DE69910979D1 - Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellung - Google Patents
Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellungInfo
- Publication number
- DE69910979D1 DE69910979D1 DE69910979T DE69910979T DE69910979D1 DE 69910979 D1 DE69910979 D1 DE 69910979D1 DE 69910979 T DE69910979 T DE 69910979T DE 69910979 T DE69910979 T DE 69910979T DE 69910979 D1 DE69910979 D1 DE 69910979D1
- Authority
- DE
- Germany
- Prior art keywords
- fed
- spacers
- field emission
- conductive layer
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 125000006850 spacer group Chemical group 0.000 abstract 4
- 239000011159 matrix material Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/028—Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/86—Vessels; Containers; Vacuum locks
- H01J29/864—Spacers between faceplate and backplate of flat panel cathode ray tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
- H01J9/185—Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
- H01J9/242—Spacers between faceplate and backplate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/86—Vessels
- H01J2329/8625—Spacing members
- H01J2329/863—Spacing members characterised by the form or structure
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Luminescent Compositions (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Separation By Low-Temperature Treatments (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/032,127 US6255772B1 (en) | 1998-02-27 | 1998-02-27 | Large-area FED apparatus and method for making same |
US32127 | 1998-02-27 | ||
PCT/US1999/004382 WO1999044218A1 (en) | 1998-02-27 | 1999-02-26 | Large-area fed apparatus and method for making same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69910979D1 true DE69910979D1 (de) | 2003-10-09 |
DE69910979T2 DE69910979T2 (de) | 2004-07-22 |
Family
ID=21863249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69910979T Expired - Lifetime DE69910979T2 (de) | 1998-02-27 | 1999-02-26 | Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellung |
Country Status (8)
Country | Link |
---|---|
US (4) | US6255772B1 (de) |
EP (1) | EP1057200B1 (de) |
JP (1) | JP4001460B2 (de) |
KR (1) | KR100597056B1 (de) |
AT (1) | ATE249096T1 (de) |
AU (1) | AU2883699A (de) |
DE (1) | DE69910979T2 (de) |
WO (1) | WO1999044218A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6255772B1 (en) * | 1998-02-27 | 2001-07-03 | Micron Technology, Inc. | Large-area FED apparatus and method for making same |
KR100263310B1 (ko) * | 1998-04-02 | 2000-08-01 | 김순택 | 전계 방출용 음극을 갖는 평판 디스플레이와 이의제조방법 |
US6843697B2 (en) * | 1999-06-25 | 2005-01-18 | Micron Display Technology, Inc. | Black matrix for flat panel field emission displays |
US6716077B1 (en) * | 2000-05-17 | 2004-04-06 | Micron Technology, Inc. | Method of forming flow-fill structures |
JP2002033058A (ja) * | 2000-07-14 | 2002-01-31 | Sony Corp | 電界放出型表示装置用の前面板 |
US6944032B1 (en) * | 2001-04-12 | 2005-09-13 | Rockwell Collins | Interconnect for flat panel displays |
KR100444506B1 (ko) * | 2001-12-27 | 2004-08-16 | 엘지전자 주식회사 | 전계방출 표시소자의 스페이서 및 그의 형성 및 설치방법 |
US7005807B1 (en) * | 2002-05-30 | 2006-02-28 | Cdream Corporation | Negative voltage driving of a carbon nanotube field emissive display |
US7170223B2 (en) * | 2002-07-17 | 2007-01-30 | Hewlett-Packard Development Company, L.P. | Emitter with dielectric layer having implanted conducting centers |
TWI223307B (en) * | 2003-06-24 | 2004-11-01 | Ind Tech Res Inst | Method of forming spacers on a substrate |
KR20060059616A (ko) * | 2004-11-29 | 2006-06-02 | 삼성에스디아이 주식회사 | 스페이서를 구비하는 전자방출 표시장치 |
KR101173859B1 (ko) * | 2006-01-31 | 2012-08-14 | 삼성에스디아이 주식회사 | 스페이서 및 이를 구비한 전자 방출 표시 디바이스 |
FR2899291B1 (fr) * | 2006-03-31 | 2010-11-12 | Airbus France | Ecrou pour la fixation d'un pare-brise d'aeronef et dispositif de fixation d'un pare-brise d'aeronef incorporant ledit ecrou |
KR20080079838A (ko) * | 2007-02-28 | 2008-09-02 | 삼성에스디아이 주식회사 | 발광 장치 및 이를 구비한 표시 장치 |
US7993977B2 (en) * | 2007-07-02 | 2011-08-09 | Micron Technology, Inc. | Method of forming molded standoff structures on integrated circuit devices |
KR100869804B1 (ko) * | 2007-07-03 | 2008-11-21 | 삼성에스디아이 주식회사 | 발광 장치 및 표시 장치 |
JP2009076447A (ja) * | 2007-08-27 | 2009-04-09 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
