JP3664171B2 - 半導体装置の製造方法及び半導体装置の製造装置 - Google Patents
半導体装置の製造方法及び半導体装置の製造装置 Download PDFInfo
- Publication number
- JP3664171B2 JP3664171B2 JP2003366082A JP2003366082A JP3664171B2 JP 3664171 B2 JP3664171 B2 JP 3664171B2 JP 2003366082 A JP2003366082 A JP 2003366082A JP 2003366082 A JP2003366082 A JP 2003366082A JP 3664171 B2 JP3664171 B2 JP 3664171B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- semiconductor
- adhesive tape
- region
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68331—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding of passive members, e.g. die mounting substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
Description
前記配線基板の第1の面と接着テープとを対向させて、ローラーによって前記接着テープと前記半導体モジュールとを貼着すること、及び、その後、
前記半導体モジュールを、前記配線基板の第2の面側から切断することを含み、
前記ローラーは、中央部と両端部とを有し、
前記中央部によって、前記接着テープを前記中央領域の上方から押圧し、
前記両端部によって、前記接着テープを前記端部領域の上方から押圧する。本発明によれば、ローラーは中央部と両端部とを有し、中央部によって接着テープを中央領域の上方から押圧し、両端部によって接着テープを端部領域の上方から押圧する。これにより、半導体モジュールの端部領域と接着テープとを貼着させることができる。そして、端部領域を接着テープに貼着した状態で半導体モジュールを切断することで、半導体モジュールの端部領域が飛散することを防止することができる。そのため、半導体装置の製造工程の信頼性を高めることができる。また、1つのローラーによって、半導体モジュールの中央領域と端部領域とを同時に貼着させることができるので、半導体装置の製造効率を高めることができる。
(2)この半導体装置の製造方法において、
前記両端部の直径は、前記中央部の直径よりも大きくてもよい。これによれば、半導体モジュールの端部領域と中央領域との厚みが大きく異なっていても、端部領域と接着テープとを貼着することができる。
(3)この半導体装置の製造方法において、
前記中央部の直径と前記両端部の直径とは同じ大きさであってもよい。
(4)この半導体装置の製造方法において、
少なくとも前記中央部は弾性体から構成されてもよい。これによれば、半導体モジュールの端部領域と中央領域との厚みが大きく異なっていても、端部領域と接着テープとを貼着することができる。
(5)この半導体装置の製造方法において、
前記両端部は前記中央部よりも硬くなっていてもよい。
(6)本発明に係る半導体装置の製造装置は、配線基板と、前記配線基板に搭載された複数の半導体チップとを有し、前記半導体チップとオーバーラップする中央領域と前記中央領域を囲む端部領域とを有する半導体モジュールに接着テープを貼着するためのローラーを含み、
前記ローラーは中央部と両端部とを含み、
前記中央部によって、前記接着テープを前記中央領域の上方から押圧し、
前記両端部によって、前記接着テープを前記端部領域の上方から押圧する。本発明によれば、半導体装置の製造装置は、中央部と両端部とを有するローラーを含む。そして、中央部によって接着テープを中央領域の上方から押圧し、両端部によって接着テープを端部領域の上方から押圧する。これにより、半導体モジュールの端部領域と接着テープとを貼着させることができる。そして、端部領域を接着テープに貼着した状態で半導体モジュールを切断することで、半導体モジュールの端部領域が飛散することを防止することができる。そのため、半導体装置の製造工程の信頼性を高めることができる。また、1つのローラーによって、半導体モジュールの中央領域と端部領域とを同時に貼着させることができるので、半導体装置の製造効率を高めることができる。
(7)この半導体装置の製造装置において、
前記両端部の直径は、前記中央部の直径よりも大きくてもよい。これによれば、半導体モジュールの端部領域と中央領域との厚みが大きく異なっていても、端部領域と接着テープとを貼着することができる。
(8)この半導体装置の製造装置において、
前記中央部の直径と前記両端部の直径とは同じ大きさであってもよい。
(9)この半導体装置の製造装置において、
少なくとも前記中央部は弾性体から構成されてもよい。
(10)この半導体装置の製造装置において、
前記両端部は前記中央部よりも硬くなっていてもよい。
Claims (10)
- 配線基板と、前記配線基板の第1の面に搭載された複数の半導体チップとを有し、前記半導体チップとオーバーラップする中央領域と前記中央領域を囲む端部領域とを有する半導体モジュールを用意すること、
前記配線基板の第1の面と接着テープとを対向させて、ローラーによって前記接着テープと前記半導体モジュールとを貼着すること、及び、その後、
前記半導体モジュールを、前記配線基板の第2の面側から切断することを含み、
前記ローラーは、中央部と両端部とを有し、
前記中央部によって、前記接着テープを前記中央領域の上方から押圧し、
前記両端部によって、前記接着テープを前記端部領域の上方から押圧する半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記両端部の直径は、前記中央部の直径よりも大きい半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記中央部の直径と前記両端部の直径とは同じ大きさである半導体装置の製造方法。 - 請求項1から請求項3のいずれかに記載の半導体装置の製造方法において、
少なくとも前記中央部は弾性体からなる半導体装置の製造方法。 - 請求項1から請求項4のいずれかに記載の半導体装置の製造方法において、
前記両端部は前記中央部よりも硬い半導体装置の製造方法。 - 配線基板と、前記配線基板に搭載された複数の半導体チップとを有し、前記半導体チップとオーバーラップする中央領域と前記中央領域を囲む端部領域とを有する半導体モジュールに接着テープを貼着するためのローラーを含み、
前記ローラーは中央部と両端部とを含み、
前記中央部によって、前記接着テープを前記中央領域の上方から押圧し、
