JP4103027B2 - 薄膜ガスセンサ - Google Patents

薄膜ガスセンサ Download PDF

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Publication number
JP4103027B2
JP4103027B2 JP2000304901A JP2000304901A JP4103027B2 JP 4103027 B2 JP4103027 B2 JP 4103027B2 JP 2000304901 A JP2000304901 A JP 2000304901A JP 2000304901 A JP2000304901 A JP 2000304901A JP 4103027 B2 JP4103027 B2 JP 4103027B2
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JP
Japan
Prior art keywords
thin film
heater
film
gas sensor
sio
Prior art date
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Expired - Lifetime
Application number
JP2000304901A
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English (en)
Japanese (ja)
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JP2002116171A (ja
JP2002116171A5 (enExample
Inventor
健二 国原
克己 小野寺
卓弥 鈴木
慎次 荻野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric FA Components and Systems Co Ltd
Original Assignee
Fuji Electric FA Components and Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Fuji Electric FA Components and Systems Co Ltd filed Critical Fuji Electric FA Components and Systems Co Ltd
Priority to JP2000304901A priority Critical patent/JP4103027B2/ja
Publication of JP2002116171A publication Critical patent/JP2002116171A/ja
Publication of JP2002116171A5 publication Critical patent/JP2002116171A5/ja
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Publication of JP4103027B2 publication Critical patent/JP4103027B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2000304901A 2000-10-04 2000-10-04 薄膜ガスセンサ Expired - Lifetime JP4103027B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000304901A JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000304901A JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Publications (3)

Publication Number Publication Date
JP2002116171A JP2002116171A (ja) 2002-04-19
JP2002116171A5 JP2002116171A5 (enExample) 2005-12-22
JP4103027B2 true JP4103027B2 (ja) 2008-06-18

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ID=18785864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000304901A Expired - Lifetime JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Country Status (1)

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JP (1) JP4103027B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4575581B2 (ja) * 2000-11-24 2010-11-04 大阪瓦斯株式会社 ガスセンサ
GB0500393D0 (en) * 2005-01-10 2005-02-16 Univ Warwick Microheaters
GB2464016B (en) * 2005-03-15 2010-07-28 Univ Warwick Smart sensors
JP2007271636A (ja) * 2007-06-18 2007-10-18 Osaka Gas Co Ltd ガス検出装置及びガス検出方法
JP2009058389A (ja) * 2007-08-31 2009-03-19 New Cosmos Electric Corp ガス検知素子
EP2762866B1 (en) * 2013-01-31 2017-08-09 Sensirion AG CMOS gas sensor and method for manufacturing the same

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Publication number Publication date
JP2002116171A (ja) 2002-04-19

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