JP3133053B2 - 圧電曲げ変換器 - Google Patents
圧電曲げ変換器Info
- Publication number
- JP3133053B2 JP3133053B2 JP02165494A JP16549490A JP3133053B2 JP 3133053 B2 JP3133053 B2 JP 3133053B2 JP 02165494 A JP02165494 A JP 02165494A JP 16549490 A JP16549490 A JP 16549490A JP 3133053 B2 JP3133053 B2 JP 3133053B2
- Authority
- JP
- Japan
- Prior art keywords
- bending transducer
- metallized
- ceramic layer
- valve
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005452 bending Methods 0.000 title claims abstract description 39
- 239000000919 ceramic Substances 0.000 claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 11
- 239000002131 composite material Substances 0.000 claims description 5
- 238000001465 metallisation Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 2
- 239000004917 carbon fiber Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 44
- 239000000463 material Substances 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 239000011888 foil Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 101100194706 Mus musculus Arhgap32 gene Proteins 0.000 description 1
- 101100194707 Xenopus laevis arhgap32 gene Proteins 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000010671 solid-state reaction Methods 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/005—Piezo-electric benders
- F16K31/006—Piezo-electric benders having a free end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3920368.9 | 1989-06-22 | ||
| DE3920368 | 1989-06-22 | ||
| DE3935474.1 | 1989-10-25 | ||
| DE3935474A DE3935474A1 (de) | 1989-06-22 | 1989-10-25 | Piezoelektrischer biegewandler und seine verwendung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0365070A JPH0365070A (ja) | 1991-03-20 |
| JP3133053B2 true JP3133053B2 (ja) | 2001-02-05 |
Family
ID=25882197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02165494A Expired - Fee Related JP3133053B2 (ja) | 1989-06-22 | 1990-06-22 | 圧電曲げ変換器 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5079472A (de) |
| EP (1) | EP0404082B1 (de) |
| JP (1) | JP3133053B2 (de) |
| AT (1) | ATE133481T1 (de) |
| DE (2) | DE3935474A1 (de) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9122739D0 (en) * | 1991-10-25 | 1991-12-11 | The Technology Partnership Ltd | System for controlling fluid flow |
| JPH05217121A (ja) * | 1991-11-22 | 1993-08-27 | Internatl Business Mach Corp <Ibm> | 磁気変換器付きチップ等の感熱素子を結合する方法及び装置 |
| JP3151644B2 (ja) * | 1993-03-08 | 2001-04-03 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| JP3521499B2 (ja) * | 1993-11-26 | 2004-04-19 | 日本碍子株式会社 | 圧電／電歪膜型素子 |
| DE4410153C1 (de) * | 1994-03-24 | 1995-02-09 | Joucomatic Gmbh | Piezoelektrisch betätigtes Fluidventil |
| DE4411569C1 (de) * | 1994-04-02 | 1995-07-20 | Itw Dynatec Gmbh Klebetechnik | Auftragskopf zur dosierten Abgabe von strömenden Medien |
| US5628411A (en) * | 1994-12-01 | 1997-05-13 | Sortex Limited | Valve devices for use in sorting apparatus ejectors |
| AU4928196A (en) * | 1995-02-21 | 1996-09-11 | Applied Power Inc. | Magnetically assisted piezo-electric valve actuator |
| US5630440A (en) * | 1995-02-21 | 1997-05-20 | Applied Power Inc. | Piezo composite sheet actuated valve |
| DE19528809A1 (de) * | 1995-08-05 | 1997-02-06 | Rea Elektronik Gmbh | Tintenstrahl-Schreibkopf |
| US5780958A (en) * | 1995-11-03 | 1998-07-14 | Aura Systems, Inc. | Piezoelectric vibrating device |
| GB9610819D0 (en) * | 1996-05-22 | 1996-07-31 | Lucas Ind Plc | Valve arrangement |
| SE9602232L (sv) * | 1996-06-05 | 1997-12-06 | Tore Fors | Kraftalstrare |
| DE19627038C2 (de) * | 1996-07-05 | 1998-06-04 | Honeywell Bv | Piezoelektrischer Betätiger |
