JP2982461B2 - クリーンルーム用保管庫 - Google Patents

クリーンルーム用保管庫

Info

Publication number
JP2982461B2
JP2982461B2 JP4008663A JP866392A JP2982461B2 JP 2982461 B2 JP2982461 B2 JP 2982461B2 JP 4008663 A JP4008663 A JP 4008663A JP 866392 A JP866392 A JP 866392A JP 2982461 B2 JP2982461 B2 JP 2982461B2
Authority
JP
Japan
Prior art keywords
storage
container
lid
wafer
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4008663A
Other languages
English (en)
Japanese (ja)
Other versions
JPH06156622A (ja
Inventor
等 河野
敦 奥野
正徳 津田
満弘 林
哲平 山下
正直 村田
幹 田中
日也 森田
昭生 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP4008663A priority Critical patent/JP2982461B2/ja
Priority to TW082100103A priority patent/TW227546B/zh
Priority to KR1019930000636A priority patent/KR100236272B1/ko
Priority to US08/006,318 priority patent/US5363867A/en
Priority to EP93100881A priority patent/EP0552756A1/en
Publication of JPH06156622A publication Critical patent/JPH06156622A/ja
Application granted granted Critical
Publication of JP2982461B2 publication Critical patent/JP2982461B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
JP4008663A 1992-01-21 1992-01-21 クリーンルーム用保管庫 Expired - Lifetime JP2982461B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP4008663A JP2982461B2 (ja) 1992-01-21 1992-01-21 クリーンルーム用保管庫
TW082100103A TW227546B (enFirst) 1992-01-21 1993-01-09
KR1019930000636A KR100236272B1 (ko) 1992-01-21 1993-01-20 클린룸용 보관고
US08/006,318 US5363867A (en) 1992-01-21 1993-01-21 Article storage house in a clean room
EP93100881A EP0552756A1 (en) 1992-01-21 1993-01-21 Article storage house in a clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4008663A JP2982461B2 (ja) 1992-01-21 1992-01-21 クリーンルーム用保管庫

Publications (2)

Publication Number Publication Date
JPH06156622A JPH06156622A (ja) 1994-06-03
JP2982461B2 true JP2982461B2 (ja) 1999-11-22

Family

ID=11699175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4008663A Expired - Lifetime JP2982461B2 (ja) 1992-01-21 1992-01-21 クリーンルーム用保管庫

Country Status (3)

Country Link
JP (1) JP2982461B2 (enFirst)
KR (1) KR100236272B1 (enFirst)
TW (1) TW227546B (enFirst)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3519212B2 (ja) * 1995-06-13 2004-04-12 高砂熱学工業株式会社 清浄な資材用保管庫
KR101474572B1 (ko) * 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템
JP5236518B2 (ja) * 2009-02-03 2013-07-17 株式会社ダン・タクマ 保管システムおよび保管方法
JP5440871B2 (ja) 2010-08-20 2014-03-12 株式会社ダイフク 容器保管設備
JP5716968B2 (ja) * 2012-01-04 2015-05-13 株式会社ダイフク 物品保管設備
JP6106501B2 (ja) * 2013-04-12 2017-04-05 東京エレクトロン株式会社 収納容器内の雰囲気管理方法
CN111365957B (zh) * 2020-04-16 2023-05-09 重庆电力高等专科学校 镀铬管清洗烘干生产线
CN115649719B (zh) * 2022-12-13 2023-03-10 中科摩通(常州)智能制造股份有限公司 一种智能仓储巷道机器人及其智能仓储系统
EP4443236A1 (en) * 2023-04-05 2024-10-09 Brooks Automation (Germany) GmbH Stocker compartment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990014273A1 (en) 1989-05-19 1990-11-29 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036205A (ja) * 1983-08-08 1985-02-25 Hitachi Ltd 収納装置
JPS63262310A (ja) * 1986-12-27 1988-10-28 Shinkawa Ltd キユア用ワーク収納箱

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990014273A1 (en) 1989-05-19 1990-11-29 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism

Also Published As

Publication number Publication date
JPH06156622A (ja) 1994-06-03
TW227546B (enFirst) 1994-08-01
KR100236272B1 (ko) 1999-12-15
KR930016325A (ko) 1993-08-26

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