JP3731460B2 - 電気光学装置およびプロジェクタ - Google Patents
電気光学装置およびプロジェクタ Download PDFInfo
- Publication number
- JP3731460B2 JP3731460B2 JP2000263561A JP2000263561A JP3731460B2 JP 3731460 B2 JP3731460 B2 JP 3731460B2 JP 2000263561 A JP2000263561 A JP 2000263561A JP 2000263561 A JP2000263561 A JP 2000263561A JP 3731460 B2 JP3731460 B2 JP 3731460B2
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- JP
- Japan
- Prior art keywords
- shielding film
- light shielding
- film
- light
- pixel electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010410 layer Substances 0.000 claims description 123
- 239000000758 substrate Substances 0.000 claims description 89
- 239000003990 capacitor Substances 0.000 claims description 73
- 239000011229 interlayer Substances 0.000 claims description 22
- 238000003860 storage Methods 0.000 claims description 18
- 230000031700 light absorption Effects 0.000 claims description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 239000010408 film Substances 0.000 description 324
- 239000004973 liquid crystal related substance Substances 0.000 description 21
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 239000010409 thin film Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 239000003870 refractory metal Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 229910021332 silicide Inorganic materials 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 229910021645 metal ion Inorganic materials 0.000 description 6
- 239000011651 chromium Substances 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000593 degrading effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000263561A JP3731460B2 (ja) | 2000-08-31 | 2000-08-31 | 電気光学装置およびプロジェクタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000263561A JP3731460B2 (ja) | 2000-08-31 | 2000-08-31 | 電気光学装置およびプロジェクタ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005247263A Division JP5135667B2 (ja) | 2005-08-29 | 2005-08-29 | 電気光学装置及びプロジェクタ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002072925A JP2002072925A (ja) | 2002-03-12 |
| JP2002072925A5 JP2002072925A5 (https=) | 2004-12-24 |
| JP3731460B2 true JP3731460B2 (ja) | 2006-01-05 |
Family
ID=18751091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000263561A Expired - Fee Related JP3731460B2 (ja) | 2000-08-31 | 2000-08-31 | 電気光学装置およびプロジェクタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3731460B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006018320A (ja) * | 2005-08-29 | 2006-01-19 | Seiko Epson Corp | 電気光学装置及びプロジェクタ |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4021392B2 (ja) | 2002-10-31 | 2007-12-12 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP4957023B2 (ja) * | 2006-03-09 | 2012-06-20 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP4869789B2 (ja) * | 2006-05-31 | 2012-02-08 | 株式会社 日立ディスプレイズ | 表示装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3307181B2 (ja) * | 1995-07-31 | 2002-07-24 | ソニー株式会社 | 透過型表示装置 |
| JP3808155B2 (ja) * | 1997-01-17 | 2006-08-09 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型液晶表示装置 |
| JPH1195687A (ja) * | 1997-09-20 | 1999-04-09 | Semiconductor Energy Lab Co Ltd | 表示装置 |
| JP3674274B2 (ja) * | 1997-11-27 | 2005-07-20 | セイコーエプソン株式会社 | 液晶パネル、液晶パネル用ｔｆｔアレイ基板及び電子機器 |
| JP3035263B2 (ja) * | 1998-04-17 | 2000-04-24 | シャープ株式会社 | 液晶表示装置 |
| JP2000047254A (ja) * | 1998-07-27 | 2000-02-18 | Sony Corp | 液晶表示装置 |
-
2000
- 2000-08-31 JP JP2000263561A patent/JP3731460B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006018320A (ja) * | 2005-08-29 | 2006-01-19 | Seiko Epson Corp | 電気光学装置及びプロジェクタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002072925A (ja) | 2002-03-12 |
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