前記両端部によって、前記接着テープを前記端部領域の上方から押圧する半導体装置の製造装置。 - 請求項6記載の半導体装置の製造装置において、
前記両端部の直径は、前記中央部の直径よりも大きい半導体装置の製造装置。 - 請求項6記載の半導体装置の製造装置において、
前記中央部の直径と前記両端部の直径とは同じ大きさである半導体装置の製造装置。 - 請求項6から請求項8のいずれかに記載の半導体装置の製造装置において、
少なくとも前記中央部は弾性体からなる半導体装置の製造装置。 - 請求項6から請求項9のいずれかに記載の半導体装置の製造装置において、
前記両端部は前記中央部よりも硬い半導体装置の製造装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003366082A JP3664171B2 (ja) | 2003-10-27 | 2003-10-27 | 半導体装置の製造方法及び半導体装置の製造装置 |
US10/973,993 US7045394B2 (en) | 2003-10-27 | 2004-10-26 | Method of manufacturing semiconductor device and system of manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003366082A JP3664171B2 (ja) | 2003-10-27 | 2003-10-27 | 半導体装置の製造方法及び半導体装置の製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005129848A JP2005129848A (ja) | 2005-05-19 |
JP3664171B2 true JP3664171B2 (ja) | 2005-06-22 |
Family
ID=34616043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003366082A Expired - Fee Related JP3664171B2 (ja) | 2003-10-27 | 2003-10-27 | 半導体装置の製造方法及び半導体装置の製造装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7045394B2 (ja) |
JP (1) | JP3664171B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7757938B2 (en) * | 2004-06-18 | 2010-07-20 | Digicor Llc | Image exchange without full MICR qualification |
US7359213B2 (en) * | 2004-07-09 | 2008-04-15 | The Agency For Science, Technology And Research | Circuit board |
US8124451B2 (en) * | 2007-09-21 | 2012-02-28 | Stats Chippac Ltd. | Integrated circuit packaging system with interposer |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4321672A (en) * | 1979-11-26 | 1982-03-23 | Braun Edward L | Financial data processing system |
FR2558622B1 (fr) | 1984-01-19 | 1988-06-17 | Caille Roger | Dispositif pour controler l'authenticite du tireur d'un cheque |
US5023782A (en) * | 1990-03-26 | 1991-06-11 | Mastercard International Inc. | Travelers cheque transaction terminal |
US5044668A (en) * | 1990-08-31 | 1991-09-03 | Wright Lyle E | Check checker system |
US5175682A (en) * | 1990-12-14 | 1992-12-29 | Verifone, Inc. | Check system and method including prioritizing checks for transmission to banks for processing |
US5457305A (en) * | 1994-03-31 | 1995-10-10 | Akel; William S. | Distributed on-line money access card transaction processing system |
JP3343771B2 (ja) * | 1995-03-13 | 2002-11-11 | 株式会社東芝 | 電子決済装置、および、電子決済判定方法 |
JP3496347B2 (ja) * | 1995-07-13 | 2004-02-09 | 株式会社デンソー | 半導体装置及びその製造方法 |
US5890141A (en) * | 1996-01-18 | 1999-03-30 | Merrill Lynch & Co., Inc. | Check alteration detection system and method |
US5781654A (en) * | 1996-01-18 | 1998-07-14 | Merrill Lynch & Co., Inc. | Check authentication system utilizing payee information |
US6164528A (en) * | 1996-12-31 | 2000-12-26 | Chequemark Patent, Inc. | Check writing point of sale system |
US5897625A (en) | 1997-05-30 | 1999-04-27 | Capital Security Systems, Inc. | Automated document cashing system |
US5896298A (en) * | 1997-08-08 | 1999-04-20 | Carreker-Antinori, Inc. | System and method for providing central notification of issued items |
