JP4001460B2 - 大領域ｆｅｄ装置及び方法 - Google Patents

大領域ｆｅｄ装置及び方法 Download PDF

Info

Publication number
JP4001460B2
JP4001460B2 JP2000533887A JP2000533887A JP4001460B2 JP 4001460 B2 JP4001460 B2 JP 4001460B2 JP 2000533887 A JP2000533887 A JP 2000533887A JP 2000533887 A JP2000533887 A JP 2000533887A JP 4001460 B2 JP4001460 B2 JP 4001460B2
Authority
JP
Japan
Prior art keywords
fed
micropoints
conductive layer
disposed
emitter electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000533887A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002505503A (ja
JP2002505503A5 (enExample
Inventor
キャセイ、デビッド・エイ
ブローニング、ジミー・ジェイ
Original Assignee
マイクロン テクノロジー， インク．
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by マイクロン テクノロジー， インク． filed Critical マイクロン テクノロジー， インク．
Publication of JP2002505503A publication Critical patent/JP2002505503A/ja
Publication of JP2002505503A5 publication Critical patent/JP2002505503A5/ja
Application granted granted Critical
Publication of JP4001460B2 publication Critical patent/JP4001460B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/028—Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/864—Spacers between faceplate and backplate of flat panel cathode ray tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/18—Assembling together the component parts of electrode systems
    • H01J9/185—Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/863—Spacing members characterised by the form or structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Luminescent Compositions (AREA)
  • Gas-Filled Discharge Tubes (AREA)
JP2000533887A 1998-02-27 1999-02-26 大領域ｆｅｄ装置及び方法 Expired - Fee Related JP4001460B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/032,127 US6255772B1 (en) 1998-02-27 1998-02-27 Large-area FED apparatus and method for making same
US09/032,127 1998-02-27
PCT/US1999/004382 WO1999044218A1 (en) 1998-02-27 1999-02-26 Large-area fed apparatus and method for making same

Publications (3)

Publication Number Publication Date
JP2002505503A JP2002505503A (ja) 2002-02-19
JP2002505503A5 JP2002505503A5 (enExample) 2005-10-20
JP4001460B2 true JP4001460B2 (ja) 2007-10-31

Family

ID=21863249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000533887A Expired - Fee Related JP4001460B2 (ja) 1998-02-27 1999-02-26 大領域ｆｅｄ装置及び方法

Country Status (8)

