JP3934191B2 - 半導体製造装置 - Google Patents
半導体製造装置 Download PDFInfo
- Publication number
- JP3934191B2 JP3934191B2 JP35408796A JP35408796A JP3934191B2 JP 3934191 B2 JP3934191 B2 JP 3934191B2 JP 35408796 A JP35408796 A JP 35408796A JP 35408796 A JP35408796 A JP 35408796A JP 3934191 B2 JP3934191 B2 JP 3934191B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- speed
- chamber
- transfer
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35408796A JP3934191B2 (ja) | 1996-12-18 | 1996-12-18 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35408796A JP3934191B2 (ja) | 1996-12-18 | 1996-12-18 | 半導体製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10178083A JPH10178083A (ja) | 1998-06-30 |
| JPH10178083A5 JPH10178083A5 (enExample) | 2004-10-07 |
| JP3934191B2 true JP3934191B2 (ja) | 2007-06-20 |
Family
ID=18435208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35408796A Expired - Lifetime JP3934191B2 (ja) | 1996-12-18 | 1996-12-18 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3934191B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6977014B1 (en) | 2000-06-02 | 2005-12-20 | Novellus Systems, Inc. | Architecture for high throughput semiconductor processing applications |
| US6712907B1 (en) * | 2000-06-23 | 2004-03-30 | Novellus Systems, Inc. | Magnetically coupled linear servo-drive mechanism |
| US6860965B1 (en) | 2000-06-23 | 2005-03-01 | Novellus Systems, Inc. | High throughput architecture for semiconductor processing |
| JP4841183B2 (ja) * | 2005-06-28 | 2011-12-21 | 東京エレクトロン株式会社 | 基板処理装置，搬送装置，搬送装置の制御方法 |
| US7286890B2 (en) | 2005-06-28 | 2007-10-23 | Tokyo Electron Limited | Transfer apparatus for target object |
| JP5675416B2 (ja) * | 2011-02-17 | 2015-02-25 | 東京エレクトロン株式会社 | 被処理体の搬送方法及び被処理体処理装置 |
| JP2020017645A (ja) * | 2018-07-26 | 2020-01-30 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置 |
-
1996
- 1996-12-18 JP JP35408796A patent/JP3934191B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10178083A (ja) | 1998-06-30 |
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