DE69910979D1 - Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellung - Google Patents

Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellung

Info

Publication number
DE69910979D1
DE69910979D1 DE69910979T DE69910979T DE69910979D1 DE 69910979 D1 DE69910979 D1 DE 69910979D1 DE 69910979 T DE69910979 T DE 69910979T DE 69910979 T DE69910979 T DE 69910979T DE 69910979 D1 DE69910979 D1 DE 69910979D1
Authority
DE
Germany
Prior art keywords
fed
spacers
field emission
conductive layer
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69910979T
Other languages
English (en)
Other versions
DE69910979T2 (de
Inventor
A Cathey
J Browning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of DE69910979D1 publication Critical patent/DE69910979D1/de
Application granted granted Critical
Publication of DE69910979T2 publication Critical patent/DE69910979T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/028Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86Vessels; Containers; Vacuum locks
    • H01J29/864Spacers between faceplate and backplate of flat panel cathode ray tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/18Assembling together the component parts of electrode systems
    • H01J9/185Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242Spacers between faceplate and backplate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/863Spacing members characterised by the form or structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Luminescent Compositions (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Separation By Low-Temperature Treatments (AREA)
DE69910979T 1998-02-27 1999-02-26 Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellung Expired - Lifetime DE69910979T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/032,127 US6255772B1 (en) 1998-02-27 1998-02-27 Large-area FED apparatus and method for making same
US32127 1998-02-27
PCT/US1999/004382 WO1999044218A1 (en) 1998-02-27 1999-02-26 Large-area fed apparatus and method for making same

Publications (2)

Publication Number Publication Date
DE69910979D1 true DE69910979D1 (de) 2003-10-09
DE69910979T2 DE69910979T2 (de) 2004-07-22

Family

ID=21863249

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69910979T Expired - Lifetime DE69910979T2 (de) 1998-02-27 1999-02-26 Grossflächige feldemissions-bildwiedergabeanordnung und verfahren zur herstellung

Country Status (8)

Country Link
US (4) US6255772B1 (de)
EP (1) EP1057200B1 (de)
JP (1) JP4001460B2 (de)
KR (1) KR100597056B1 (de)
AT (1) ATE249096T1 (de)
AU (1) AU2883699A (de)
DE (1) DE69910979T2 (de)
WO (1) WO1999044218A1 (de)

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KR100444506B1 (ko) * 2001-12-27 2004-08-16 엘지전자 주식회사 전계방출 표시소자의 스페이서 및 그의 형성 및 설치방법
US7005807B1 (en) * 2002-05-30 2006-02-28 Cdream Corporation Negative voltage driving of a carbon nanotube field emissive display
US7170223B2 (en) * 2002-07-17 2007-01-30 Hewlett-Packard Development Company, L.P. Emitter with dielectric layer having implanted conducting centers
TWI223307B (en) * 2003-06-24 2004-11-01 Ind Tech Res Inst Method of forming spacers on a substrate
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KR101173859B1 (ko) * 2006-01-31 2012-08-14 삼성에스디아이 주식회사 스페이서 및 이를 구비한 전자 방출 표시 디바이스
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KR20080079838A (ko) * 2007-02-28 2008-09-02 삼성에스디아이 주식회사 발광 장치 및 이를 구비한 표시 장치
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US20090058257A1 (en) * 2007-08-28 2009-03-05 Motorola, Inc. Actively controlled distributed backlight for a liquid crystal display
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JP2010009988A (ja) * 2008-06-27 2010-01-14 Canon Inc 発光スクリーン及び画像表示装置
US8664622B2 (en) * 2012-04-11 2014-03-04 Taiwan Semiconductor Manufacturing Co., Ltd. System and method of ion beam source for semiconductor ion implantation
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Also Published As

Publication number Publication date
US20030038588A1 (en) 2003-02-27
US20010054866A1 (en) 2001-12-27
AU2883699A (en) 1999-09-15
US7462088B2 (en) 2008-12-09
WO1999044218A9 (en) 2000-07-20
DE69910979T2 (de) 2004-07-22
KR100597056B1 (ko) 2006-07-06
EP1057200A1 (de) 2000-12-06
WO1999044218A1 (en) 1999-09-02
US20060189244A1 (en) 2006-08-24
US6495956B2 (en) 2002-12-17
EP1057200B1 (de) 2003-09-03
JP4001460B2 (ja) 2007-10-31
US6255772B1 (en) 2001-07-03
US7033238B2 (en) 2006-04-25
KR20010041434A (ko) 2001-05-25
ATE249096T1 (de) 2003-09-15
JP2002505503A (ja) 2002-02-19

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