JP4075833B2 - 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ - Google Patents

圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ Download PDF

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JP4075833B2
JP4075833B2 JP2004093764A JP2004093764A JP4075833B2 JP 4075833 B2 JP4075833 B2 JP 4075833B2 JP 2004093764 A JP2004093764 A JP 2004093764A JP 2004093764 A JP2004093764 A JP 2004093764A JP 4075833 B2 JP4075833 B2 JP 4075833B2
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Japan
Prior art keywords
electrode
detection
arm
piezoelectric
vibrating
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Japanese (ja)
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JP2005017273A (ja
JP2005017273A5 (enExample
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修 川内
康治 渡邊
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2004093764A priority Critical patent/JP4075833B2/ja
Priority to US10/852,606 priority patent/US7126262B2/en
Priority to CNB2004100461663A priority patent/CN100351609C/zh
Publication of JP2005017273A publication Critical patent/JP2005017273A/ja
Publication of JP2005017273A5 publication Critical patent/JP2005017273A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes
    • Y10T74/1261—Gyroscopes with pick off
    • Y10T74/1275—Electrical

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2004093764A 2003-06-04 2004-03-26 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ Expired - Lifetime JP4075833B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004093764A JP4075833B2 (ja) 2003-06-04 2004-03-26 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ
US10/852,606 US7126262B2 (en) 2003-06-04 2004-05-25 Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor
CNB2004100461663A CN100351609C (zh) 2003-06-04 2004-06-02 压电振动陀螺元件及其制造方法、压电振动陀螺传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003159720 2003-06-04
JP2004093764A JP4075833B2 (ja) 2003-06-04 2004-03-26 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ

Publications (3)

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JP2005017273A JP2005017273A (ja) 2005-01-20
JP2005017273A5 JP2005017273A5 (enExample) 2005-09-22
JP4075833B2 true JP4075833B2 (ja) 2008-04-16

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JP2004093764A Expired - Lifetime JP4075833B2 (ja) 2003-06-04 2004-03-26 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ

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US (1) US7126262B2 (enExample)
JP (1) JP4075833B2 (enExample)
CN (1) CN100351609C (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058101A (ja) * 2004-08-19 2006-03-02 Seiko Epson Corp 振動片、振動子および応用機器
US20060238078A1 (en) * 2005-04-21 2006-10-26 Honeywell International, Inc. Wireless and passive acoustic wave rotation rate sensor
JP4671284B2 (ja) * 2005-08-30 2011-04-13 日本碍子株式会社 振動型ジャイロスコープ用測定素子
JP4771062B2 (ja) * 2005-09-26 2011-09-14 セイコーエプソン株式会社 振動型ジャイロスコープ用測定素子
JP4758200B2 (ja) * 2005-10-28 2011-08-24 京セラキンセキ株式会社 露光装置、及び露光方法
JP4694953B2 (ja) * 2005-11-30 2011-06-08 セイコーインスツル株式会社 圧電振動片の製造方法、圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP2008194729A (ja) * 2007-02-13 2008-08-28 Fujitsu Ltd 小型デバイスの製造方法、レーザ加工方法及びレーザ加工装置
JP5184142B2 (ja) * 2008-02-26 2013-04-17 セイコーインスツル株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
WO2010019278A1 (en) * 2008-08-15 2010-02-18 Sural Solid-state inertial sensor on chip
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
US8516887B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric z-axis gyroscope
JP4849284B2 (ja) * 2010-12-27 2012-01-11 セイコーエプソン株式会社 振動型ジャイロスコープ用測定素子
JP5870532B2 (ja) * 2011-08-09 2016-03-01 セイコーエプソン株式会社 物理量検出素子、物理量検出装置および電子機器
JP5838689B2 (ja) * 2011-09-26 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5982896B2 (ja) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 センサー素子、センサーデバイスおよび電子機器
JP5982054B1 (ja) * 2015-12-16 2016-08-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429596A (en) 1977-08-09 1979-03-05 Seiko Epson Corp Side electrode splitting method for thin plate crystal oscillator
JPS59104813A (ja) 1982-12-07 1984-06-16 Matsushima Kogyo Co Ltd 縦振動型圧電振動子の電極形成方法
US5396144A (en) 1993-08-02 1995-03-07 New S.D., Inc. Rotation rate sensor with center mounted tuning fork
JPH0823249A (ja) 1994-07-07 1996-01-23 Daishinku Co 音叉型水晶振動子の電極形成方法
US6747393B2 (en) * 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
JPH10170272A (ja) * 1996-12-10 1998-06-26 Seiko Epson Corp 圧電ジャイロセンサ及びその製造方法
JPH116735A (ja) * 1997-06-18 1999-01-12 Kinseki Ltd 角速度センサ
JP4107768B2 (ja) 1999-07-01 2008-06-25 日本碍子株式会社 振動子および振動型ジャイロスコープ
JP4070365B2 (ja) * 1999-07-30 2008-04-02 日本碍子株式会社 振動型ジャイロスコープ
JP2002368302A (ja) * 2001-06-11 2002-12-20 Matsushita Electric Ind Co Ltd 立体への電極形成方法
JP3966719B2 (ja) 2001-11-30 2007-08-29 日本碍子株式会社 角速度測定装置
JP3992985B2 (ja) 2002-01-24 2007-10-17 セイコーインスツル株式会社 圧電振動子の製造方法
US6858972B2 (en) * 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method

Also Published As

Publication number Publication date
JP2005017273A (ja) 2005-01-20
US20050006988A1 (en) 2005-01-13
CN1573290A (zh) 2005-02-02
CN100351609C (zh) 2007-11-28
US7126262B2 (en) 2006-10-24

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