CN100351609C - 压电振动陀螺元件及其制造方法、压电振动陀螺传感器 - Google Patents

压电振动陀螺元件及其制造方法、压电振动陀螺传感器 Download PDF

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Publication number
CN100351609C
CN100351609C CNB2004100461663A CN200410046166A CN100351609C CN 100351609 C CN100351609 C CN 100351609C CN B2004100461663 A CNB2004100461663 A CN B2004100461663A CN 200410046166 A CN200410046166 A CN 200410046166A CN 100351609 C CN100351609 C CN 100351609C
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China
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arm
detection
extension
driving
central support
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Expired - Fee Related
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CNB2004100461663A
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English (en)
Chinese (zh)
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CN1573290A (zh
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川内修
渡边康治
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes
    • Y10T74/1261—Gyroscopes with pick off
    • Y10T74/1275—Electrical

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CNB2004100461663A 2003-06-04 2004-06-02 压电振动陀螺元件及其制造方法、压电振动陀螺传感器 Expired - Fee Related CN100351609C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP159720/2003 2003-06-04
JP2003159720 2003-06-04
JP2004093764A JP4075833B2 (ja) 2003-06-04 2004-03-26 圧電振動ジャイロ素子、その製造方法、及び圧電振動ジャイロセンサ
JP093764/2004 2004-03-26

Publications (2)

Publication Number Publication Date
CN1573290A CN1573290A (zh) 2005-02-02
CN100351609C true CN100351609C (zh) 2007-11-28

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US (1) US7126262B2 (enExample)
JP (1) JP4075833B2 (enExample)
CN (1) CN100351609C (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103308040A (zh) * 2012-03-13 2013-09-18 精工爱普生株式会社 传感器元件、传感器器件以及电子设备

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058101A (ja) * 2004-08-19 2006-03-02 Seiko Epson Corp 振動片、振動子および応用機器
US20060238078A1 (en) * 2005-04-21 2006-10-26 Honeywell International, Inc. Wireless and passive acoustic wave rotation rate sensor
JP4671284B2 (ja) * 2005-08-30 2011-04-13 日本碍子株式会社 振動型ジャイロスコープ用測定素子
JP4771062B2 (ja) * 2005-09-26 2011-09-14 セイコーエプソン株式会社 振動型ジャイロスコープ用測定素子
JP4758200B2 (ja) * 2005-10-28 2011-08-24 京セラキンセキ株式会社 露光装置、及び露光方法
JP4694953B2 (ja) * 2005-11-30 2011-06-08 セイコーインスツル株式会社 圧電振動片の製造方法、圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP2008194729A (ja) * 2007-02-13 2008-08-28 Fujitsu Ltd 小型デバイスの製造方法、レーザ加工方法及びレーザ加工装置
JP5184142B2 (ja) * 2008-02-26 2013-04-17 セイコーインスツル株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
WO2010019278A1 (en) * 2008-08-15 2010-02-18 Sural Solid-state inertial sensor on chip
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
US8516887B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric z-axis gyroscope
JP4849284B2 (ja) * 2010-12-27 2012-01-11 セイコーエプソン株式会社 振動型ジャイロスコープ用測定素子
JP5870532B2 (ja) * 2011-08-09 2016-03-01 セイコーエプソン株式会社 物理量検出素子、物理量検出装置および電子機器
JP5838689B2 (ja) * 2011-09-26 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5982054B1 (ja) * 2015-12-16 2016-08-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104813A (ja) * 1982-12-07 1984-06-16 Matsushima Kogyo Co Ltd 縦振動型圧電振動子の電極形成方法
JPH0823249A (ja) * 1994-07-07 1996-01-23 Daishinku Co 音叉型水晶振動子の電極形成方法
JPH10170272A (ja) * 1996-12-10 1998-06-26 Seiko Epson Corp 圧電ジャイロセンサ及びその製造方法
JPH116735A (ja) * 1997-06-18 1999-01-12 Kinseki Ltd 角速度センサ
JP2001012952A (ja) * 1999-07-01 2001-01-19 Ngk Insulators Ltd 振動系、振動子および振動型ジャイロスコープ
JP2001041749A (ja) * 1999-07-30 2001-02-16 Ngk Insulators Ltd 振動型ジャイロスコープ
JP2002368302A (ja) * 2001-06-11 2002-12-20 Matsushita Electric Ind Co Ltd 立体への電極形成方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429596A (en) 1977-08-09 1979-03-05 Seiko Epson Corp Side electrode splitting method for thin plate crystal oscillator
US5396144A (en) 1993-08-02 1995-03-07 New S.D., Inc. Rotation rate sensor with center mounted tuning fork
US6747393B2 (en) * 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
JP3966719B2 (ja) 2001-11-30 2007-08-29 日本碍子株式会社 角速度測定装置
JP3992985B2 (ja) 2002-01-24 2007-10-17 セイコーインスツル株式会社 圧電振動子の製造方法
US6858972B2 (en) * 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104813A (ja) * 1982-12-07 1984-06-16 Matsushima Kogyo Co Ltd 縦振動型圧電振動子の電極形成方法
JPH0823249A (ja) * 1994-07-07 1996-01-23 Daishinku Co 音叉型水晶振動子の電極形成方法
JPH10170272A (ja) * 1996-12-10 1998-06-26 Seiko Epson Corp 圧電ジャイロセンサ及びその製造方法
JPH116735A (ja) * 1997-06-18 1999-01-12 Kinseki Ltd 角速度センサ
JP2001012952A (ja) * 1999-07-01 2001-01-19 Ngk Insulators Ltd 振動系、振動子および振動型ジャイロスコープ
JP2001041749A (ja) * 1999-07-30 2001-02-16 Ngk Insulators Ltd 振動型ジャイロスコープ
JP2002368302A (ja) * 2001-06-11 2002-12-20 Matsushita Electric Ind Co Ltd 立体への電極形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103308040A (zh) * 2012-03-13 2013-09-18 精工爱普生株式会社 传感器元件、传感器器件以及电子设备

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JP2005017273A (ja) 2005-01-20
US20050006988A1 (en) 2005-01-13
JP4075833B2 (ja) 2008-04-16
CN1573290A (zh) 2005-02-02
US7126262B2 (en) 2006-10-24

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Granted publication date: 20071128