ATE249096T1 - Grossflächige feldemissions- bildwiedergabeanordnung und verfahren zur herstellung - Google Patents

Grossflächige feldemissions- bildwiedergabeanordnung und verfahren zur herstellung

Info

Publication number
ATE249096T1
ATE249096T1 AT99909683T AT99909683T ATE249096T1 AT E249096 T1 ATE249096 T1 AT E249096T1 AT 99909683 T AT99909683 T AT 99909683T AT 99909683 T AT99909683 T AT 99909683T AT E249096 T1 ATE249096 T1 AT E249096T1
Authority
AT
Austria
Prior art keywords
fed
spacers
field emission
conductive layer
disposed
Prior art date
Application number
AT99909683T
Other languages
German (de)
English (en)
Inventor
David A Cathey
Jimmy J Browning
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Application granted granted Critical
Publication of ATE249096T1 publication Critical patent/ATE249096T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/028Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86Vessels; Containers; Vacuum locks
    • H01J29/864Spacers between faceplate and backplate of flat panel cathode ray tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/18Assembling together the component parts of electrode systems
    • H01J9/185Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242Spacers between faceplate and backplate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/863Spacing members characterised by the form or structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Luminescent Compositions (AREA)
  • Gas-Filled Discharge Tubes (AREA)
AT99909683T 1998-02-27 1999-02-26 Grossflächige feldemissions- bildwiedergabeanordnung und verfahren zur herstellung ATE249096T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/032,127 US6255772B1 (en) 1998-02-27 1998-02-27 Large-area FED apparatus and method for making same
PCT/US1999/004382 WO1999044218A1 (en) 1998-02-27 1999-02-26 Large-area fed apparatus and method for making same

Publications (1)

Publication Number Publication Date
ATE249096T1 true ATE249096T1 (de) 2003-09-15

Family

ID=21863249

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99909683T ATE249096T1 (de) 1998-02-27 1999-02-26 Grossflächige feldemissions- bildwiedergabeanordnung und verfahren zur herstellung

Country Status (8)

Country Link
US (4) US6255772B1 (enExample)
EP (1) EP1057200B1 (enExample)
JP (1) JP4001460B2 (enExample)
KR (1) KR100597056B1 (enExample)
AT (1) ATE249096T1 (enExample)
AU (1) AU2883699A (enExample)
DE (1) DE69910979T2 (enExample)
WO (1) WO1999044218A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255772B1 (en) * 1998-02-27 2001-07-03 Micron Technology, Inc. Large-area FED apparatus and method for making same
KR100263310B1 (ko) * 1998-04-02 2000-08-01 김순택 전계 방출용 음극을 갖는 평판 디스플레이와 이의제조방법
US6843697B2 (en) * 1999-06-25 2005-01-18 Micron Display Technology, Inc. Black matrix for flat panel field emission displays
US6716077B1 (en) * 2000-05-17 2004-04-06 Micron Technology, Inc. Method of forming flow-fill structures
JP2002033058A (ja) * 2000-07-14 2002-01-31 Sony Corp 電界放出型表示装置用の前面板
US6944032B1 (en) * 2001-04-12 2005-09-13 Rockwell Collins Interconnect for flat panel displays
KR100444506B1 (ko) * 2001-12-27 2004-08-16 엘지전자 주식회사 전계방출 표시소자의 스페이서 및 그의 형성 및 설치방법
US7005807B1 (en) * 2002-05-30 2006-02-28 Cdream Corporation Negative voltage driving of a carbon nanotube field emissive display
US7170223B2 (en) * 2002-07-17 2007-01-30 Hewlett-Packard Development Company, L.P. Emitter with dielectric layer having implanted conducting centers
TWI223307B (en) * 2003-06-24 2004-11-01 Ind Tech Res Inst Method of forming spacers on a substrate
KR20060059616A (ko) * 2004-11-29 2006-06-02 삼성에스디아이 주식회사 스페이서를 구비하는 전자방출 표시장치
KR101173859B1 (ko) * 2006-01-31 2012-08-14 삼성에스디아이 주식회사 스페이서 및 이를 구비한 전자 방출 표시 디바이스
FR2899291B1 (fr) * 2006-03-31 2010-11-12 Airbus France Ecrou pour la fixation d'un pare-brise d'aeronef et dispositif de fixation d'un pare-brise d'aeronef incorporant ledit ecrou
KR20080079838A (ko) * 2007-02-28 2008-09-02 삼성에스디아이 주식회사 발광 장치 및 이를 구비한 표시 장치
US7993977B2 (en) * 2007-07-02 2011-08-09 Micron Technology, Inc. Method of forming molded standoff structures on integrated circuit devices
KR100869804B1 (ko) * 2007-07-03 2008-11-21 삼성에스디아이 주식회사 발광 장치 및 표시 장치
JP2009076447A (ja) * 2007-08-27 2009-04-09 Hitachi High-Technologies Corp 走査電子顕微鏡
US20090058257A1 (en) * 2007-08-28 2009-03-05 Motorola, Inc. Actively controlled distributed backlight for a liquid crystal display
DE102007043639A1 (de) * 2007-09-13 2009-04-09 Siemens Ag Anordnung zur elektrisch leitenden Verbindung
JP2010009988A (ja) * 2008-06-27 2010-01-14 Canon Inc 発光スクリーン及び画像表示装置
US8664622B2 (en) * 2012-04-11 2014-03-04 Taiwan Semiconductor Manufacturing Co., Ltd. System and method of ion beam source for semiconductor ion implantation
WO2015000095A1 (en) 2013-07-05 2015-01-08 Industrial Technology Research Institute Flexible display and method for fabricating the same
WO2015171936A1 (en) * 2014-05-08 2015-11-12 Advanced Green Technologies, Llc Fuel injection systems with enhanced corona burst

