JP3962332B2 - 銅内の金属絶縁体金属コンデンサ - Google Patents
銅内の金属絶縁体金属コンデンサ Download PDFInfo
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- JP3962332B2 JP3962332B2 JP2002558314A JP2002558314A JP3962332B2 JP 3962332 B2 JP3962332 B2 JP 3962332B2 JP 2002558314 A JP2002558314 A JP 2002558314A JP 2002558314 A JP2002558314 A JP 2002558314A JP 3962332 B2 JP3962332 B2 JP 3962332B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76816—Aspects relating to the layout of the pattern or to the size of vias or trenches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5223—Capacitor integral with wiring layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Description
Claims (5)
- 銅相互接続を採用して集積回路内に平行板コンデンサを作成する方法であって、
一組の上部下側レベル相互接続を含む前記集積回路のデバイスおよび下側レベル相互接続を形成するステップであって、デバイスおよび下側レベル相互接続のいくつかが銅から形成されているステップと、
第1のキャップ厚さを有する第1のキャップ層と、前記第1のキャップ層の上に堆積された導電底部プレート層と、前記導電底部プレート層の上に堆積されたコンデンサ誘電体層と、前記コンデンサ誘電体層の上に堆積された導電上部プレート層と、前記導電上部プレート層の上に堆積された第2のキャップ厚さを有する第2のキャップ層とを備える初期コンデンサ積層を形成するステップと、
前記第2のキャップ層および前記上部プレート層をエッチングして、前記コンデンサ誘電体層の上で止め、前記第2のキャップ層によってカバーされたコンデンサ上部プレートを形成するステップであって、前記コンデンサ上部プレートが、少なくとも最小オフセット距離だけ上部下側レベル相互接続の前記組の最近接の1つからオフセットされたコンデンサ領域内に含まれているステップと、
第3のキャップ厚さを有する第3のキャップ層を形成するステップであって、前記コンデンサ誘電体層の露出部分が、前記第3のキャップ層によってカバーされ、前記導電上部プレートが、前記第2および第3のキャップ厚さの合計に実質的に等しい上部プレート・キャップ厚さを有する上部プレート・キャップ層によってカバーされるステップと、
前記第3のキャップ層と、前記コンデンサ誘電体層と、前記底部プレート層とをエッチングし、それにより、前記コンデンサ領域をカバーして、全ての側で前記コンデンサ上部プレートを越えて延在するコンデンサ底部プレートを形成し、それにより前記コンデンサ底部プレートの全ての縁部が、少なくとも上部プレート・オフセット距離だけ前記コンデンサ上部プレートの対応する縁部から横方向にオフセットされるステップと、
層間誘電体の層を堆積するステップと、
前記層間誘電体に、前記第1および第3のキャップ層で止まる一組のバイア・アパーチャを形成するステップと、
前記底部プレートの上方、かつ前記上部プレートの外側で、底部プレート・コンタクト領域内の前記第3のキャップ層全てを除去し、上部プレート・コンタクト領域内で、前記上部プレートの上の前記第3のキャップ層の一部分のみを除去し、前記上部プレート・コンタクト領域内に前記第3のキャップ層の残余厚さを残すステップと、
前記底部プレート・コンタクト領域内で前記コンデンサ誘電体を除去するステップと、
前記上部プレート・コンタクト領域内で前記第3のキャップ層の前記残余厚さ全てを除去するステップと、
前記上部プレート・コンタクト領域および前記底部プレート・コンタクト領域内で、一組の上側レベル相互接続のコンデンサ相互接続部材を形成するステップと
を含む方法。 - 前記底部プレート層が、下側高導電性層と上側導電障壁層とを備える合成層であり、前記底部プレート・コンタクト領域内の前記コンデンサ誘電体を除去する前記ステップが、前記上側導電障壁層のみに貫入する請求項1に記載の方法。
- ライナ材料が、前記上部プレート・コンタクト領域および前記底部プレート・コンタクト領域内に堆積され、
銅の層が、前記ライナ材料の上に堆積され、上側レベル相互接続の前記組を形成するようにパターン形成されている
請求項1に記載の方法。 - 前記層間誘電体に一組のバイア・アパーチャを形成するステップが、上側レベル相互接続の前記組のためのバイア・アパーチャを同時に形成するステップを含み、
前記上部プレートの上方で前記第3のキャップ層の一部のみを除去する前記ステップが、上側レベル相互接続の前記組のための前記バイア・アパーチャ内で、前記第3のキャップ層の一部分のみを同時に除去するステップを含み、
前記上部プレート・コンタクト領域内で前記第3のキャップ層の前記残余厚さ全てを除去する前記ステップが、上側レベル相互接続の前記組のための前記バイア・アパーチャ内で、前記第3のキャップ層の前記残余厚さ全てを同時に除去するステップを含み、
前記上部プレート・コンタクト領域および前記底部プレート・コンタクト領域内で一組の上側レベル相互接続のコンデンサ相互接続部材を形成する前記ステップが、上側レベル相互接続の前記組のためのコンデンサ相互接続部材を同時に形成するステップを含む
請求項1に記載の方法。 - 前記コンデンサ相互接続部材がアルミニウムである請求項1に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/764,832 US6750113B2 (en) | 2001-01-17 | 2001-01-17 | Metal-insulator-metal capacitor in copper |
PCT/EP2002/001049 WO2002058117A2 (en) | 2001-01-17 | 2002-01-16 | Metal-insulator-metal capacitor in copper |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004523110A JP2004523110A (ja) | 2004-07-29 |