Country Link
US (4) US6255772B1 (enExample)
EP (1) EP1057200B1 (enExample)
JP (1) JP4001460B2 (enExample)
KR (1) KR100597056B1 (enExample)
AT (1) ATE249096T1 (enExample)
AU (1) AU2883699A (enExample)
DE (1) DE69910979T2 (enExample)
WO (1) WO1999044218A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255772B1 (en) * 1998-02-27 2001-07-03 Micron Technology, Inc. Large-area FED apparatus and method for making same
KR100263310B1 (ko) * 1998-04-02 2000-08-01 김순택 전계 방출용 음극을 갖는 평판 디스플레이와 이의제조방법
US6843697B2 (en) * 1999-06-25 2005-01-18 Micron Display Technology, Inc. Black matrix for flat panel field emission displays
US6716077B1 (en) * 2000-05-17 2004-04-06 Micron Technology, Inc. Method of forming flow-fill structures
JP2002033058A (ja) * 2000-07-14 2002-01-31 Sony Corp 電界放出型表示装置用の前面板
US6944032B1 (en) * 2001-04-12 2005-09-13 Rockwell Collins Interconnect for flat panel displays
KR100444506B1 (ko) * 2001-12-27 2004-08-16 엘지전자 주식회사 전계방출 표시소자의 스페이서 및 그의 형성 및 설치방법
US7005807B1 (en) * 2002-05-30 2006-02-28 Cdream Corporation Negative voltage driving of a carbon nanotube field emissive display
US7170223B2 (en) * 2002-07-17 2007-01-30 Hewlett-Packard Development Company, L.P. Emitter with dielectric layer having implanted conducting centers
TWI223307B (en) * 2003-06-24 2004-11-01 Ind Tech Res Inst Method of forming spacers on a substrate
KR20060059616A (ko) * 2004-11-29 2006-06-02 삼성에스디아이 주식회사 스페이서를 구비하는 전자방출 표시장치
KR101173859B1 (ko) * 2006-01-31 2012-08-14 삼성에스디아이 주식회사 스페이서 및 이를 구비한 전자 방출 표시 디바이스
FR2899291B1 (fr) * 2006-03-31 2010-11-12 Airbus France Ecrou pour la fixation d'un pare-brise d'aeronef et dispositif de fixation d'un pare-brise d'aeronef incorporant ledit ecrou
KR20080079838A (ko) * 2007-02-28 2008-09-02 삼성에스디아이 주식회사 발광 장치 및 이를 구비한 표시 장치
US7993977B2 (en) * 2007-07-02 2011-08-09 Micron Technology, Inc. Method of forming molded standoff structures on integrated circuit devices
KR100869804B1 (ko) * 2007-07-03 2008-11-21 삼성에스디아이 주식회사 발광 장치 및 표시 장치
JP2009076447A (ja) * 2007-08-27 2009-04-09 Hitachi High-Technologies Corp 走査電子顕微鏡
US20090058257A1 (en) * 2007-08-28 2009-03-05 Motorola, Inc. Actively controlled distributed backlight for a liquid crystal display
DE102007043639A1 (de) * 2007-09-13 2009-04-09 Siemens Ag Anordnung zur elektrisch leitenden Verbindung
JP2010009988A (ja) * 2008-06-27 2010-01-14 Canon Inc 発光スクリーン及び画像表示装置
US8664622B2 (en) * 2012-04-11 2014-03-04 Taiwan Semiconductor Manufacturing Co., Ltd. System and method of ion beam source for semiconductor ion implantation
WO2015000095A1 (en) 2013-07-05 2015-01-08 Industrial Technology Research Institute Flexible display and method for fabricating the same
WO2015171936A1 (en) * 2014-05-08 2015-11-12 Advanced Green Technologies, Llc Fuel injection systems with enhanced corona burst