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1309423A (en) 1969-03-14 1973-03-14 Matsushita Electric Industrial Co Ltd Field-emission cathodes and methods for preparing these cathodes
US5614781A (en) * 1992-04-10 1997-03-25 Candescent Technologies Corporation Structure and operation of high voltage supports
FR2568394B1 (fr) 1984-07-27 1988-02-12 Commissariat Energie Atomique Dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2593953B1 (fr) 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
US4857799A (en) 1986-07-30 1989-08-15 Sri International Matrix-addressed flat panel display
US5160871A (en) 1989-06-19 1992-11-03 Matsushita Electric Industrial Co., Ltd. Flat configuration image display apparatus and manufacturing method thereof
US5089292A (en) 1990-07-20 1992-02-18 Coloray Display Corporation Field emission cathode array coated with electron work function reducing material, and method
US5100838A (en) * 1990-10-04 1992-03-31 Micron Technology, Inc. Method for forming self-aligned conducting pillars in an (IC) fabrication process
US5332627A (en) 1990-10-30 1994-07-26 Sony Corporation Field emission type emitter and a method of manufacturing thereof
NL9100122A (nl) 1991-01-25 1992-08-17 Philips Nv Weergeefinrichting.
US5240552A (en) * 1991-12-11 1993-08-31 Micron Technology, Inc. Chemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detection
US5259719A (en) * 1991-12-30 1993-11-09 Intelmatec Corporation Apparatus for transferring disks between a cassette and a pallet
JP3021995B2 (ja) 1992-01-22 2000-03-15 三菱電機株式会社 表示素子
US5514245A (en) * 1992-01-27 1996-05-07 Micron Technology, Inc. Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches
US5229331A (en) * 1992-02-14 1993-07-20 Micron Technology, Inc. Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology
JPH05242796A (ja) * 1992-02-28 1993-09-21 Matsushita Electric Ind Co Ltd 電子放出素子の製造方法
US5186670A (en) 1992-03-02 1993-02-16 Micron Technology, Inc. Method to form self-aligned gate structures and focus rings
US5653619A (en) * 1992-03-02 1997-08-05 Micron Technology, Inc. Method to form self-aligned gate structures and focus rings
US5205770A (en) * 1992-03-12 1993-04-27 Micron Technology, Inc. Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology
JPH05274998A (ja) 1992-03-23 1993-10-22 Shimadzu Corp 電子放出素子
US5210472A (en) 1992-04-07 1993-05-11 Micron Technology, Inc. Flat panel display in which low-voltage row and column address signals control a much pixel activation voltage
US5232549A (en) * 1992-04-14 1993-08-03 Micron Technology, Inc. Spacers for field emission display fabricated via self-aligned high energy ablation
US5329207A (en) 1992-05-13 1994-07-12 Micron Technology, Inc. Field emission structures produced on macro-grain polysilicon substrates
US5209816A (en) * 1992-06-04 1993-05-11 Micron Technology, Inc. Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
US5225034A (en) * 1992-06-04 1993-07-06 Micron Technology, Inc. Method of chemical mechanical polishing predominantly copper containing metal layers in semiconductor processing
US5232863A (en) * 1992-10-20 1993-08-03 Micron Semiconductor, Inc. Method of forming electrical contact between a field effect transistor gate and a remote active area
US5433794A (en) * 1992-12-10 1995-07-18 Micron Technology, Inc. Spacers used to form isolation trenches with improved corners
US5300155A (en) * 1992-12-23 1994-04-05 Micron Semiconductor, Inc. IC chemical mechanical planarization process incorporating slurry temperature control
JPH08505259A (ja) 1992-12-23 1996-06-04 エスアイ ダイアモンド テクノロジー,インコーポレイテッド フラットな電界放出カソードを用いたトライオード構造のフラットパネルディスプレイ
JPH08507643A (ja) 1993-03-11 1996-08-13 フェド.コーポレイション エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法
US5318927A (en) * 1993-04-29 1994-06-07 Micron Semiconductor, Inc. Methods of chemical-mechanical polishing insulating inorganic metal oxide materials
