JP4164528B2 - 揺動体を含む構造体の製造方法 - Google Patents

揺動体を含む構造体の製造方法 Download PDF

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Publication number
JP4164528B2
JP4164528B2 JP2007031429A JP2007031429A JP4164528B2 JP 4164528 B2 JP4164528 B2 JP 4164528B2 JP 2007031429 A JP2007031429 A JP 2007031429A JP 2007031429 A JP2007031429 A JP 2007031429A JP 4164528 B2 JP4164528 B2 JP 4164528B2
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Japan
Prior art keywords
torsion
single crystal
substrate
torsion spring
mirror
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Expired - Fee Related
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JP2007031429A
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English (en)
Japanese (ja)
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JP2007196376A (ja
JP2007196376A5 (enExample
Inventor
貴久 加藤
進 安田
太 廣瀬
隆行 八木
英正 水谷
康弘 島田
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Canon Inc
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Canon Inc
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Priority to JP2007031429A priority Critical patent/JP4164528B2/ja
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  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Facsimile Heads (AREA)
JP2007031429A 2001-02-22 2007-02-13 揺動体を含む構造体の製造方法 Expired - Fee Related JP4164528B2 (ja)

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JP2007031429A JP4164528B2 (ja) 2001-02-22 2007-02-13 揺動体を含む構造体の製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001047296 2001-02-22
JP2001047295 2001-02-22
JP2001047297 2001-02-22
JP2007031429A JP4164528B2 (ja) 2001-02-22 2007-02-13 揺動体を含む構造体の製造方法

Related Parent Applications (1)

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JP2001279383A Division JP4124986B2 (ja) 2001-02-22 2001-09-14 マイクロ構造体、マイクロ力学量センサ、マイクロアクチュエータ、マイクロ光偏向器、及び光走査型ディスプレイ

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JP2007196376A JP2007196376A (ja) 2007-08-09
JP2007196376A5 JP2007196376A5 (enExample) 2008-06-26
JP4164528B2 true JP4164528B2 (ja) 2008-10-15

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009139546A (ja) * 2007-12-05 2009-06-25 Anritsu Corp 可変波長光源
JP2011107675A (ja) * 2009-10-20 2011-06-02 Seiko Epson Corp 光偏向素子、光偏向器、及び画像形成装置
JP6648062B2 (ja) * 2017-03-31 2020-02-14 ミネベアミツミ株式会社 ポリゴンミラースキャナモーター
JP6519033B1 (ja) 2018-07-03 2019-05-29 Ｄｏｌｐｈｉｎ株式会社 物体検出装置、物体検出方法、および物体検出装置の設計方法
JP6518959B1 (ja) * 2018-07-10 2019-05-29 Ｄｏｌｐｈｉｎ株式会社 物体検出装置、制御方法及びプログラム
JPWO2020045152A1 (ja) * 2018-08-31 2021-08-26 パナソニックＩｐマネジメント株式会社 光学反射素子
JP6521164B1 (ja) * 2018-11-01 2019-05-29 Ｄｏｌｐｈｉｎ株式会社 物体検出装置
JP6521551B1 (ja) * 2018-11-01 2019-05-29 Ｄｏｌｐｈｉｎ株式会社 物体検出装置、制御方法及びプログラム
JP6541165B1 (ja) * 2019-01-24 2019-07-10 Ｄｏｌｐｈｉｎ株式会社 光走査方法、光走査装置及び物体検出装置
JP6651110B1 (ja) 2019-05-28 2020-02-19 Ｄｏｌｐｈｉｎ株式会社 物体検出装置

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