JP4126212B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

Info

Publication number
JP4126212B2
JP4126212B2 JP2002267257A JP2002267257A JP4126212B2 JP 4126212 B2 JP4126212 B2 JP 4126212B2 JP 2002267257 A JP2002267257 A JP 2002267257A JP 2002267257 A JP2002267257 A JP 2002267257A JP 4126212 B2 JP4126212 B2 JP 4126212B2
Authority
JP
Japan
Prior art keywords
pump
coupling
bolt
base
pump case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002267257A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003214379A5 (enExample
JP2003214379A (ja
Inventor
伸治 川西
祐幸 坂口
靖 前島
智 奥寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26624604&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP4126212(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2002267257A priority Critical patent/JP4126212B2/ja
Priority to DE60202740T priority patent/DE60202740T3/de
Priority to AT02257646T priority patent/ATE288036T1/de
Priority to EP02257646A priority patent/EP1314892B2/en
Priority to US10/294,828 priority patent/US6752588B2/en
Priority to KR1020020071193A priority patent/KR100860179B1/ko
Publication of JP2003214379A publication Critical patent/JP2003214379A/ja
Publication of JP2003214379A5 publication Critical patent/JP2003214379A5/ja
Publication of JP4126212B2 publication Critical patent/JP4126212B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
JP2002267257A 2001-11-19 2002-09-12 真空ポンプ Expired - Lifetime JP4126212B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2002267257A JP4126212B2 (ja) 2001-11-19 2002-09-12 真空ポンプ
DE60202740T DE60202740T3 (de) 2001-11-19 2002-11-05 Vakuumpumpe
AT02257646T ATE288036T1 (de) 2001-11-19 2002-11-05 Vakuumpumpe
EP02257646A EP1314892B2 (en) 2001-11-19 2002-11-05 Vacuum pump
US10/294,828 US6752588B2 (en) 2001-11-19 2002-11-14 Vacuum pump
KR1020020071193A KR100860179B1 (ko) 2001-11-19 2002-11-15 진공 펌프

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001353741 2001-11-19
JP2001-353741 2001-11-19
JP2002267257A JP4126212B2 (ja) 2001-11-19 2002-09-12 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2003214379A JP2003214379A (ja) 2003-07-30
JP2003214379A5 JP2003214379A5 (enExample) 2005-06-30
JP4126212B2 true JP4126212B2 (ja) 2008-07-30

Family

ID=26624604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002267257A Expired - Lifetime JP4126212B2 (ja) 2001-11-19 2002-09-12 真空ポンプ

Country Status (6)

