DE60202740D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60202740D1
DE60202740D1 DE60202740T DE60202740T DE60202740D1 DE 60202740 D1 DE60202740 D1 DE 60202740D1 DE 60202740 T DE60202740 T DE 60202740T DE 60202740 T DE60202740 T DE 60202740T DE 60202740 D1 DE60202740 D1 DE 60202740D1
Authority
DE
Germany
Prior art keywords
pump case
vacuum chamber
base member
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60202740T
Other languages
English (en)
Other versions
DE60202740T3 (de
DE60202740T2 (de
Inventor
Shinji Kawanishi
Yoshiyuki Sakaguchi
Yasushi Maejima
Satoshi Okudera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26624604&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60202740(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Application granted granted Critical
Publication of DE60202740D1 publication Critical patent/DE60202740D1/de
Publication of DE60202740T2 publication Critical patent/DE60202740T2/de
Publication of DE60202740T3 publication Critical patent/DE60202740T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
DE60202740T 2001-11-19 2002-11-05 Vakuumpumpe Expired - Lifetime DE60202740T3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001353741 2001-11-19
JP2001353741 2001-11-19
JP2002267257 2002-09-12
JP2002267257A JP4126212B2 (ja) 2001-11-19 2002-09-12 真空ポンプ

Publications (3)

Publication Number Publication Date
DE60202740D1 true DE60202740D1 (de) 2005-03-03
DE60202740T2 DE60202740T2 (de) 2006-01-05
DE60202740T3 DE60202740T3 (de) 2011-02-10

Family

ID=26624604

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60202740T Expired - Lifetime DE60202740T3 (de) 2001-11-19 2002-11-05 Vakuumpumpe

Country Status (6)

Country Link
US (1) US6752588B2 (de)
EP (1) EP1314892B2 (de)
JP (1) JP4126212B2 (de)
KR (1) KR100860179B1 (de)
AT (1) ATE288036T1 (de)
DE (1) DE60202740T3 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4484470B2 (ja) * 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
JP4499388B2 (ja) * 2003-08-27 2010-07-07 エドワーズ株式会社 分子ポンプおよび結合装置
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
US7140833B2 (en) * 2004-11-04 2006-11-28 The Boc Group, Llc Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
JP4609082B2 (ja) * 2005-01-25 2011-01-12 株式会社島津製作所 フランジおよびこのフランジを備えたターボ分子ポンプ
GB0520750D0 (en) * 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
US8379834B2 (en) 2006-01-21 2013-02-19 Soundbite Communications, Inc. Method and system for managing interactive communications campaigns
JP4949746B2 (ja) 2006-03-15 2012-06-13 エドワーズ株式会社 分子ポンプ、及びフランジ
DE102006058672B4 (de) * 2006-12-13 2016-09-15 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
JP5315100B2 (ja) * 2009-03-18 2013-10-16 株式会社ニューフレアテクノロジー 描画装置
DE102009039119B4 (de) 2009-08-28 2022-11-03 Pfeiffer Vacuum Gmbh Vakuumpumpe und Anordnung mit Vakuumpumpe
JP5343884B2 (ja) * 2010-02-16 2013-11-13 株式会社島津製作所 ターボ分子ポンプ
US9388816B2 (en) * 2010-09-06 2016-07-12 Edwards Japan Limited Turbo-molecular pump
JP5768670B2 (ja) * 2011-11-09 2015-08-26 株式会社島津製作所 ターボ分子ポンプ装置
DE102014104161A1 (de) * 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
JP6736904B2 (ja) * 2016-02-16 2020-08-05 株式会社デンソー 駆動装置
US10156240B2 (en) * 2016-06-16 2018-12-18 Scott C. Mancl Motor-driven fan with trapped adhesive for minimizing vibration
JP7048210B2 (ja) * 2017-01-20 2022-04-05 エドワーズ株式会社 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ
FR3077105B1 (fr) * 2018-01-19 2020-02-14 Safran Electrical & Power Ventilateur pour un groupe de refroidissement d'aeronef
DE102018201643A1 (de) * 2018-02-02 2019-08-08 Brose Fahrzeugteile GmbH & Co. Kommanditgesellschaft, Würzburg Stator und Elektromotor
CN108443178B (zh) * 2018-03-13 2024-07-26 吴江市大印墨风力发电机制造有限公司 一种风扇
JP7506295B2 (ja) * 2019-12-27 2024-06-26 日亜化学工業株式会社 波長変換部材及び発光装置
EP3760872B1 (de) * 2020-07-03 2022-06-08 Pfeiffer Vacuum Technology AG Vakuumpumpe mit befestigungsvorkehrung zur anbringung der pumpe an einer befestigungsstruktur sowie pumpstand mit solch einer daran angebrachten vakuumpumpe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4086012A (en) * 1976-09-20 1978-04-25 The United States Of America As Represented By The Secretary Of The Navy Rotational energy absorbing coupling
JP3426734B2 (ja) * 1994-10-17 2003-07-14 三菱重工業株式会社 ターボ分子ポンプ
JP3879169B2 (ja) 1997-03-31 2007-02-07 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
DE60202740T3 (de) 2011-02-10
EP1314892B1 (de) 2005-01-26
EP1314892B2 (de) 2010-06-30
JP4126212B2 (ja) 2008-07-30
EP1314892A1 (de) 2003-05-28
KR20030041782A (ko) 2003-05-27
KR100860179B1 (ko) 2008-09-24
US6752588B2 (en) 2004-06-22
DE60202740T2 (de) 2006-01-05
ATE288036T1 (de) 2005-02-15
US20030095862A1 (en) 2003-05-22
JP2003214379A (ja) 2003-07-30

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP

8366 Restricted maintained after opposition proceedings