JP3850130B2 - 積層圧電素子 - Google Patents

積層圧電素子 Download PDF

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Publication number
JP3850130B2
JP3850130B2 JP06321098A JP6321098A JP3850130B2 JP 3850130 B2 JP3850130 B2 JP 3850130B2 JP 06321098 A JP06321098 A JP 06321098A JP 6321098 A JP6321098 A JP 6321098A JP 3850130 B2 JP3850130 B2 JP 3850130B2
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JP
Japan
Prior art keywords
electrode
electrode layer
thickness
piezoelectric element
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP06321098A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11261121A (ja
JPH11261121A5 (https=
Inventor
裕 丸山
信行 小島
孝宏 山川
徹 江崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Taiheiyo Cement Corp
Original Assignee
Canon Inc
Taiheiyo Cement Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc, Taiheiyo Cement Corp filed Critical Canon Inc
Priority to JP06321098A priority Critical patent/JP3850130B2/ja
Priority to US09/251,494 priority patent/US6291932B1/en
Publication of JPH11261121A publication Critical patent/JPH11261121A/ja
Priority to US09/597,727 priority patent/US6668437B1/en
Priority to US10/700,852 priority patent/US6951048B2/en
Publication of JPH11261121A5 publication Critical patent/JPH11261121A5/ja
Application granted granted Critical
Publication of JP3850130B2 publication Critical patent/JP3850130B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP06321098A 1998-02-17 1998-03-13 積層圧電素子 Expired - Fee Related JP3850130B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP06321098A JP3850130B2 (ja) 1998-03-13 1998-03-13 積層圧電素子
US09/251,494 US6291932B1 (en) 1998-02-17 1999-02-17 Stacked piezoelectric element and producing method therefor
US09/597,727 US6668437B1 (en) 1998-02-17 2000-06-19 Method for producing a stacked piezoelectric element
US10/700,852 US6951048B2 (en) 1998-02-17 2003-11-05 Method for producing a stacked piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06321098A JP3850130B2 (ja) 1998-03-13 1998-03-13 積層圧電素子

Publications (3)

Publication Number Publication Date
JPH11261121A JPH11261121A (ja) 1999-09-24
JPH11261121A5 JPH11261121A5 (https=) 2005-06-30
JP3850130B2 true JP3850130B2 (ja) 2006-11-29

Family

ID=13222619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06321098A Expired - Fee Related JP3850130B2 (ja) 1998-02-17 1998-03-13 積層圧電素子

Country Status (1)

Country Link
JP (1) JP3850130B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6593681B2 (en) * 2000-12-15 2003-07-15 Matsushita Electric Industrial Co., Ltd. Polarization apparatus and polarization method of coaxial flexible piezoelectric cable
US7141915B2 (en) 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
US7126254B2 (en) 2003-07-22 2006-10-24 Ngk Insulators, Ltd. Actuator element and device including the actuator element

Also Published As

Publication number Publication date
JPH11261121A (ja) 1999-09-24

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