JP3916349B2 - 液晶表示装置 - Google Patents
液晶表示装置 Download PDFInfo
- Publication number
- JP3916349B2 JP3916349B2 JP26695699A JP26695699A JP3916349B2 JP 3916349 B2 JP3916349 B2 JP 3916349B2 JP 26695699 A JP26695699 A JP 26695699A JP 26695699 A JP26695699 A JP 26695699A JP 3916349 B2 JP3916349 B2 JP 3916349B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating
- layer
- insulating substrate
- transfer electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 23
- 239000010408 film Substances 0.000 claims description 166
- 239000000758 substrate Substances 0.000 claims description 114
- 229910052751 metal Inorganic materials 0.000 claims description 66
- 239000002184 metal Substances 0.000 claims description 66
- 239000010409 thin film Substances 0.000 claims description 36
- 239000004020 conductor Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000005553 drilling Methods 0.000 claims description 3
- 238000005137 deposition process Methods 0.000 claims 1
- 238000002834 transmittance Methods 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26695699A JP3916349B2 (ja) | 1999-06-15 | 1999-09-21 | 液晶表示装置 |
| TW089110783A TWI242093B (en) | 1999-06-15 | 2000-06-02 | Liquid crystal display device |
| KR1020000030947A KR100756901B1 (ko) | 1999-06-15 | 2000-06-07 | 액정표시장치 |
| US09/592,587 US6690442B1 (en) | 1999-06-15 | 2000-06-12 | Liquid crystal display device |
| US10/732,357 US6836301B1 (en) | 1999-06-15 | 2003-12-11 | Liquid crystal display device |
| US10/736,537 US6882377B2 (en) | 1999-06-15 | 2003-12-17 | Liquid crystal display device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11-167872 | 1999-06-15 | ||
| JP16787299 | 1999-06-15 | ||
| JP26695699A JP3916349B2 (ja) | 1999-06-15 | 1999-09-21 | 液晶表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001059971A JP2001059971A (ja) | 2001-03-06 |
| JP2001059971A5 JP2001059971A5 (enExample) | 2006-11-30 |
| JP3916349B2 true JP3916349B2 (ja) | 2007-05-16 |
Family
ID=26491786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26695699A Expired - Lifetime JP3916349B2 (ja) | 1999-06-15 | 1999-09-21 | 液晶表示装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6690442B1 (enExample) |
| JP (1) | JP3916349B2 (enExample) |
| KR (1) | KR100756901B1 (enExample) |
| TW (1) | TWI242093B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140091620A (ko) * | 2008-09-19 | 2014-07-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100673331B1 (ko) * | 2000-02-19 | 2007-01-23 | 엘지.필립스 엘시디 주식회사 | 액정 표시장치 제조방법 및 그 제조방법에 따른액정표시장치 |
| US6833900B2 (en) * | 2001-02-16 | 2004-12-21 | Seiko Epson Corporation | Electro-optical device and electronic apparatus |
| KR100987714B1 (ko) * | 2003-10-20 | 2010-10-13 | 삼성전자주식회사 | 하부기판, 이를 갖는 표시장치 및 이의 제조방법 |
| US7309922B2 (en) | 2003-10-20 | 2007-12-18 | Samsun Electronics Co., Ltd. | Lower substrate, display apparatus having the same and method of manufacturing the same |
| KR100987723B1 (ko) * | 2003-11-06 | 2010-10-13 | 삼성전자주식회사 | 하부기판의 제조방법 |
| KR100987713B1 (ko) * | 2003-11-03 | 2010-10-13 | 삼성전자주식회사 | 하부기판, 이를 갖는 표시장치 및 이의 제조방법 |
| EP1827221A4 (en) * | 2004-11-24 | 2009-08-26 | Fonar Corp | IMMOBILIZATION ARMATURE FOR MAGNETIC RESONANCE TOMOGRAPHY |