US20090058257A1 (en) * | 2007-08-28 | 2009-03-05 | Motorola, Inc. | Actively controlled distributed backlight for a liquid crystal display |
DE102007043639A1 (de) * | 2007-09-13 | 2009-04-09 | Siemens Ag | Anordnung zur elektrisch leitenden Verbindung |
JP2010009988A (ja) * | 2008-06-27 | 2010-01-14 | Canon Inc | 発光スクリーン及び画像表示装置 |
US8664622B2 (en) * | 2012-04-11 | 2014-03-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method of ion beam source for semiconductor ion implantation |
WO2015000095A1 (en) | 2013-07-05 | 2015-01-08 | Industrial Technology Research Institute | Flexible display and method for fabricating the same |
WO2015171936A1 (en) * | 2014-05-08 | 2015-11-12 | Advanced Green Technologies, Llc | Fuel injection systems with enhanced corona burst |
Family Cites Families (58)
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US3678325A (en) | 1969-03-14 | 1972-07-18 | Matsushita Electric Ind Co Ltd | High-field emission cathodes and methods for preparing the cathodes |
US5614781A (en) * | 1992-04-10 | 1997-03-25 | Candescent Technologies Corporation | Structure and operation of high voltage supports |
FR2568394B1 (fr) | 1984-07-27 | 1988-02-12 | Commissariat Energie Atomique | Dispositif de visualisation par cathodoluminescence excitee par emission de champ |
FR2593953B1 (fr) | 1986-01-24 | 1988-04-29 | Commissariat Energie Atomique | Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ |
US4857799A (en) | 1986-07-30 | 1989-08-15 | Sri International | Matrix-addressed flat panel display |
US5160871A (en) | 1989-06-19 | 1992-11-03 | Matsushita Electric Industrial Co., Ltd. | Flat configuration image display apparatus and manufacturing method thereof |
US5089292A (en) | 1990-07-20 | 1992-02-18 | Coloray Display Corporation | Field emission cathode array coated with electron work function reducing material, and method |
US5100838A (en) * | 1990-10-04 | 1992-03-31 | Micron Technology, Inc. | Method for forming self-aligned conducting pillars in an (IC) fabrication process |
US5332627A (en) | 1990-10-30 | 1994-07-26 | Sony Corporation | Field emission type emitter and a method of manufacturing thereof |
NL9100122A (nl) | 1991-01-25 | 1992-08-17 | Philips Nv | Weergeefinrichting. |
US5240552A (en) * | 1991-12-11 | 1993-08-31 | Micron Technology, Inc. | Chemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detection |
US5259719A (en) * | 1991-12-30 | 1993-11-09 | Intelmatec Corporation | Apparatus for transferring disks between a cassette and a pallet |
JP3021995B2 (ja) | 1992-01-22 | 2000-03-15 | 三菱電機株式会社 | 表示素子 |
US5514245A (en) * | 1992-01-27 | 1996-05-07 | Micron Technology, Inc. | Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches |
US5229331A (en) * | 1992-02-14 | 1993-07-20 | Micron Technology, Inc. | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology |
JPH05242796A (ja) * | 1992-02-28 | 1993-09-21 | Matsushita Electric Ind Co Ltd | 電子放出素子の製造方法 |
US5186670A (en) | 1992-03-02 | 1993-02-16 | Micron Technology, Inc. | Method to form self-aligned gate structures and focus rings |
US5653619A (en) * | 1992-03-02 | 1997-08-05 | Micron Technology, Inc. | Method to form self-aligned gate structures and focus rings |
US5205770A (en) * | 1992-03-12 | 1993-04-27 | Micron Technology, Inc. | Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology |
JPH05274998A (ja) | 1992-03-23 | 1993-10-22 | Shimadzu Corp | 電子放出素子 |
US5210472A (en) | 1992-04-07 | 1993-05-11 | Micron Technology, Inc. | Flat panel display in which low-voltage row and column address signals control a much pixel activation voltage |
US5232549A (en) * | 1992-04-14 | 1993-08-03 | Micron Technology, Inc. | Spacers for field emission display fabricated via self-aligned high energy ablation |
US5329207A (en) * | 1992-05-13 | 1994-07-12 | Micron Technology, Inc. | Field emission structures produced on macro-grain polysilicon substrates |
US5225034A (en) * | 1992-06-04 | 1993-07-06 | Micron Technology, Inc. | Method of chemical mechanical polishing predominantly copper containing metal layers in semiconductor processing |
US5209816A (en) * | 1992-06-04 | 1993-05-11 | Micron Technology, Inc. | Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing |
US5232863A (en) * | 1992-10-20 | 1993-08-03 | Micron Semiconductor, Inc. | Method of forming electrical contact between a field effect transistor gate and a remote active area |