JPH06342635A (ja) 1993-06-01 1994-12-13 Canon Inc 画像表示装置
US5395801A (en) * 1993-09-29 1995-03-07 Micron Semiconductor, Inc. Chemical-mechanical polishing processes of planarizing insulating layers
US5439551A (en) * 1994-03-02 1995-08-08 Micron Technology, Inc. Chemical-mechanical polishing techniques and methods of end point detection in chemical-mechanical polishing processes
US5448131A (en) * 1994-04-13 1995-09-05 Texas Instruments Incorporated Spacer for flat panel display
US5449314A (en) * 1994-04-25 1995-09-12 Micron Technology, Inc. Method of chimical mechanical polishing for dielectric layers
US5405791A (en) * 1994-10-04 1995-04-11 Micron Semiconductor, Inc. Process for fabricating ULSI CMOS circuits using a single polysilicon gate layer and disposable spacers
US5492234A (en) * 1994-10-13 1996-02-20 Micron Technology, Inc. Method for fabricating spacer support structures useful in flat panel displays
US5486126A (en) * 1994-11-18 1996-01-23 Micron Display Technology, Inc. Spacers for large area displays
US5578899A (en) * 1994-11-21 1996-11-26 Silicon Video Corporation Field emission device with internal structure for aligning phosphor pixels with corresponding field emitters
US5789857A (en) * 1994-11-22 1998-08-04 Futaba Denshi Kogyo K.K. Flat display panel having spacers
JP3526673B2 (ja) 1995-10-09 2004-05-17 富士通株式会社 電子放出素子、電子放出素子アレイ、カソード板及びそれらの製造方法並びに平面表示装置
US5772488A (en) 1995-10-16 1998-06-30 Micron Display Technology, Inc. Method of forming a doped field emitter array
US5859497A (en) 1995-12-18 1999-01-12 Motorola Stand-alone spacer for a flat panel display
DE19616486C5 (de) 1996-04-25 2016-06-30 Royalty Pharma Collection Trust Verfahren zur Senkung des Blutglukosespiegels in Säugern
RU2118011C1 (ru) 1996-05-08 1998-08-20 Евгений Инвиевич Гиваргизов Автоэмиссионный триод, устройство на его основе и способ его изготовления
JPH09306395A (ja) 1996-05-20 1997-11-28 Toshiba Corp 平面型表示装置およびその製造方法
US5708325A (en) * 1996-05-20 1998-01-13 Motorola Display spacer structure for a field emission device
US5811927A (en) * 1996-06-21 1998-09-22 Motorola, Inc. Method for affixing spacers within a flat panel display
US6130106A (en) * 1996-11-14 2000-10-10 Micron Technology, Inc. Method for limiting emission current in field emission devices
US5851133A (en) * 1996-12-24 1998-12-22 Micron Display Technology, Inc. FED spacer fibers grown by laser drive CVD
US5980349A (en) 1997-05-14 1999-11-09 Micron Technology, Inc. Anodically-bonded elements for flat panel displays
US6033924A (en) * 1997-07-25 2000-03-07 Motorola, Inc. Method for fabricating a field emission device
US5956611A (en) * 1997-09-03 1999-09-21 Micron Technologies, Inc. Field emission displays with reduced light leakage
US6255772B1 (en) 1998-02-27 2001-07-03 Micron Technology, Inc. Large-area FED apparatus and method for making same
US6232705B1 (en) * 1998-09-01 2001-05-15 Micron Technology, Inc. Field emitter arrays with gate insulator and cathode formed from single layer of polysilicon
US6733354B1 (en) 2000-08-31 2004-05-11 Micron Technology, Inc. Spacers for field emission displays
US8644804B2 (en) 2009-10-02 2014-02-04 Badger Meter, Inc. Method and system for providing web-enabled cellular access to meter reading data

Also Published As

Publication number Publication date
US20060189244A1 (en) 2006-08-24
WO1999044218A9 (en) 2000-07-20
WO1999044218A1 (en) 1999-09-02
US20030038588A1 (en) 2003-02-27
DE69910979T2 (de) 2004-07-22
US20010054866A1 (en) 2001-12-27
US6495956B2 (en) 2002-12-17
JP2002505503A (ja) 2002-02-19
EP1057200B1 (en) 2003-09-03
JP4001460B2 (ja) 2007-10-31
KR100597056B1 (ko) 2006-07-06
US7462088B2 (en) 2008-12-09
US6255772B1 (en) 2001-07-03
DE69910979D1 (de) 2003-10-09
EP1057200A1 (en) 2000-12-06
AU2883699A (en) 1999-09-15
KR20010041434A (ko) 2001-05-25
US7033238B2 (en) 2006-04-25

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