JP3805547B2 - 試料作製装置 - Google Patents

試料作製装置 Download PDF

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Publication number
JP3805547B2
JP3805547B2 JP01313099A JP1313099A JP3805547B2 JP 3805547 B2 JP3805547 B2 JP 3805547B2 JP 01313099 A JP01313099 A JP 01313099A JP 1313099 A JP1313099 A JP 1313099A JP 3805547 B2 JP3805547 B2 JP 3805547B2
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Japan
Prior art keywords
sample
holder
stage
piece
ion beam
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JP01313099A
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English (en)
Japanese (ja)
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JP2000214056A (ja
JP2000214056A5 (enExample
Inventor
馨 梅村
祐一 間所
聡 富松
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Hitachi Ltd
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Hitachi Ltd
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11824584&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3805547(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP01313099A priority Critical patent/JP3805547B2/ja
Publication of JP2000214056A publication Critical patent/JP2000214056A/ja
Publication of JP2000214056A5 publication Critical patent/JP2000214056A5/ja
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JP01313099A 1999-01-21 1999-01-21 試料作製装置 Expired - Lifetime JP3805547B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP01313099A JP3805547B2 (ja) 1999-01-21 1999-01-21 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP01313099A JP3805547B2 (ja) 1999-01-21 1999-01-21 試料作製装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005363394A Division JP4048210B2 (ja) 2005-12-16 2005-12-16 試料作製方法

Publications (3)

Publication Number Publication Date
JP2000214056A JP2000214056A (ja) 2000-08-04
JP2000214056A5 JP2000214056A5 (enExample) 2005-11-04
JP3805547B2 true JP3805547B2 (ja) 2006-08-02

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JP01313099A Expired - Lifetime JP3805547B2 (ja) 1999-01-21 1999-01-21 試料作製装置

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8835845B2 (en) 2007-06-01 2014-09-16 Fei Company In-situ STEM sample preparation
WO2020074026A1 (en) 2018-10-10 2020-04-16 Tescan Brno, S.R.O. Device with at least one adjustable sample holder and method of changing holder tilt angle and method of preparing a lamella

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4178741B2 (ja) 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
JP4616509B2 (ja) * 2001-05-11 2011-01-19 公三 藤本 位置決めマーカおよび位置決め装置
JP4012158B2 (ja) * 2004-02-13 2007-11-21 松下電器産業株式会社 電子顕微鏡装置および電子顕微鏡観察方法
JP3874011B2 (ja) * 2005-04-04 2007-01-31 株式会社日立製作所 微小試料加工観察方法及び装置
JP4507952B2 (ja) * 2005-04-04 2010-07-21 株式会社日立製作所 微小試料加工観察方法及び装置
JP4675860B2 (ja) * 2006-08-09 2011-04-27 株式会社日立ハイテクノロジーズ イオンミリング装置及びその方法
JP4673278B2 (ja) * 2006-09-25 2011-04-20 株式会社日立製作所 ウエハの検査方法
JP5125123B2 (ja) * 2007-01-31 2013-01-23 株式会社日立製作所 微小試料加工観察方法及び装置
JP4100450B2 (ja) * 2007-02-23 2008-06-11 株式会社日立製作所 微小試料加工観察方法及び装置
JP5125143B2 (ja) * 2007-02-23 2013-01-23 株式会社日立製作所 微小試料加工観察方法及び装置
JP5125174B2 (ja) * 2007-03-29 2013-01-23 株式会社日立製作所 微小試料加工観察方法及び装置
JP5125184B2 (ja) * 2007-04-03 2013-01-23 株式会社日立製作所 微小試料加工観察方法及び装置
JP4952597B2 (ja) * 2008-01-25 2012-06-13 株式会社デンソー 加工装置
JP4834704B2 (ja) * 2008-09-01 2011-12-14 株式会社日立製作所 試料作製方法
JP5126031B2 (ja) * 2008-12-01 2013-01-23 株式会社日立製作所 微小試料加工観察方法及び装置
CN103797351B (zh) * 2011-09-12 2019-11-05 Fei 公司 掠射角铣削
JP5316626B2 (ja) * 2011-11-14 2013-10-16 株式会社日立製作所 微小試料加工観察方法及び装置
WO2013082496A1 (en) 2011-12-01 2013-06-06 Fei Company High throughput tem preparation processes and hardware for backside thinning of cross-sectional view lamella
JP5846931B2 (ja) * 2012-01-25 2016-01-20 株式会社日立ハイテクノロジーズ 電子顕微鏡用試料ホルダ
KR102155834B1 (ko) * 2012-10-05 2020-09-14 에프이아이 컴파니 높은 종횡비 구조 분석
CN103792114B (zh) * 2012-11-02 2016-04-20 中芯国际集成电路制造(上海)有限公司 Tem样品的制备方法
JP6729235B2 (ja) * 2016-09-20 2020-07-22 住友金属鉱山株式会社 試料の断面分析方法、及び試料台
US9905394B1 (en) * 2017-02-16 2018-02-27 Carl Zeiss Microscopy Gmbh Method for analyzing an object and a charged particle beam device for carrying out this method
JP7512849B2 (ja) * 2019-11-22 2024-07-09 住友金属鉱山株式会社 透過電子顕微鏡観察用試料とその作製方法
CN113484115B (zh) * 2021-07-08 2025-06-27 浙江师范大学 试件预切缝装置
KR20240044181A (ko) * 2022-09-28 2024-04-04 삼성전자주식회사 투과 전자 현미경의 시편 홀더 및 이를 이용한 반도체 소자 검사 방법
JPWO2024157336A1 (enExample) * 2023-01-23 2024-08-02
WO2024157337A1 (ja) * 2023-01-23 2024-08-02 株式会社日立ハイテク 荷電粒子ビーム装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2708547B2 (ja) * 1989-05-10 1998-02-04 株式会社日立製作所 デバイス移植方法
JP2774884B2 (ja) * 1991-08-22 1998-07-09 株式会社日立製作所 試料の分離方法及びこの分離方法で得た分離試料の分析方法
JP2842083B2 (ja) * 1992-09-17 1998-12-24 株式会社日立製作所 試料ホルダー、これを用いた試料加工観察システム、試料観察方法、透過形電子顕微鏡及びイオンビーム装置
JPH06232238A (ja) * 1993-02-05 1994-08-19 Hitachi Ltd 試料処理装置および試料処理方法
JPH08304243A (ja) * 1995-05-11 1996-11-22 Nippon Steel Corp 断面薄膜試料及びその作製方法及び断面薄膜試料用ホルダ
JP2994257B2 (ja) * 1996-04-12 1999-12-27 エヌオーケーイージーアンドジーオプトエレクトロニクス株式会社 プリンタ装置
JPH10199446A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd 陰極線管表示装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8835845B2 (en) 2007-06-01 2014-09-16 Fei Company In-situ STEM sample preparation
WO2020074026A1 (en) 2018-10-10 2020-04-16 Tescan Brno, S.R.O. Device with at least one adjustable sample holder and method of changing holder tilt angle and method of preparing a lamella
US11476080B2 (en) 2018-10-10 2022-10-18 Tescan Brno, S.R.O. Device with at least one adjustable sample holder and method of changing holder tilt angle and method of preparing a lamella

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