JP6893170B2 - アクチュエータ - Google Patents
アクチュエータ Download PDFInfo
- Publication number
- JP6893170B2 JP6893170B2 JP2017509452A JP2017509452A JP6893170B2 JP 6893170 B2 JP6893170 B2 JP 6893170B2 JP 2017509452 A JP2017509452 A JP 2017509452A JP 2017509452 A JP2017509452 A JP 2017509452A JP 6893170 B2 JP6893170 B2 JP 6893170B2
- Authority
- JP
- Japan
- Prior art keywords
- slider
- guide
- actuator
- air
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/24—Other details, e.g. assembly with regulating devices for restricting the stroke
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/04—Special measures taken in connection with the properties of the fluid
- F15B21/044—Removal or measurement of undissolved gas, e.g. de-aeration, venting or bleeding
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0625—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via supply slits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Actuator (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Support Of The Bearing (AREA)
Description
Claims (5)
- 一方向に延びる単一のガイドと、前記ガイドに対して軸方向に移動可能なスライダと、を備えるアクチュエータであって、
前記ガイドは、一面が開放された凹形断面を有し、
前記スライダは、前記スライダの複数の面に設けられる圧縮気体を噴出するエアパッドと、前記エアパッドから噴出される圧縮気体を排出する排気溝と、を有し、前記ガイドの内側を前記ガイドに対して浮上して案内されるように構成され、
前記スライダには、前記スライダを挟んで互いに対向する前記ガイドの内面にそれぞれ対向するようにサーボ室が形成されており、
前記スライダは、前記エアパッドから噴出される圧縮気体により、前記軸方向に直交する方向であって開放された一面とは反対向きの方向の力を付与される、アクチュエータ。 - 前記エアパッドは、周囲が前記排気溝で囲まれている、請求項1に記載のアクチュエータ。
- 前記スライダの複数の面に設けられた前記エアパッドは、前記複数の面のそれぞれにおいて前記排気溝とは別の排気溝に囲まれ、さらに、複数の面に跨がる一続きの一つの前記排気溝によって前記複数の面の前記別の排気溝とともに囲まれている、請求項2に記載のアクチュエータ。
- 前記排気溝は、前記軸方向に延びる部分を含む、請求項1から3の何れか一項に記載のアクチュエータ。
- 前記一面の開放は、前記一面の一部を開放するものであり、
前記エアパッドは、前記スライダの四面に設けられ、
前記スライダは、四面に設けられた前記エアパッドのそれぞれから、それぞれに対向する前記ガイドの面に向けて圧縮気体を噴出することによって、前記ガイドに対して四面が浮上して案内されるように構成される、請求項1から4の何れか一項に記載のアクチュエータ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021035646A JP7122423B2 (ja) | 2015-03-31 | 2021-03-05 | アクチュエータ、ステージ装置および露光装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015072054 | 2015-03-31 | ||
JP2015072054 | 2015-03-31 | ||
PCT/JP2016/057070 WO2016158229A1 (ja) | 2015-03-31 | 2016-03-08 | アクチュエータ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021035646A Division JP7122423B2 (ja) | 2015-03-31 | 2021-03-05 | アクチュエータ、ステージ装置および露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016158229A1 JPWO2016158229A1 (ja) | 2018-01-25 |
JP6893170B2 true JP6893170B2 (ja) | 2021-06-23 |
Family
ID=57004162
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017509452A Active JP6893170B2 (ja) | 2015-03-31 | 2016-03-08 | アクチュエータ |
JP2021035646A Active JP7122423B2 (ja) | 2015-03-31 | 2021-03-05 | アクチュエータ、ステージ装置および露光装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021035646A Active JP7122423B2 (ja) | 2015-03-31 | 2021-03-05 | アクチュエータ、ステージ装置および露光装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10371279B2 (ja) |
EP (1) | EP3279486B1 (ja) |
JP (2) | JP6893170B2 (ja) |
KR (1) | KR102415241B1 (ja) |
CN (2) | CN114607701A (ja) |
TW (1) | TWI589802B (ja) |
WO (1) | WO2016158229A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4235300A1 (en) | 2022-02-25 | 2023-08-30 | Sumitomo Heavy Industries, LTD. | Actuator, stage device, exposure device, inspection device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6696821B2 (ja) * | 2016-04-26 | 2020-05-20 | Dmg森精機株式会社 | 工作機械 |
JP6704658B2 (ja) * | 2016-10-13 | 2020-06-03 | 住友重機械工業株式会社 | ステージ装置 |
JP2022090459A (ja) * | 2020-12-07 | 2022-06-17 | 住友重機械工業株式会社 | 気体圧アクチュエータの制御方法および制御演算装置 |
Family Cites Families (23)
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JPS6237514A (ja) * | 1985-08-10 | 1987-02-18 | Omron Tateisi Electronics Co | 静圧軸受装置 |