JP3962332B2 true JP3962332B2 (ja) | 2007-08-22 |
Family
ID=25071914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002558314A Expired - Fee Related JP3962332B2 (ja) | 2001-01-17 | 2002-01-16 | 銅内の金属絶縁体金属コンデンサ |
Country Status (11)
Country | Link |
---|---|
US (1) | US6750113B2 (ja) |
EP (1) | EP1378002B8 (ja) |
JP (1) | JP3962332B2 (ja) |
KR (1) | KR100483389B1 (ja) |
CN (1) | CN1295748C (ja) |
AT (1) | ATE355614T1 (ja) |
DE (1) | DE60218442T2 (ja) |
IL (2) | IL156928A0 (ja) |
MY (1) | MY127277A (ja) |
TW (1) | TW557535B (ja) |
WO (1) | WO2002058117A2 (ja) |
Families Citing this family (22)
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DE10236890A1 (de) * | 2002-08-12 | 2004-03-04 | Infineon Technologies Ag | Integrierte Schaltungsanordnungen, insbesondere Kondensatoranordnungen, und zugehörige Herstellungsverfahren |
US6833300B2 (en) * | 2003-01-24 | 2004-12-21 | Texas Instruments Incorporated | Method of forming integrated circuit contacts |
US7355880B1 (en) * | 2003-04-16 | 2008-04-08 | Cypress Semiconductor Corporation | Soft error resistant memory cell and method of manufacture |
US7291897B2 (en) * | 2003-10-30 | 2007-11-06 | Texas Instruments Incorporated | One mask high density capacitor for integrated circuits |
US7282404B2 (en) | 2004-06-01 | 2007-10-16 | International Business Machines Corporation | Inexpensive method of fabricating a higher performance capacitance density MIMcap integrable into a copper interconnect scheme |
US7301752B2 (en) * | 2004-06-04 | 2007-11-27 | International Business Machines Corporation | Formation of metal-insulator-metal capacitor simultaneously with aluminum metal wiring level using a hardmask |
FR2879815A1 (fr) | 2004-12-16 | 2006-06-23 | St Microelectronics Sa | Fabrication d'un condensateur par depot metallique dans une couche de dielectrique d'interconnexion de circuit integre |
JP2006190889A (ja) * | 2005-01-07 | 2006-07-20 | Fujitsu Ltd | 半導体装置とその製造方法 |
FR2884645B1 (fr) * | 2005-04-19 | 2007-08-10 | St Microelectronics Sa | Procede de realisation d'un circuit integre comprenant un condensateur |
FR2884646B1 (fr) * | 2005-04-19 | 2007-09-14 | St Microelectronics Sa | Procede de fabrication d'un circuit integre comprenant un condensateur tridimensionnel |
US20070080455A1 (en) * | 2005-10-11 | 2007-04-12 | International Business Machines Corporation | Semiconductors and methods of making |
US7483258B2 (en) * | 2005-12-13 | 2009-01-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | MIM capacitor in a copper damascene interconnect |
US7863183B2 (en) * | 2006-01-18 | 2011-01-04 | International Business Machines Corporation | Method for fabricating last level copper-to-C4 connection with interfacial cap structure |
US7964470B2 (en) * | 2006-03-01 | 2011-06-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Flexible processing method for metal-insulator-metal capacitor formation |
US20080174015A1 (en) * | 2007-01-23 | 2008-07-24 | Russell Thomas Herrin | Removal of etching process residual in semiconductor fabrication |
