JP3851910B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP3851910B2 JP3851910B2 JP2004092434A JP2004092434A JP3851910B2 JP 3851910 B2 JP3851910 B2 JP 3851910B2 JP 2004092434 A JP2004092434 A JP 2004092434A JP 2004092434 A JP2004092434 A JP 2004092434A JP 3851910 B2 JP3851910 B2 JP 3851910B2
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- film
- upper electrode
- dielectric film
- convex pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
- H10B53/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the memory core region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
Description
図1は、本発明の第1の実施形態に係る半導体装置(強誘電体メモリ)の概略構成を模式的に示した断面図である。
次に、本発明の第2の実施形態に係る半導体装置(強誘電体メモリ)について説明する。なお、強誘電体メモリの基本的な構成については、図1に示した構成とほぼ同様であるため、説明は省略する。
次に、本発明の第3の実施形態に係る半導体装置(強誘電体メモリ)について説明する。なお、強誘電体メモリの基本的な構成については、図1に示した構成とほぼ同様であるため、説明は省略する。
102…ポリシリコン膜 103…Wシリサイド膜
104…シリコン窒化膜 105…ソース/ドレイン拡散層
106、108、109、110、123…層間絶縁膜
107…ポリシリコンプラグ 112…バリアメタル膜
113…タングステンプラグ 114…導電性バリア膜
115…下部電極 116…誘電体膜
117…上部電極 118、120、122…アルミナ膜
119、121…シリコン酸化膜 124…アルミニウムプラグ
125…アルミニウム配線 201…穴パターン部
211、221…凸パターン部 212…空隙
Claims (3)
- 半導体基板と、
前記半導体基板の上方に設けられ、下部電極と、前記下部電極上に設けられ且つ金属酸化物で形成された強誘電体膜と、前記強誘電体膜上に形成された上部電極と、を含んだ第1のキャパシタと、
を備え、
前記上部電極及び強誘電体膜の平面パターンは複数の凸パターン部を有する
ことを特徴とする半導体装置。 - 前記複数の凸パターン部は、櫛形状に配置されている
ことを特徴とする請求項1に記載の半導体装置。 - 前記半導体基板の上方に設けられ、前記第1のキャパシタに隣接し、下部電極と、該下部電極上に設けられ且つ金属酸化物で形成された強誘電体膜と、該強誘電体膜上に形成された上部電極と、を含んだ第2のキャパシタをさらに備え、
前記第2のキャパシタの上部電極及び強誘電体膜の平面パターンは複数の凸パターン部を有し、
前記第1のキャパシタの凸パターン部と前記第2のキャパシタの凸パターン部とは互い違いに配置されている
ことを特徴とする請求項1に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004092434A JP3851910B2 (ja) | 2004-03-26 | 2004-03-26 | 半導体装置 |
US10/911,501 US7564089B2 (en) | 2004-03-26 | 2004-08-05 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004092434A JP3851910B2 (ja) | 2004-03-26 | 2004-03-26 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005277350A JP2005277350A (ja) | 2005-10-06 |
JP3851910B2 true JP3851910B2 (ja) | 2006-11-29 |
Family
ID=34988752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004092434A Expired - Fee Related JP3851910B2 (ja) | 2004-03-26 | 2004-03-26 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7564089B2 (ja) |
JP (1) | JP3851910B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101184013B1 (ko) | 2006-09-27 | 2012-09-18 | 후지쯔 세미컨덕터 가부시키가이샤 | 커패시터를 갖는 반도체 장치 및 그 제조 방법 |
KR101970783B1 (ko) * | 2012-05-07 | 2019-04-23 | 삼성디스플레이 주식회사 | 반도체 장치 |
CN107895687B (zh) * | 2017-11-15 | 2020-07-17 | 上海华虹宏力半导体制造有限公司 | 一种改善金属电容tddb性能的方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4419812A (en) * | 1982-08-23 | 1983-12-13 | Ncr Corporation | Method of fabricating an integrated circuit voltage multiplier containing a parallel plate capacitor |
JPH0547172A (ja) | 1991-08-07 | 1993-02-26 | Olympus Optical Co Ltd | 強誘電体メモリ |
US5208725A (en) * | 1992-08-19 | 1993-05-04 | Akcasu Osman E | High capacitance structure in a semiconductor device |
JP3319869B2 (ja) * | 1993-06-24 | 2002-09-03 | 三菱電機株式会社 | 半導体記憶装置およびその製造方法 |
JPH07193137A (ja) | 1993-12-27 | 1995-07-28 | Hitachi Ltd | 半導体記憶装置およびその製造方法 |
US5939766A (en) * | 1996-07-24 | 1999-08-17 | Advanced Micro Devices, Inc. | High quality capacitor for sub-micrometer integrated circuits |
US6177716B1 (en) * | 1997-01-02 | 2001-01-23 | Texas Instruments Incorporated | Low loss capacitor structure |
SE520173C2 (sv) * | 1997-04-29 | 2003-06-03 | Ericsson Telefon Ab L M | Förfarande för tillverkning av en kondensator i en integrerad krets |
JP2000323668A (ja) | 1999-05-14 | 2000-11-24 | Nec Corp | 強誘電体容量及びこれを備えた回路装置 |
JP2001298162A (ja) * | 2000-04-12 | 2001-10-26 | Sony Corp | 不揮発性半導体記憶装置 |
JP2004134659A (ja) | 2002-10-11 | 2004-04-30 | Fujitsu Ltd | キャパシタのパターン形成方法及びキャパシタの評価方法 |
-
2004
- 2004-03-26 JP JP2004092434A patent/JP3851910B2/ja not_active Expired - Fee Related
- 2004-08-05 US US10/911,501 patent/US7564089B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005277350A (ja) | 2005-10-06 |
US7564089B2 (en) | 2009-07-21 |
US20050212028A1 (en) | 2005-09-29 |
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