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1309423A (en) 1969-03-14 1973-03-14 Matsushita Electric Industrial Co Ltd Field-emission cathodes and methods for preparing these cathodes
US5614781A (en) * 1992-04-10 1997-03-25 Candescent Technologies Corporation Structure and operation of high voltage supports
FR2568394B1 (fr) 1984-07-27 1988-02-12 Commissariat Energie Atomique Dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2593953B1 (fr) 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
US4857799A (en) 1986-07-30 1989-08-15 Sri International Matrix-addressed flat panel display
US5160871A (en) 1989-06-19 1992-11-03 Matsushita Electric Industrial Co., Ltd. Flat configuration image display apparatus and manufacturing method thereof
US5089292A (en) 1990-07-20 1992-02-18 Coloray Display Corporation Field emission cathode array coated with electron work function reducing material, and method
US5100838A (en) * 1990-10-04 1992-03-31 Micron Technology, Inc. Method for forming self-aligned conducting pillars in an (IC) fabrication process
US5332627A (en) 1990-10-30 1994-07-26 Sony Corporation Field emission type emitter and a method of manufacturing thereof
NL9100122A (nl) 1991-01-25 1992-08-17 Philips Nv Weergeefinrichting.
US5240552A (en) * 1991-12-11 1993-08-31 Micron Technology, Inc. Chemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detection
US5259719A (en) * 1991-12-30 1993-11-09 Intelmatec Corporation Apparatus for transferring disks between a cassette and a pallet
JP3021995B2 (ja) 1992-01-22 2000-03-15 三菱電機株式会社 表示素子
US5514245A (en) * 1992-01-27 1996-05-07 Micron Technology, Inc. Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches
US5229331A (en) * 1992-02-14 1993-07-20 Micron Technology, Inc. Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology
JPH05242796A (ja) * 1992-02-28 1993-09-21 Matsushita Electric Ind Co Ltd 電子放出素子の製造方法
US5186670A (en) 1992-03-02 1993-02-16 Micron Technology, Inc. Method to form self-aligned gate structures and focus rings
US5653619A (en) * 1992-03-02 1997-08-05 Micron Technology, Inc. Method to form self-aligned gate structures and focus rings
US5205770A (en) * 1992-03-12 1993-04-27 Micron Technology, Inc. Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology
JPH05274998A (ja) 1992-03-23 1993-10-22 Shimadzu Corp 電子放出素子
US5210472A (en) 1992-04-07 1993-05-11 Micron Technology, Inc. Flat panel display in which low-voltage row and column address signals control a much pixel activation voltage
US5232549A (en) * 1992-04-14 1993-08-03 Micron Technology, Inc. Spacers for field emission display fabricated via self-aligned high energy ablation
US5329207A (en) 1992-05-13 1994-07-12 Micron Technology, Inc. Field emission structures produced on macro-grain polysilicon substrates
US5209816A (en) * 1992-06-04 1993-05-11 Micron Technology, Inc. Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
US5225034A (en) * 1992-06-04 1993-07-06 Micron Technology, Inc. Method of chemical mechanical polishing predominantly copper containing metal layers in semiconductor processing
US5232863A (en) * 1992-10-20 1993-08-03 Micron Semiconductor, Inc. Method of forming electrical contact between a field effect transistor gate and a remote active area
US5433794A (en) * 1992-12-10 1995-07-18 Micron Technology, Inc. Spacers used to form isolation trenches with improved corners
US5300155A (en) * 1992-12-23 1994-04-05 Micron Semiconductor, Inc. IC chemical mechanical planarization process incorporating slurry temperature control
JPH08505259A (ja) 1992-12-23 1996-06-04 エスアイ ダイアモンド テクノロジー，インコーポレイテッド フラットな電界放出カソードを用いたトライオード構造のフラットパネルディスプレイ
JPH08507643A (ja) 1993-03-11 1996-08-13 フェド．コーポレイション エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法
US5318927A (en) * 1993-04-29 1994-06-07 Micron Semiconductor, Inc. Methods of chemical-mechanical polishing insulating inorganic metal oxide materials
JPH06342635A (ja) 1993-06-01 1994-12-13 Canon Inc 画像表示装置
US5395801A (en) * 1993-09-29 1995-03-07 Micron Semiconductor, Inc. Chemical-mechanical polishing processes of planarizing insulating layers
US5439551A (en) * 1994-03-02 1995-08-08 Micron Technology, Inc. Chemical-mechanical polishing techniques and methods of end point detection in chemical-mechanical polishing processes
US5448131A (en) * 1994-04-13 1995-09-05 Texas Instruments Incorporated Spacer for flat panel display
US5449314A (en) * 1994-04-25 1995-09-12 Micron Technology, Inc. Method of chimical mechanical polishing for dielectric layers
US5405791A (en) * 1994-10-04 1995-04-11 Micron Semiconductor, Inc. Process for fabricating ULSI CMOS circuits using a single polysilicon gate layer and disposable spacers
US5492234A (en) * 1994-10-13 1996-02-20 Micron Technology, Inc. Method for fabricating spacer support structures useful in flat panel displays
US5486126A (en) * 1994-11-18 1996-01-23 Micron Display Technology, Inc. Spacers for large area displays
US5578899A (en) * 1994-11-21 1996-11-26 Silicon Video Corporation Field emission device with internal structure for aligning phosphor pixels with corresponding field emitters
US5789857A (en) * 1994-11-22 1998-08-04 Futaba Denshi Kogyo K.K. Flat display panel having spacers
JP3526673B2 (ja) 1995-10-09 2004-05-17 富士通株式会社 電子放出素子、電子放出素子アレイ、カソード板及びそれらの製造方法並びに平面表示装置
US5772488A (en) 1995-10-16 1998-06-30 Micron Display Technology, Inc. Method of forming a doped field emitter array
US5859497A (en) 1995-12-18 1999-01-12 Motorola Stand-alone spacer for a flat panel display
DE19616486C5 (de) 1996-04-25 2016-06-30 Royalty Pharma Collection Trust Verfahren zur Senkung des Blutglukosespiegels in Säugern
RU2118011C1 (ru) 1996-05-08 1998-08-20 Евгений Инвиевич Гиваргизов Автоэмиссионный триод, устройство на его основе и способ его изготовления
JPH09306395A (ja) 1996-05-20 1997-11-28 Toshiba Corp 平面型表示装置およびその製造方法
US5708325A (en) * 1996-05-20 1998-01-13 Motorola Display spacer structure for a field emission device
US5811927A (en) * 1996-06-21 1998-09-22 Motorola, Inc. Method for affixing spacers within a flat panel display
US6130106A (en) * 1996-11-14 2000-10-10 Micron Technology, Inc. Method for limiting emission current in field emission devices
US5851133A (en) * 1996-12-24 1998-12-22 Micron Display Technology, Inc. FED spacer fibers grown by laser drive CVD
US5980349A (en) 1997-05-14 1999-11-09 Micron Technology, Inc. Anodically-bonded elements for flat panel displays
US6033924A (en) * 1997-07-25 2000-03-07 Motorola, Inc. Method for fabricating a field emission device
US5956611A (en) * 1997-09-03 1999-09-21 Micron Technologies, Inc. Field emission displays with reduced light leakage
US6255772B1 (en) 1998-02-27 2001-07-03 Micron Technology, Inc. Large-area FED apparatus and method for making same
US6232705B1 (en) * 1998-09-01 2001-05-15 Micron Technology, Inc. Field emitter arrays with gate insulator and cathode formed from single layer of polysilicon
US6733354B1 (en) 2000-08-31 2004-05-11 Micron Technology, Inc. Spacers for field emission displays
US8644804B2 (en) 2009-10-02 2014-02-04 Badger Meter, Inc. Method and system for providing web-enabled cellular access to meter reading data