| KR100683791B1 (ko) | 2005-07-30 | 2007-02-20 | 삼성에스디아이 주식회사 | 박막 트랜지스터 기판 및 이를 구비한 평판 디스플레이장치 |
| KR101298693B1 (ko) * | 2006-07-19 | 2013-08-21 | 삼성디스플레이 주식회사 | 액정표시패널 및 이의 제조 방법 |
| KR101252004B1 (ko) * | 2007-01-25 | 2013-04-08 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
| JP4968214B2 (ja) * | 2007-09-28 | 2012-07-04 | カシオ計算機株式会社 | 液晶表示装置 |
| WO2010032639A1 (en) * | 2008-09-19 | 2010-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method of the same |
| KR102413263B1 (ko) | 2008-09-19 | 2022-06-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
| CN102566165B (zh) * | 2010-12-20 | 2015-01-07 | 北京京东方光电科技有限公司 | 阵列基板及其制造方法和液晶显示器 |
| JP2013093565A (ja) | 2011-10-07 | 2013-05-16 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| KR20210148534A (ko) * | 2020-05-29 | 2021-12-08 | 삼성디스플레이 주식회사 | 표시 장치 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW321731B (enExample) * | 1994-07-27 | 1997-12-01 | Hitachi Ltd | |
| JP3225772B2 (ja) * | 1995-01-30 | 2001-11-05 | 株式会社日立製作所 | 液晶表示装置の製造方法 |
| US5894136A (en) * | 1996-01-15 | 1999-04-13 | Lg Electronics Inc. | Liquid crystal display having a bottom gate TFT switch having a wider active semiconductor layer than a conductive layer on same |
| JPH09244055A (ja) * | 1996-03-14 | 1997-09-19 | Hitachi Ltd | 液晶表示装置 |
| KR100188110B1 (ko) * | 1996-04-10 | 1999-06-01 | 김광호 | 액정 표시 장치 |
| JP3883641B2 (ja) * | 1997-03-27 | 2007-02-21 | 株式会社半導体エネルギー研究所 | コンタクト構造およびアクティブマトリクス型表示装置 |
| JP4028043B2 (ja) | 1997-10-03 | 2007-12-26 | コニカミノルタホールディングス株式会社 | 液晶光変調素子および液晶光変調素子の製造方法 |
| JP3976915B2 (ja) * | 1998-02-09 | 2007-09-19 | シャープ株式会社 | 二次元画像検出器およびその製造方法 |
| JP3161528B2 (ja) * | 1998-09-07 | 2001-04-25 | 日本電気株式会社 | 液晶表示パネル |
| KR100333983B1 (ko) * | 1999-05-13 | 2002-04-26 | 윤종용 | 광시야각 액정 표시 장치용 박막 트랜지스터 어레이 기판 및그의 제조 방법 |
| JP2001042340A (ja) | 1999-08-03 | 2001-02-16 | Minolta Co Ltd | 液晶表示素子の製造方法 |
| JP2001100217A (ja) * | 1999-09-29 | 2001-04-13 | Nec Corp | カラー液晶表示装置およびその製造方法 |
| CN1163964C (zh) | 1999-11-05 | 2004-08-25 | 三星电子株式会社 | 用于液晶显示器的薄膜晶体管阵列面板 |
-
1999
- 1999-09-21 JP JP26695699A patent/JP3916349B2/ja not_active Expired - Lifetime
-
2000
- 2000-06-02 TW TW089110783A patent/TWI242093B/zh not_active IP Right Cessation
- 2000-06-07 KR KR1020000030947A patent/KR100756901B1/ko not_active Expired - Lifetime
- 2000-06-12 US US09/592,587 patent/US6690442B1/en not_active Expired - Lifetime
-
2003
- 2003-12-17 US US10/736,537 patent/US6882377B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140091620A (ko) * | 2008-09-19 | 2014-07-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
| US10032796B2 (en) | 2008-09-19 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| KR101889287B1 (ko) * | 2008-09-19 | 2018-08-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 |
| US10559599B2 (en) | 2008-09-19 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| US11610918B2 (en) | 2008-09-19 | 2023-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI242093B (en) | 2005-10-21 |
| US6690442B1 (en) | 2004-02-10 |
| KR20010007251A (ko) | 2001-01-26 |
| US6882377B2 (en) | 2005-04-19 |
| JP2001059971A (ja) | 2001-03-06 |
| KR100756901B1 (ko) | 2007-09-07 |
| US20040125318A1 (en) | 2004-07-01 |
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