| DE19649225A1 (de) * | 1996-11-27 | 1998-05-28 | Nass Magnet Gmbh | Ventil |
| US6086041A (en) * | 1997-04-07 | 2000-07-11 | Mccord Winn Textron Inc. | Multi-valve module having a ceramic piezoelectric actuator |
| DE29722085U1 (de) * | 1997-12-13 | 1998-02-26 | Festo Ag & Co | Ventil |
| DE19931990C1 (de) | 1999-07-09 | 2001-01-11 | Festo Ag & Co | Elektroventil |
| DE19961736B4 (de) * | 1999-12-09 | 2006-08-31 | Caterpillar Inc., Peoria | Piezoelektrisch betätigbares Ventil |
| EP1106882A3 (de) | 1999-12-09 | 2002-11-13 | Drei-S-Werk Präzisionswerkzeuge GmbH & Co. Fertigungs-KG | Piezoelektrisch betätigbares Ventil |
| US6357335B1 (en) | 1999-12-23 | 2002-03-19 | Sox Corporation | Pneumatic volume booster for valve positioner |
| US6685164B1 (en) * | 2000-09-11 | 2004-02-03 | Hamai Industries Limited | Control valve and diaphragm for use in the control valve |
| JP2004532743A (ja) * | 2000-10-25 | 2004-10-28 | ワシントン ステート ユニバーシティ リサーチ ファウンデーション | 圧電マイクロトランスデューサ、その使用法および製造法 |
| DE10161888A1 (de) * | 2001-08-14 | 2003-02-27 | Continental Teves Ag & Co Ohg | Piezoelektrisch betätigtes Fluidventil |
| DE10233601A1 (de) | 2002-07-24 | 2004-02-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Ventil mit kompaktem Betätigungsmechanismus |
| US20040144696A1 (en) | 2003-01-29 | 2004-07-29 | Stewart Mills | Valve device for use in sorting apparatus ejectors |
| KR100519970B1 (ko) * | 2003-10-07 | 2005-10-13 | 삼성전자주식회사 | 밸브리스 마이크로 공기공급장치 |
| DE102004033649A1 (de) * | 2004-07-12 | 2006-02-09 | Siemens Ag | Vorrichtung und Verfahren zum Einstellen einer Orientierung eines Detektorelements einer elektromagnetischen Strahlung und Kamera mit der Vorrichtung |
| US7078850B2 (en) * | 2004-07-20 | 2006-07-18 | Usc Corporation | Piezoelectric power generation device and piezoelectric ceramics member used therefor |
| US7594502B1 (en) | 2005-12-07 | 2009-09-29 | Anderson Joel A | Projectile loading, firing and warning system |
| DE102007034049B3 (de) * | 2007-07-19 | 2008-06-12 | Hoerbiger Automatisierungstechnik Holding Gmbh | Piezoelektrisches Ventil |
| DE102007033529A1 (de) | 2007-07-19 | 2009-01-22 | Hoerbiger Automatisierungstechnik Holding Gmbh | Piezoelektrisches Ventil |
| DE102007034048B3 (de) | 2007-07-20 | 2008-06-12 | Hoerbiger Automatisierungstechnik Holding Gmbh | Piezoelektrisches Ventil |
| JP2010251726A (ja) * | 2009-03-27 | 2010-11-04 | Ngk Insulators Ltd | 圧電アクチュエータの製造方法 |
| CN103765773B (zh) * | 2012-08-17 | 2015-11-25 | 日本碍子株式会社 | 复合基板、弹性表面波器件以及复合基板的制造方法 |
| DE102013105557B4 (de) * | 2013-05-29 | 2015-06-11 | Michael Förg | Piezoelektrischer Aktor |
| EP3203081B1 (de) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Miniaturfluidsteuerungsvorrichtung |
| US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10378529B2 (en) | 2016-01-29 | 2019-08-13 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10487821B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| EP3203079B1 (de) | 2016-01-29 | 2021-05-19 | Microjet Technology Co., Ltd | Piezoelektrischer aktuator |
| US10388849B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
| US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| JP6574452B2 (ja) * | 2016-01-29 | 2019-09-11 | 研能科技股▲ふん▼有限公司 | 小型空気圧動力装置 |
| EP3203078B1 (de) | 2016-01-29 | 2021-05-26 | Microjet Technology Co., Ltd | Pneumatische miniaturvorrichtung |
| EP3203077B1 (de) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Piezoelektrischer aktuator |
| US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
| US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
