JP4032462B2 - 紫外用光学素子 - Google Patents

紫外用光学素子 Download PDF

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Publication number
JP4032462B2
JP4032462B2 JP26524297A JP26524297A JP4032462B2 JP 4032462 B2 JP4032462 B2 JP 4032462B2 JP 26524297 A JP26524297 A JP 26524297A JP 26524297 A JP26524297 A JP 26524297A JP 4032462 B2 JP4032462 B2 JP 4032462B2
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JP
Japan
Prior art keywords
optical element
transmittance
loss
treatment
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26524297A
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English (en)
Japanese (ja)
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JPH10158035A5 (https=
JPH10158035A (ja
Inventor
宏樹 神保
明子 守屋
典男 小峯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
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Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP26524297A priority Critical patent/JP4032462B2/ja
Publication of JPH10158035A publication Critical patent/JPH10158035A/ja
Publication of JPH10158035A5 publication Critical patent/JPH10158035A5/ja
Application granted granted Critical
Publication of JP4032462B2 publication Critical patent/JP4032462B2/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
JP26524297A 1996-09-30 1997-09-30 紫外用光学素子 Expired - Lifetime JP4032462B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26524297A JP4032462B2 (ja) 1996-09-30 1997-09-30 紫外用光学素子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP8-259948 1996-09-30
JP25994896 1996-09-30
JP26524297A JP4032462B2 (ja) 1996-09-30 1997-09-30 紫外用光学素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007177847A Division JP4650460B2 (ja) 1996-09-30 2007-07-06 紫外用光学素子の製造方法

Publications (3)

Publication Number Publication Date
JPH10158035A JPH10158035A (ja) 1998-06-16
JPH10158035A5 JPH10158035A5 (https=) 2005-06-16
JP4032462B2 true JP4032462B2 (ja) 2008-01-16

Family

ID=26544373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26524297A Expired - Lifetime JP4032462B2 (ja) 1996-09-30 1997-09-30 紫外用光学素子

Country Status (1)

Country Link
JP (1) JP4032462B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000203678A (ja) * 1999-01-13 2000-07-25 Nikon Corp 露光装置本体の梱包方法および梱包構造、並びにその方法または構造で梱包される露光装置
WO2004050266A1 (ja) 2002-12-03 2004-06-17 Nikon Corporation 汚染物質除去方法及び装置、並びに露光方法及び装置
JP2011170092A (ja) * 2010-02-18 2011-09-01 Fujifilm Corp 光学素子及び光学素子製造方法
JP2017216389A (ja) * 2016-06-01 2017-12-07 信越石英株式会社 紫外線ｓｍｄ型ｌｅｄ素子の気密封止用シリカガラス部材
CN109314165B (zh) * 2016-06-01 2022-01-07 信越石英株式会社 紫外线smd型led元件的气密密封用石英玻璃构件及紫外线led用石英玻璃构件的制造方法
JP6623968B2 (ja) * 2016-08-03 2019-12-25 信越化学工業株式会社 光学素子パッケージ用窓材、光学素子パッケージ、それらの製造方法、及び光学素子用パッケージ

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Publication number Publication date
JPH10158035A (ja) 1998-06-16

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