JP2009141237A (ja) * | 2007-12-10 | 2009-06-25 | Panasonic Corp | 半導体装置及びその製造方法 |
JP5446120B2 (ja) * | 2008-04-23 | 2014-03-19 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法及び半導体装置 |
US8878338B2 (en) | 2012-05-31 | 2014-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capacitor for interposers and methods of manufacture thereof |
US9368392B2 (en) | 2014-04-10 | 2016-06-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | MIM capacitor structure |
US9391016B2 (en) * | 2014-04-10 | 2016-07-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | MIM capacitor structure |
US9219110B2 (en) | 2014-04-10 | 2015-12-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | MIM capacitor structure |
US9425061B2 (en) | 2014-05-29 | 2016-08-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Buffer cap layer to improve MIM structure performance |
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EP0738013B1 (en) * | 1993-08-05 | 2003-10-15 | Matsushita Electric Industrial Co., Ltd. | Manufacturing method of semiconductor device having a high dielectric constant capacitor |
US6404003B1 (en) * | 1999-07-28 | 2002-06-11 | Symetrix Corporation | Thin film capacitors on silicon germanium substrate |
JP3045928B2 (ja) * | 1994-06-28 | 2000-05-29 | 松下電子工業株式会社 | 半導体装置およびその製造方法 |
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-
2001
- 2001-01-17 US US09/764,832 patent/US6750113B2/en not_active Expired - Lifetime
-
2002
- 2002-01-14 MY MYPI20020113A patent/MY127277A/en unknown
- 2002-01-14 TW TW091100402A patent/TW557535B/zh not_active IP Right Cessation
- 2002-01-16 IL IL15692802A patent/IL156928A0/xx active IP Right Grant
- 2002-01-16 WO PCT/EP2002/001049 patent/WO2002058117A2/en active IP Right Grant
- 2002-01-16 KR KR10-2003-7009185A patent/KR100483389B1/ko not_active IP Right Cessation
- 2002-01-16 EP EP02718080A patent/EP1378002B8/en not_active Expired - Lifetime
- 2002-01-16 DE DE60218442T patent/DE60218442T2/de not_active Expired - Lifetime
- 2002-01-16 CN CNB028037634A patent/CN1295748C/zh not_active Expired - Lifetime
- 2002-01-16 JP JP2002558314A patent/JP3962332B2/ja not_active Expired - Fee Related
- 2002-01-16 AT AT02718080T patent/ATE355614T1/de not_active IP Right Cessation
-
2003
- 2003-07-15 IL IL156928A patent/IL156928A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1378002A2 (en) | 2004-01-07 |
EP1378002B8 (en) | 2007-04-18 |
TW557535B (en) | 2003-10-11 |
WO2002058117A2 (en) | 2002-07-25 |
DE60218442D1 (de) | 2007-04-12 |
WO2002058117A3 (en) | 2003-08-28 |
US20020094656A1 (en) | 2002-07-18 |
MY127277A (en) | 2006-11-30 |
ATE355614T1 (de) | 2006-03-15 |
IL156928A (en) | 2007-12-03 |
EP1378002B1 (en) | 2007-02-28 |
US6750113B2 (en) | 2004-06-15 |
JP2004523110A (ja) | 2004-07-29 |
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CN1568534A (zh) | 2005-01-19 |
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