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DE69333555T2 (de) | 1992-12-23 | 2005-08-18 | Nano-Proprietary, Inc., Austin | Flache Feldemissionskathode anwendende flache Anzeigevorrichtung mit Triodenstruktur |
JPH08507643A (ja) | 1993-03-11 | 1996-08-13 | フェド.コーポレイション | エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法 |
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JPH06342635A (ja) | 1993-06-01 | 1994-12-13 | Canon Inc | 画像表示装置 |
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US5448131A (en) * | 1994-04-13 | 1995-09-05 | Texas Instruments Incorporated | Spacer for flat panel display |
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US5789857A (en) * | 1994-11-22 | 1998-08-04 | Futaba Denshi Kogyo K.K. | Flat display panel having spacers |
JP3526673B2 (ja) | 1995-10-09 | 2004-05-17 | 富士通株式会社 | 電子放出素子、電子放出素子アレイ、カソード板及びそれらの製造方法並びに平面表示装置 |
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US5859497A (en) | 1995-12-18 | 1999-01-12 | Motorola | Stand-alone spacer for a flat panel display |
DE19616486C5 (de) | 1996-04-25 | 2016-06-30 | Royalty Pharma Collection Trust | Verfahren zur Senkung des Blutglukosespiegels in Säugern |
RU2118011C1 (ru) | 1996-05-08 | 1998-08-20 | Евгений Инвиевич Гиваргизов | Автоэмиссионный триод, устройство на его основе и способ его изготовления |
JPH09306395A (ja) | 1996-05-20 | 1997-11-28 | Toshiba Corp | 平面型表示装置およびその製造方法 |
US5708325A (en) * | 1996-05-20 | 1998-01-13 | Motorola | Display spacer structure for a field emission device |
US5811927A (en) * | 1996-06-21 | 1998-09-22 | Motorola, Inc. | Method for affixing spacers within a flat panel display |
US6130106A (en) * | 1996-11-14 | 2000-10-10 | Micron Technology, Inc. | Method for limiting emission current in field emission devices |
US5851133A (en) * | 1996-12-24 | 1998-12-22 | Micron Display Technology, Inc. | FED spacer fibers grown by laser drive CVD |
US5980349A (en) * | 1997-05-14 | 1999-11-09 | Micron Technology, Inc. | Anodically-bonded elements for flat panel displays |
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US6255772B1 (en) * | 1998-02-27 | 2001-07-03 | Micron Technology, Inc. | Large-area FED apparatus and method for making same |
US6232705B1 (en) * | 1998-09-01 | 2001-05-15 | Micron Technology, Inc. | Field emitter arrays with gate insulator and cathode formed from single layer of polysilicon |
US6733354B1 (en) * | 2000-08-31 | 2004-05-11 | Micron Technology, Inc. | Spacers for field emission displays |
US8644804B2 (en) | 2009-10-02 | 2014-02-04 | Badger Meter, Inc. | Method and system for providing web-enabled cellular access to meter reading data |
-
1998
- 1998-02-27 US US09/032,127 patent/US6255772B1/en not_active Expired - Lifetime
-
1999
- 1999-02-26 KR KR1020007009573A patent/KR100597056B1/ko not_active IP Right Cessation
- 1999-02-26 AU AU28836/99A patent/AU2883699A/en not_active Abandoned
- 1999-02-26 JP JP2000533887A patent/JP4001460B2/ja not_active Expired - Fee Related
- 1999-02-26 DE DE69910979T patent/DE69910979T2/de not_active Expired - Lifetime
- 1999-02-26 AT AT99909683T patent/ATE249096T1/de not_active IP Right Cessation
- 1999-02-26 WO PCT/US1999/004382 patent/WO1999044218A1/en active IP Right Grant
- 1999-02-26 EP EP99909683A patent/EP1057200B1/de not_active Expired - Lifetime
-
2001
- 2001-05-30 US US09/867,912 patent/US6495956B2/en not_active Expired - Lifetime
-
2002
- 2002-10-02 US US10/262,747 patent/US7033238B2/en not_active Expired - Fee Related
-
2006
- 2006-04-17 US US11/405,112 patent/US7462088B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20030038588A1 (en) | 2003-02-27 |
US20010054866A1 (en) | 2001-12-27 |
AU2883699A (en) | 1999-09-15 |
US7462088B2 (en) | 2008-12-09 |
WO1999044218A9 (en) | 2000-07-20 |
DE69910979T2 (de) | 2004-07-22 |
KR100597056B1 (ko) | 2006-07-06 |
EP1057200A1 (de) | 2000-12-06 |
WO1999044218A1 (en) | 1999-09-02 |
US20060189244A1 (en) | 2006-08-24 |
US6495956B2 (en) | 2002-12-17 |
EP1057200B1 (de) | 2003-09-03 |
JP4001460B2 (ja) | 2007-10-31 |
US6255772B1 (en) | 2001-07-03 |
US7033238B2 (en) | 2006-04-25 |
KR20010041434A (ko) | 2001-05-25 |
ATE249096T1 (de) | 2003-09-15 |
JP2002505503A (ja) | 2002-02-19 |
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