Also Published As

Publication number Publication date
US20060189244A1 (en) 2006-08-24
WO1999044218A9 (en) 2000-07-20
WO1999044218A1 (en) 1999-09-02
US20030038588A1 (en) 2003-02-27
DE69910979T2 (de) 2004-07-22
US20010054866A1 (en) 2001-12-27
US6495956B2 (en) 2002-12-17
JP2002505503A (ja) 2002-02-19
EP1057200B1 (en) 2003-09-03
KR100597056B1 (ko) 2006-07-06
US7462088B2 (en) 2008-12-09
US6255772B1 (en) 2001-07-03
DE69910979D1 (de) 2003-10-09
EP1057200A1 (en) 2000-12-06
AU2883699A (en) 1999-09-15
KR20010041434A (ko) 2001-05-25
US7033238B2 (en) 2006-04-25
ATE249096T1 (de) 2003-09-15

Similar Documents

Publication Publication Date Title
JP4001460B2 (ja) 大領域ｆｅｄ装置及び方法
JP2003263951A (ja) 電界放出型電子源およびその駆動方法
US5710483A (en) Field emission device with micromesh collimator
US5723052A (en) Soft luminescence of field emission display
KR100343222B1 (ko) 전계방출표시소자의제조방법
EP0957503A2 (en) Method of manufacturing a field emission cathode
US5880554A (en) Soft luminescence of field emission display
EP1437756B1 (en) Field emission display having gate plate
US5920151A (en) Structure and fabrication of electron-emitting device having focus coating contacted through underlying access conductor
US7710014B2 (en) Electron emission device, electron emission display device using the same and method of manufacturing the same
US7327080B2 (en) Hybrid active matrix thin-film transistor display
US6190223B1 (en) Method of manufacture of composite self-aligned extraction grid and in-plane focusing ring
US20060022577A1 (en) Electron emission device and method for manufacturing
WO2004068455A2 (en) Line patterned gate structure for a field emission display
US6013974A (en) Electron-emitting device having focus coating that extends partway into focus openings
US6379572B1 (en) Flat panel display with spaced apart gate emitter openings
US5785873A (en) Low cost field emission based print head and method of making
US5930589A (en) Method for fabricating an integrated field emission device
US20060043873A1 (en) Electron emission device
US20070114911A1 (en) Electron emission device, electron emission display device using the same, and method for manufacturing the same
KR940011723B1 (ko) Fed의 제조방법
KR100322732B1 (ko) 수평전계효과전자방출소자및그제조방법
EP0985222A1 (en) Structure and fabrication of electron-emitting device having specially configured focus coating
JP2003100200A (ja) 電子放出素子、電子源、及び画像形成装置
KR20020039699A (ko) 전계방출표시소자 및 그 제조방법

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040219

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040219

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050915

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060523

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20060822

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20060829

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061117

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20061212

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070411

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20070524

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20070626

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070717

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070814

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100824

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110824

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110824

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120824

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130824

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees