
2004
- 2004-06-22 JP JP2004183654A patent/JP4206975B2/ja not_active Expired - Fee Related
- 2004-08-30 US US10/928,103 patent/US7246520B2/en not_active Expired - Fee Related
- 2004-08-31 EP EP04020676A patent/EP1510783A3/en not_active Withdrawn
- 2004-09-01 CN CNB2004100741819A patent/CN100510632C/zh not_active Expired - Fee Related