US6038553A (en) * | 1997-09-19 | 2000-03-14 | Affiliated Computer Services, Inc. | Self service method of and system for cashing checks |
US6073121A (en) * | 1997-09-29 | 2000-06-06 | Ramzy; Emil Y. | Check fraud prevention system |
US6036344A (en) * | 1998-06-10 | 2000-03-14 | Goldenberg; David Milton | Secure check processing system and method |
JP3961672B2 (ja) | 1998-06-12 | 2007-08-22 | リンテック株式会社 | 樹脂封止チップ体の製造方法 |
US6464134B1 (en) * | 1999-12-10 | 2002-10-15 | Terri Page | System and method for verifying the authenticity of a check and authorizing payment thereof |
US7970706B2 (en) * | 2000-03-17 | 2011-06-28 | Jpmorgan Chase Bank, N.A. | System and method for check exception item notification |
JP3831287B2 (ja) * | 2002-04-08 | 2006-10-11 | 株式会社日立製作所 | 半導体装置の製造方法 |
-
2003
- 2003-10-27 JP JP2003366082A patent/JP3664171B2/ja not_active Expired - Fee Related
-
2004
- 2004-10-26 US US10/973,993 patent/US7045394B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050118791A1 (en) | 2005-06-02 |
US7045394B2 (en) | 2006-05-16 |
JP2005129848A (ja) | 2005-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4728782B2 (ja) | 半導体装置およびその製造方法 | |
US6303992B1 (en) | Interposer for mounting semiconductor dice on substrates | |
JP3925602B2 (ja) | 接着材料の貼着方法及び半導体装置の製造方法 | |
JP2006060128A (ja) | 半導体装置 | |
JP2005079581A (ja) | テープ基板、及びテープ基板を用いた半導体チップパッケージ、及び半導体チップパッケージを用いたlcd装置 | |
JP3664171B2 (ja) | 半導体装置の製造方法及び半導体装置の製造装置 | |
JP3065010B2 (ja) | 半導体装置 | |
JP2968051B2 (ja) | 半導体素子にばね接触子を実装するチップ相互接続キャリア及び方法 | |
JP2002026223A (ja) | 樹脂封止型半導体装置およびその製造方法 | |
JP2018085487A (ja) | 半導体装置の製造方法および半導体装置 | |
JP4491380B2 (ja) | 半導体装置の製造方法 | |
JP4905621B2 (ja) | 半導体装置及びその製造方法並びに電子機器 | |
JP4364181B2 (ja) | 半導体装置の製造方法 | |
JP7022784B2 (ja) | 半導体装置 | |
JP4110421B2 (ja) | 半導体装置の製造方法 | |
JP3565142B2 (ja) | 配線基板及びその製造方法、半導体装置、回路基板並びに電子機器 | |
JP2002289642A (ja) | 半導体装置及びその製造方法、ボンディングツール、回路基板並びに電子機器 | |
JP2017092212A (ja) | 半導体装置およびその製造方法 | |
JP2004207308A (ja) | 半導体装置及びその製造方法、回路基板並びに電子機器 | |
JP2006332415A (ja) | 半導体装置 | |
US20090189272A1 (en) | Wafer Level Chip Scale Packages Including Redistribution Substrates and Methods of Fabricating the Same | |
JP2004207311A (ja) | 半導体装置及びその製造方法 | |
JP2006093304A (ja) | 半導体装置の製造方法及び半導体モジュール | |
JP2005101171A (ja) | 半導体装置及びその製造方法、配線基板、回路基板並びに電子機器 | |
JP2004207301A (ja) | 半導体装置及びその製造方法、半導体装置の製造装置、回路基板並びに電子機器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20050214 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20050308 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20050321 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080408 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090408 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090408 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100408 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110408 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110408 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120408 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130408 Year of fee payment: 8 |
|
LAPS | Cancellation because of no payment of annual fees |