JP4031252B2 - 排気装置及びその制御方法並びに真空内静圧軸受 - Google Patents

排気装置及びその制御方法並びに真空内静圧軸受 Download PDF

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Publication number
JP4031252B2
JP4031252B2 JP2002023747A JP2002023747A JP4031252B2 JP 4031252 B2 JP4031252 B2 JP 4031252B2 JP 2002023747 A JP2002023747 A JP 2002023747A JP 2002023747 A JP2002023747 A JP 2002023747A JP 4031252 B2 JP4031252 B2 JP 4031252B2
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Japan
Prior art keywords
exhaust
vacuum
pressure
valve
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002023747A
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English (en)
Japanese (ja)
Other versions
JP2003222132A (ja
JP2003222132A5 (enExample
Inventor
圭司 江本
勝則 小貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp, Canon Inc filed Critical Hitachi High Technologies Corp
Priority to JP2002023747A priority Critical patent/JP4031252B2/ja
Priority to US10/351,992 priority patent/US7284906B2/en
Priority to EP03250578.6A priority patent/EP1333187B1/en
Publication of JP2003222132A publication Critical patent/JP2003222132A/ja
Publication of JP2003222132A5 publication Critical patent/JP2003222132A5/ja
Application granted granted Critical
Publication of JP4031252B2 publication Critical patent/JP4031252B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/74—Sealings of sliding-contact bearings
    • F16C33/741—Sealings of sliding-contact bearings by means of a fluid
    • F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
JP2002023747A 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受 Expired - Lifetime JP4031252B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002023747A JP4031252B2 (ja) 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受
US10/351,992 US7284906B2 (en) 2002-01-31 2003-01-28 Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing
EP03250578.6A EP1333187B1 (en) 2002-01-31 2003-01-30 Exhaust apparatus with control means for a multistage labyrinth seal of a hydrostatic bearing used in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002023747A JP4031252B2 (ja) 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受

Publications (3)

Publication Number Publication Date
JP2003222132A JP2003222132A (ja) 2003-08-08
JP2003222132A5 JP2003222132A5 (enExample) 2007-02-15
JP4031252B2 true JP4031252B2 (ja) 2008-01-09

Family

ID=19192252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002023747A Expired - Lifetime JP4031252B2 (ja) 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受

Country Status (3)

Country Link
US (1) US7284906B2 (enExample)
EP (1) EP1333187B1 (enExample)
JP (1) JP4031252B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005155658A (ja) * 2003-11-20 2005-06-16 Canon Inc 静圧気体軸受装置およびそれを用いたステージ装置
US7650915B2 (en) * 2004-02-19 2010-01-26 Hul-Chun Hsu Method for removing vapor within heat pipe
JP4445528B2 (ja) * 2007-07-11 2010-04-07 住友重機械工業株式会社 静圧軸受
JP2011023427A (ja) * 2009-07-13 2011-02-03 Canon Inc 減圧装置、加圧装置、露光装置、デバイス製造方法
KR101456809B1 (ko) * 2011-02-03 2014-10-31 이글 고오교 가부시키가이샤 자성 유체 실
JP6893170B2 (ja) * 2015-03-31 2021-06-23 住友重機械工業株式会社 アクチュエータ
CN110513394B (zh) * 2019-08-26 2024-10-11 清华大学 一种真空气浮轴承及其性能检测装置和检测方法
CN113790270B (zh) * 2021-09-29 2022-04-26 北京交通大学 一种嵌入型套筒式磁性液体密封装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514051C3 (de) * 1975-03-29 1982-03-18 Kollmorgen Technologies Corp., 75201 Dallas, Tex. Luftlager
US4118042A (en) * 1977-09-27 1978-10-03 The United States Of America As Represented By The United States Department Of Energy Air bearing vacuum seal assembly
US4726689A (en) * 1986-10-22 1988-02-23 Eclipse Ion Technology, Inc. Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
JP2826756B2 (ja) * 1990-01-17 1998-11-18 キヤノン株式会社 ステージエア供給・回収装置
ATE302356T1 (de) * 1998-06-17 2005-09-15 Nikon Corp Statischdrucklager,dieses verwendende einrichtung und optisches gerät versehen mit solch einer einrichtung
EP1052552A3 (en) * 1999-04-19 2003-03-12 ASML Netherlands B.V. Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus
NL1015738C2 (nl) * 1999-07-28 2002-10-15 Kyocera Corp Schuifapparaat en bijbehorend platformmechanisme voor gebruik in vacu³m.
JP2001074051A (ja) * 1999-09-08 2001-03-23 Nikon Corp 真空用エアベアリングインターロック
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus

Also Published As

Publication number Publication date
JP2003222132A (ja) 2003-08-08
EP1333187A2 (en) 2003-08-06
US7284906B2 (en) 2007-10-23
US20030141667A1 (en) 2003-07-31
EP1333187A3 (en) 2010-07-07
EP1333187B1 (en) 2017-03-15

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