JP3962719B2 - インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法 - Google Patents

インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法 Download PDF

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Publication number
JP3962719B2
JP3962719B2 JP2003413499A JP2003413499A JP3962719B2 JP 3962719 B2 JP3962719 B2 JP 3962719B2 JP 2003413499 A JP2003413499 A JP 2003413499A JP 2003413499 A JP2003413499 A JP 2003413499A JP 3962719 B2 JP3962719 B2 JP 3962719B2
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JP
Japan
Prior art keywords
protective layer
film
ink
upper protective
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003413499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004216876A5 (enExample
JP2004216876A (ja
Inventor
稔康 坂井
一郎 斉藤
宇 横山
照夫 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003413499A priority Critical patent/JP3962719B2/ja
Priority to US10/536,266 priority patent/US7306327B2/en
Priority to AU2003290431A priority patent/AU2003290431A1/en
Priority to PCT/JP2003/016705 priority patent/WO2004060680A1/en
Priority to TW092137115A priority patent/TW200410832A/zh
Publication of JP2004216876A publication Critical patent/JP2004216876A/ja
Publication of JP2004216876A5 publication Critical patent/JP2004216876A5/ja
Application granted granted Critical
Publication of JP3962719B2 publication Critical patent/JP3962719B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2003413499A 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法 Expired - Fee Related JP3962719B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003413499A JP3962719B2 (ja) 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
US10/536,266 US7306327B2 (en) 2002-12-27 2003-12-25 Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof
AU2003290431A AU2003290431A1 (en) 2002-12-27 2003-12-25 Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof
PCT/JP2003/016705 WO2004060680A1 (en) 2002-12-27 2003-12-25 Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof
TW092137115A TW200410832A (en) 2002-12-27 2003-12-26 Substrate for ink jet head, ink jet head using the same, and manufacturing method thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002380875 2002-12-27
JP2002380821 2002-12-27
JP2003413499A JP3962719B2 (ja) 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法

Publications (3)

Publication Number Publication Date
JP2004216876A JP2004216876A (ja) 2004-08-05
JP2004216876A5 JP2004216876A5 (enExample) 2007-01-25
JP3962719B2 true JP3962719B2 (ja) 2007-08-22

Family

ID=32718770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003413499A Expired - Fee Related JP3962719B2 (ja) 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法

Country Status (5)

Country Link
US (1) US7306327B2 (enExample)
JP (1) JP3962719B2 (enExample)
AU (1) AU2003290431A1 (enExample)
TW (1) TW200410832A (enExample)
WO (1) WO2004060680A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4137027B2 (ja) * 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4182035B2 (ja) * 2004-08-16 2008-11-19 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
US8142678B2 (en) * 2005-08-23 2012-03-27 Canon Kabushiki Kaisha Perovskite type oxide material, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide material
JP4926669B2 (ja) * 2005-12-09 2012-05-09 キヤノン株式会社 インクジェットヘッドのクリーニング方法、インクジェットヘッドおよびインクジェット記録装置
JP4847360B2 (ja) 2006-02-02 2011-12-28 キヤノン株式会社 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
JP5311975B2 (ja) * 2007-12-12 2013-10-09 キヤノン株式会社 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP5393275B2 (ja) * 2008-06-24 2014-01-22 キヤノン株式会社 液体吐出ヘッド
US9808812B2 (en) * 2014-06-20 2017-11-07 The Procter & Gamble Company Microfluidic delivery system
JP6504905B2 (ja) 2015-05-08 2019-04-24 キヤノン株式会社 液体吐出ヘッド及び該ヘッドのクリーニング方法、並びに記録装置
JP7163134B2 (ja) 2018-10-18 2022-10-31 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3576888B2 (ja) * 1999-10-04 2004-10-13 キヤノン株式会社 インクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
JP3710364B2 (ja) * 2000-07-31 2005-10-26 キヤノン株式会社 インクジェットヘッド
US6582070B2 (en) * 2000-09-04 2003-06-24 Canon Kabushiki Kaisha Recording unit and image recording apparatus
JP2003291353A (ja) 2002-04-04 2003-10-14 Sony Corp 液体吐出装置、プリンタ及び液体吐出装置の製造方法

Also Published As

Publication number Publication date
TW200410832A (en) 2004-07-01
AU2003290431A1 (en) 2004-07-29
US20060146095A1 (en) 2006-07-06
US7306327B2 (en) 2007-12-11
JP2004216876A (ja) 2004-08-05
WO2004060680A1 (en) 2004-07-22

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