Country Link
US (1) US6752588B2 (enExample)
EP (1) EP1314892B2 (enExample)
JP (1) JP4126212B2 (enExample)
KR (1) KR100860179B1 (enExample)
AT (1) ATE288036T1 (enExample)
DE (1) DE60202740T3 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4484470B2 (ja) 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
JP4499388B2 (ja) * 2003-08-27 2010-07-07 エドワーズ株式会社 分子ポンプおよび結合装置
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
US7140833B2 (en) * 2004-11-04 2006-11-28 The Boc Group, Llc Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
JP4609082B2 (ja) * 2005-01-25 2011-01-12 株式会社島津製作所 フランジおよびこのフランジを備えたターボ分子ポンプ
GB0520750D0 (en) 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
US8379834B2 (en) 2006-01-21 2013-02-19 Soundbite Communications, Inc. Method and system for managing interactive communications campaigns
JP4949746B2 (ja) * 2006-03-15 2012-06-13 エドワーズ株式会社 分子ポンプ、及びフランジ
DE102006058672B4 (de) * 2006-12-13 2016-09-15 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
JP5315100B2 (ja) * 2009-03-18 2013-10-16 株式会社ニューフレアテクノロジー 描画装置
DE102009039119B4 (de) 2009-08-28 2022-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe und Anordnung mit Vakuumpumpe
JP5343884B2 (ja) * 2010-02-16 2013-11-13 株式会社島津製作所 ターボ分子ポンプ
US9388816B2 (en) * 2010-09-06 2016-07-12 Edwards Japan Limited Turbo-molecular pump
JP5768670B2 (ja) * 2011-11-09 2015-08-26 株式会社島津製作所 ターボ分子ポンプ装置
DE102014104161B4 (de) * 2014-03-26 2025-09-18 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
JP6736904B2 (ja) * 2016-02-16 2020-08-05 株式会社デンソー 駆動装置
US10156240B2 (en) * 2016-06-16 2018-12-18 Scott C. Mancl Motor-driven fan with trapped adhesive for minimizing vibration
JP7048210B2 (ja) * 2017-01-20 2022-04-05 エドワーズ株式会社 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ
FR3077105B1 (fr) * 2018-01-19 2020-02-14 Safran Electrical & Power Ventilateur pour un groupe de refroidissement d'aeronef
DE102018201643A1 (de) * 2018-02-02 2019-08-08 Brose Fahrzeugteile GmbH & Co. Kommanditgesellschaft, Würzburg Stator und Elektromotor
CN108443178B (zh) * 2018-03-13 2024-07-26 吴江市大印墨风力发电机制造有限公司 一种风扇
JP7506295B2 (ja) * 2019-12-27 2024-06-26 日亜化学工業株式会社 波長変換部材及び発光装置
EP3760872B1 (de) * 2020-07-03 2022-06-08 Pfeiffer Vacuum Technology AG Vakuumpumpe mit befestigungsvorkehrung zur anbringung der pumpe an einer befestigungsstruktur sowie pumpstand mit solch einer daran angebrachten vakuumpumpe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4086012A (en) * 1976-09-20 1978-04-25 The United States Of America As Represented By The Secretary Of The Navy Rotational energy absorbing coupling
JP3426734B2 (ja) * 1994-10-17 2003-07-14 三菱重工業株式会社 ターボ分子ポンプ
JP3879169B2 (ja) 1997-03-31 2007-02-07 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
KR20030041782A (ko) 2003-05-27
ATE288036T1 (de) 2005-02-15
EP1314892B2 (en) 2010-06-30
KR100860179B1 (ko) 2008-09-24
DE60202740D1 (de) 2005-03-03
US20030095862A1 (en) 2003-05-22
US6752588B2 (en) 2004-06-22
EP1314892A1 (en) 2003-05-28
JP2003214379A (ja) 2003-07-30
DE60202740T3 (de) 2011-02-10
EP1314892B1 (en) 2005-01-26
DE60202740T2 (de) 2006-01-05

Similar Documents

Publication Publication Date Title
JP4126212B2 (ja) 真空ポンプ
JP4484470B2 (ja) 分子ポンプ、及びフランジ
KR20020084410A (ko) 진공 펌프
US6824349B2 (en) Vacuum pump
CN114909381B (zh) 一种螺栓防转装配结构及采用该装配结构的航空发动机
CN1740523A (zh) 具有转子轴向保持方法的涡轮机
JP2000205183A (ja) タ―ボ分子ポンプ
US7341423B2 (en) Molecular pump and connecting device
JP4949746B2 (ja) 分子ポンプ、及びフランジ
JP4147042B2 (ja) 真空ポンプ
JP4461944B2 (ja) ターボ分子ポンプ
JP5137365B2 (ja) 真空ポンプ及びフランジ
JP4609082B2 (ja) フランジおよびこのフランジを備えたターボ分子ポンプ
JP2003155997A (ja) 真空ポンプ
JP2002285989A (ja) 真空ポンプ
JP7378697B2 (ja) 真空ポンプ
JP2009287576A (ja) 分子ポンプ、及びフランジ
KR20030041781A (ko) 진공 펌프
JP3784250B2 (ja) 真空ポンプ
JP2002285990A (ja) 真空ポンプ
KR200271398Y1 (ko) 볼 베어링 조립용 공구
CN117823325A (zh) 安装支架以及风力发电机组
KR100872166B1 (ko) 파워스티어링 오일펌프의 체결구조
WO2023097816A1 (zh) 主轴结构、发电机及发电机装配方法
JPH0676699U (ja) ロータの振動防止装置

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20040108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040301

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041019

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041019

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070913

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070926

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071119

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080414

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080512

R150 Certificate of patent or registration of utility model

Ref document number: 4126212

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110516

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120516

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130516

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140516

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term