JP4181559B2 - オゾン発生装置用放電セル - Google Patents
オゾン発生装置用放電セル Download PDFInfo
- Publication number
- JP4181559B2 JP4181559B2 JP2005126596A JP2005126596A JP4181559B2 JP 4181559 B2 JP4181559 B2 JP 4181559B2 JP 2005126596 A JP2005126596 A JP 2005126596A JP 2005126596 A JP2005126596 A JP 2005126596A JP 4181559 B2 JP4181559 B2 JP 4181559B2
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- Prior art keywords
- plate
- titanium oxide
- discharge cell
- dielectric
- ozone generator
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- Oxygen, Ozone, And Oxides In General (AREA)
Description
3 放電空間
5 板体(誘電体)
5a 本体
5b 酸化チタン含有層
Claims (5)
- 一対の電極が隙間をあけて配置され、この電極間に放電空間を形成するべく一対の電極のうちの少なくとも一方の電極表面上に誘電体が配置されたオゾン発生装置用放電セルにおいて、少なくとも一つの誘電体が予め成形された板体であり、且つこの誘電体は板体からなる本体と、該本体の表面上に積層され、金属元素量比率で10重量%以上の酸化チタンを含む酸化チタン含有層とからなることを特徴とするオゾン発生装置用放電セル。
- 前記板体からなる誘電体の厚みが0.2〜2.0mmである請求項1に記載のオゾン発生装置用放電セル。
- 前記本体はセラミック板、サファイア板、アルミナ板、ガラス板又は石英板である請求項1に記載のオゾン発生装置用放電セル。
- 前記酸化チタン含有層はスパッタリング、イオンプレーティング又は蒸着による被覆層である請求項1に記載のオゾン発生装置用放電セル。
- 前記酸化チタン含有層の厚みが0.05μm以上である請求項1に記載のオゾン発生装置用放電セル。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005126596A JP4181559B2 (ja) | 2005-04-25 | 2005-04-25 | オゾン発生装置用放電セル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005126596A JP4181559B2 (ja) | 2005-04-25 | 2005-04-25 | オゾン発生装置用放電セル |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP18757197A Division JP3740254B2 (ja) | 1997-06-27 | 1997-06-27 | オゾン発生装置用放電セル |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008174585A Division JP2008285408A (ja) | 2008-07-03 | 2008-07-03 | オゾン発生方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005220019A JP2005220019A (ja) | 2005-08-18 |
JP4181559B2 true JP4181559B2 (ja) | 2008-11-19 |
Family
ID=34995938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005126596A Expired - Fee Related JP4181559B2 (ja) | 2005-04-25 | 2005-04-25 | オゾン発生装置用放電セル |
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JP (1) | JP4181559B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5603581B2 (ja) * | 2009-09-28 | 2014-10-08 | 住友精密工業株式会社 | オゾンガス発生装置及びその製造方法 |
JP5833721B2 (ja) * | 2014-08-29 | 2015-12-16 | 住友精密工業株式会社 | オゾンガス発生装置 |
KR102145120B1 (ko) * | 2014-10-29 | 2020-08-14 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | 오존 발생 장치 |
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2005
- 2005-04-25 JP JP2005126596A patent/JP4181559B2/ja not_active Expired - Fee Related
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JP2005220019A (ja) | 2005-08-18 |
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