JPH10178083A5 - - Google Patents

Info

Publication number
JPH10178083A5
JPH10178083A5 JP1996354087A JP35408796A JPH10178083A5 JP H10178083 A5 JPH10178083 A5 JP H10178083A5 JP 1996354087 A JP1996354087 A JP 1996354087A JP 35408796 A JP35408796 A JP 35408796A JP H10178083 A5 JPH10178083 A5 JP H10178083A5
Authority
JP
Japan
Prior art keywords
substrate
transport
chamber
holding means
substrate holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996354087A
Other languages
English (en)
Japanese (ja)
Other versions
JP3934191B2 (ja
JPH10178083A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP35408796A priority Critical patent/JP3934191B2/ja
Priority claimed from JP35408796A external-priority patent/JP3934191B2/ja
Publication of JPH10178083A publication Critical patent/JPH10178083A/ja
Publication of JPH10178083A5 publication Critical patent/JPH10178083A5/ja
Application granted granted Critical
Publication of JP3934191B2 publication Critical patent/JP3934191B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP35408796A 1996-12-18 1996-12-18 半導体製造装置 Expired - Lifetime JP3934191B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35408796A JP3934191B2 (ja) 1996-12-18 1996-12-18 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35408796A JP3934191B2 (ja) 1996-12-18 1996-12-18 半導体製造装置

Publications (3)

Publication Number Publication Date
JPH10178083A JPH10178083A (ja) 1998-06-30
JPH10178083A5 true JPH10178083A5 (enExample) 2004-10-07
JP3934191B2 JP3934191B2 (ja) 2007-06-20

Family

ID=18435208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35408796A Expired - Lifetime JP3934191B2 (ja) 1996-12-18 1996-12-18 半導体製造装置

Country Status (1)

Country Link
JP (1) JP3934191B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6977014B1 (en) 2000-06-02 2005-12-20 Novellus Systems, Inc. Architecture for high throughput semiconductor processing applications
US6712907B1 (en) * 2000-06-23 2004-03-30 Novellus Systems, Inc. Magnetically coupled linear servo-drive mechanism
US6860965B1 (en) 2000-06-23 2005-03-01 Novellus Systems, Inc. High throughput architecture for semiconductor processing
JP4841183B2 (ja) * 2005-06-28 2011-12-21 東京エレクトロン株式会社 基板処理装置，搬送装置，搬送装置の制御方法
US7286890B2 (en) 2005-06-28 2007-10-23 Tokyo Electron Limited Transfer apparatus for target object
JP5675416B2 (ja) * 2011-02-17 2015-02-25 東京エレクトロン株式会社 被処理体の搬送方法及び被処理体処理装置
JP2020017645A (ja) * 2018-07-26 2020-01-30 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置

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