JPH0518498Y2 (ja) * | 1987-09-09 | 1993-05-17 | ||
JPH0429616A (ja) * | 1990-05-24 | 1992-01-31 | Nagase Iron Works Co Ltd | 流体通過装置 |
JPH11190306A (ja) * | 1997-12-25 | 1999-07-13 | Ntn Corp | エアスライド装置 |
AU4061199A (en) * | 1998-06-17 | 2000-01-05 | Nikon Corporation | Static pressure gas bearing, stage device using it, and optical device using it |
IL131647A0 (en) * | 1999-08-30 | 2001-01-28 | Leonid Kashchenevsky | Method and device to control the accuracy of movement of a unit moving linearly on hydro- or aerostatic slides |
JP2001173654A (ja) * | 1999-12-15 | 2001-06-26 | Nikon Corp | 静圧軸受装置及びそれを用いた光学装置 |
ATE502224T1 (de) * | 2000-02-01 | 2011-04-15 | Toto Ltd | Hydrostatisches gaslager, hydrostatische gaslagervorrichtung zum gebrauchen in vakuum- umgebung, und einrichtung zur wiedergewinnung von gas für die hydrostatische gaslagervorrichtung |
JP2002170765A (ja) * | 2000-12-04 | 2002-06-14 | Nikon Corp | ステージ装置及び露光装置 |
JP4443778B2 (ja) | 2001-02-07 | 2010-03-31 | 住友重機械工業株式会社 | 流体圧アクチュエータ |
JP2002252166A (ja) * | 2001-02-27 | 2002-09-06 | Canon Inc | ステージ装置、露光装置およびデバイス製造方法ならびに移動案内方法 |
JP2002257138A (ja) * | 2001-02-28 | 2002-09-11 | Canon Inc | 静圧流体軸受装置、およびこれを用いたステージ装置、露光装置ならびにデバイス製造方法 |
JP4031252B2 (ja) * | 2002-01-31 | 2008-01-09 | キヤノン株式会社 | 排気装置及びその制御方法並びに真空内静圧軸受 |
JP2004128308A (ja) * | 2002-10-04 | 2004-04-22 | Nikon Corp | ステージ装置及び露光装置 |
JP4269711B2 (ja) * | 2003-02-20 | 2009-05-27 | Toto株式会社 | 静圧気体軸受 |
JP2006029395A (ja) * | 2004-07-13 | 2006-02-02 | Konica Minolta Opto Inc | 静圧スライド |
DE102005038346A1 (de) * | 2005-08-13 | 2007-02-15 | Schaeffler Kg | Hydrostatische Profilschienenführung |
DE102006018312A1 (de) * | 2006-04-20 | 2007-10-25 | Schaeffler Kg | Hydrostatische Profilschienenführung |
JP2010151176A (ja) * | 2008-12-24 | 2010-07-08 | Nsk Ltd | アクチュエータ |
JP2011247405A (ja) * | 2009-07-30 | 2011-12-08 | Kyocera Corp | 案内装置 |
JP5667451B2 (ja) * | 2010-02-23 | 2015-02-12 | 株式会社アドバンテスト | ステージ装置 |
JP5953751B2 (ja) * | 2012-01-04 | 2016-07-20 | 株式会社Ihi | 案内装置及び流路形成方法 |
NL2011519C2 (en) * | 2013-09-27 | 2015-03-30 | Ccm Beheer Bv | Hydrogenerator. |
-
2016
- 2016-03-08 WO PCT/JP2016/057070 patent/WO2016158229A1/ja active Application Filing
- 2016-03-08 JP JP2017509452A patent/JP6893170B2/ja active Active
- 2016-03-08 CN CN202210177825.5A patent/CN114607701A/zh active Pending
- 2016-03-08 CN CN201680015987.1A patent/CN107429738A/zh active Pending
- 2016-03-08 EP EP16772113.3A patent/EP3279486B1/en active Active
- 2016-03-08 KR KR1020177025387A patent/KR102415241B1/ko active IP Right Grant
- 2016-03-25 TW TW105109510A patent/TWI589802B/zh active
-
2017
- 2017-09-22 US US15/713,159 patent/US10371279B2/en active Active
-
2021
- 2021-03-05 JP JP2021035646A patent/JP7122423B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4235300A1 (en) | 2022-02-25 | 2023-08-30 | Sumitomo Heavy Industries, LTD. | Actuator, stage device, exposure device, inspection device |
Also Published As
Publication number | Publication date |
---|---|
WO2016158229A1 (ja) | 2016-10-06 |
CN114607701A (zh) | 2022-06-10 |
US10371279B2 (en) | 2019-08-06 |
EP3279486A4 (en) | 2018-12-05 |
JP7122423B2 (ja) | 2022-08-19 |
JPWO2016158229A1 (ja) | 2018-01-25 |
EP3279486B1 (en) | 2022-02-23 |
JP2021099165A (ja) | 2021-07-01 |
TWI589802B (zh) | 2017-07-01 |
KR102415241B1 (ko) | 2022-06-29 |
EP3279486A1 (en) | 2018-02-07 |
KR20170134368A (ko) | 2017-12-06 |
US20180010709A1 (en) | 2018-01-11 |
TW201636523A (zh) | 2016-10-16 |
CN107429738A (zh) | 2017-12-01 |
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