| WO2018185821A1 (ja) * | 2017-04-03 | 2018-10-11 | オリンパス株式会社 | 圧電ユニット及び処置具 |
| TWI686536B (zh) * | 2018-02-09 | 2020-03-01 | 研能科技股份有限公司 | 微型流體控制裝置 |
| KR20210020905A (ko) | 2018-05-11 | 2021-02-24 | 매튜 인터내셔널 코포레이션 | 제팅 조립체에 사용되는 마이크로-밸브를 밀봉하는 시스템 및 방법 |
| CN112352123B (zh) | 2018-05-11 | 2023-05-12 | 马修斯国际公司 | 用于在喷射组件中使用的微型阀的电极结构 |
| US11794476B2 (en) | 2018-05-11 | 2023-10-24 | Matthews International Corporation | Micro-valves for use in jetting assemblies |
| US11639057B2 (en) | 2018-05-11 | 2023-05-02 | Matthews International Corporation | Methods of fabricating micro-valves and jetting assemblies including such micro-valves |
| US10994535B2 (en) | 2018-05-11 | 2021-05-04 | Matthews International Corporation | Systems and methods for controlling operation of micro-valves for use in jetting assemblies |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3152612A (en) * | 1956-09-28 | 1964-10-13 | Gen Electric | Piezoelectric crystal transducer for controlling fluid flow |
| US3152012A (en) * | 1960-12-19 | 1964-10-06 | Ibm | Apparatus for the development of electrostatic images |
| JPS5492307A (en) * | 1977-12-29 | 1979-07-21 | Sony Corp | Driving circuit of electrostrictive converter |
| US4340083A (en) * | 1978-11-30 | 1982-07-20 | Carleton Controls Corporation | Deflectable beam valve |
| JPS6048112B2 (ja) * | 1979-05-02 | 1985-10-25 | ソニー株式会社 | 電気・機械変換素子 |
| DE3025596A1 (de) * | 1980-07-05 | 1982-02-25 | Feldmühle AG, 4000 Düsseldorf | Ventilscheibe aus oxidkeramischem werkstoff |
| US4492360A (en) * | 1982-06-07 | 1985-01-08 | The Lee Company | Piezoelectric valve |
| US4545561A (en) * | 1982-07-30 | 1985-10-08 | Mcdonnell Douglas Corporation | Piezoelectric valve operator |
| AT380934B (de) * | 1983-01-13 | 1986-07-25 | Enfo Grundlagen Forschungs Ag | Elektrisch-pneumatischer signalwandler |
| JPS59186380A (ja) * | 1983-04-06 | 1984-10-23 | Japan Storage Battery Co Ltd | バイモルフ型圧電体変位装置の制御方法 |
| JPS6062170A (ja) * | 1983-09-14 | 1985-04-10 | Teac Co | バイモルフ圧電駆動装置 |
| DE3425290A1 (de) * | 1984-07-10 | 1986-01-16 | Atlas Fahrzeugtechnik GmbH, 5980 Werdohl | Piezokeramische ventilplatte und verfahren zu deren herstellung |
| JPS6123373A (ja) * | 1984-07-11 | 1986-01-31 | Matsushita Electric Ind Co Ltd | 圧電変位素子 |
| AU5992286A (en) * | 1985-06-11 | 1987-01-07 | Arthur D. Little, Inc. | Apparatus for electrical control of rate of fluid flow |
| US4629926A (en) * | 1985-10-21 | 1986-12-16 | Kiwi Coders Corporation | Mounting for piezoelectric bender of fluid control device |
| DE3608550A1 (de) * | 1986-03-14 | 1987-09-17 | Festo Kg | Piezo-elektrisch betaetigbares ventil |
| DE3738630C2 (de) * | 1987-11-13 | 1995-06-08 | Rexroth Mannesmann Gmbh | Elektrohydraulische Druckwandlervorrichtung |
-
1989
- 1989-10-25 DE DE3935474A patent/DE3935474A1/de not_active Withdrawn
-
1990
- 1990-06-20 AT AT90111599T patent/ATE133481T1/de not_active IP Right Cessation
- 1990-06-20 EP EP90111599A patent/EP0404082B1/de not_active Expired - Lifetime
- 1990-06-20 DE DE59010081T patent/DE59010081D1/de not_active Expired - Fee Related
- 1990-06-22 US US07/541,901 patent/US5079472A/en not_active Expired - Lifetime
- 1990-06-22 JP JP02165494A patent/JP3133053B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US5079472A (en) | 1992-01-07 |
| ATE133481T1 (de) | 1996-02-15 |
| DE59010081D1 (de) | 1996-03-07 |
| EP0404082A2 (de) | 1990-12-27 |
| DE3935474A1 (de) | 1991-01-03 |
| EP0404082B1 (de) | 1996-01-24 |
| EP0404082A3 (de) | 1991-07-03 |
| JPH0365070A (ja) | 1991-03-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |