JP2792981B2 - 高温発熱体およびその製造方法 - Google Patents
高温発熱体およびその製造方法Info
- Publication number
- JP2792981B2 JP2792981B2 JP2008560A JP856090A JP2792981B2 JP 2792981 B2 JP2792981 B2 JP 2792981B2 JP 2008560 A JP2008560 A JP 2008560A JP 856090 A JP856090 A JP 856090A JP 2792981 B2 JP2792981 B2 JP 2792981B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- aluminum nitride
- heating element
- area
- foreign ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims description 74
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 67
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 42
- 239000004020 conductor Substances 0.000 claims description 28
- 150000002500 ions Chemical class 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 14
- 238000005245 sintering Methods 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000002019 doping agent Substances 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- -1 silicon ions Chemical class 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 230000008595 infiltration Effects 0.000 claims description 2
- 238000001764 infiltration Methods 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 description 15
- 239000010410 layer Substances 0.000 description 11
- 239000000843 powder Substances 0.000 description 9
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 6
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 229910016006 MoSi Inorganic materials 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 235000019445 benzyl alcohol Nutrition 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910015320 MoMn Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 239000011214 refractory ceramic Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60H—ARRANGEMENTS OF HEATING, COOLING, VENTILATING OR OTHER AIR-TREATING DEVICES SPECIALLY ADAPTED FOR PASSENGER OR GOODS SPACES OF VEHICLES
- B60H1/00—Heating, cooling or ventilating [HVAC] devices
- B60H1/22—Heating, cooling or ventilating [HVAC] devices the heat being derived otherwise than from the propulsion plant
- B60H1/2215—Heating, cooling or ventilating [HVAC] devices the heat being derived otherwise than from the propulsion plant the heat being derived from electric heaters
- B60H1/2227—Electric heaters incorporated in vehicle trim components, e.g. panels or linings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23Q—IGNITION; EXTINGUISHING-DEVICES
- F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
- F23Q7/001—Glowing plugs for internal-combustion engines
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/428—Silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/95—Products characterised by their size, e.g. microceramics
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23Q—IGNITION; EXTINGUISHING-DEVICES
- F23Q7/00—Incandescent ignition; Igniters using electrically-produced heat, e.g. lighters for cigarettes; Electrically-heated glowing plugs
- F23Q7/001—Glowing plugs for internal-combustion engines
- F23Q2007/004—Manufacturing or assembling methods
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Resistance Heating (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3901545.9 | 1989-01-20 | ||
| DE3901545A DE3901545A1 (de) | 1989-01-20 | 1989-01-20 | Hochtemperatur-heizelement sowie verfahren zu seiner herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03196484A JPH03196484A (ja) | 1991-08-27 |
| JP2792981B2 true JP2792981B2 (ja) | 1998-09-03 |
Family
ID=6372427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008560A Expired - Fee Related JP2792981B2 (ja) | 1989-01-20 | 1990-01-19 | 高温発熱体およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2792981B2 (enrdf_load_stackoverflow) |
| DE (1) | DE3901545A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2642116A1 (enrdf_load_stackoverflow) |
| IT (1) | IT1237957B (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102729300A (zh) * | 2011-04-06 | 2012-10-17 | 勃兰特边角技术有限公司 | 粘合剂输送设备 |
| CN108530021A (zh) * | 2018-04-16 | 2018-09-14 | 广东金意陶陶瓷集团有限公司 | 一种高导热的电热瓷砖及制作方法 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5264681A (en) * | 1991-02-14 | 1993-11-23 | Ngk Spark Plug Co., Ltd. | Ceramic heater |
| DE4325606A1 (de) * | 1993-07-30 | 1995-02-09 | Bach Wolfdietrich | Keramisches Heizelement sowie Verfahren zur Herstellung eines solchen Heizelements |
| DE4338539A1 (de) * | 1993-11-11 | 1995-05-18 | Hoechst Ceram Tec Ag | Verfahren zum Herstellen von keramischen Heizelementen |
| DE4444685A1 (de) * | 1994-12-15 | 1996-06-20 | Behr Thomson Dehnstoffregler | Thermostatisches Arbeitselement mit einem elektrischen Widerstandsheizelement |
| DE19731395A1 (de) * | 1997-07-22 | 1999-01-28 | Ceramtec Ag | Aufheizbecher für Feststoffe und Flüssigkeiten |
| DE19842148C2 (de) * | 1998-09-15 | 2002-02-07 | Beru Ag | Ionenstrom-Meßglühkerze für Brennkraftmaschinen und Anordnung zum Glühen und/oder Ionenstrommessen mit einer derartigen Glühkerze |
| DE10052948A1 (de) * | 2000-10-25 | 2002-05-08 | Dittrich Elektronic Gmbh & Co | Heizelement |
| KR20120119074A (ko) * | 2011-04-20 | 2012-10-30 | (주)피엔유에코에너지 | 온도 자가조절형 면상발열체를 적용한 스팀발생기용 히터 및 그 제조방법 |
| CN102635479B (zh) * | 2012-04-23 | 2014-06-04 | 常州联德电子有限公司 | 车用氮化硅陶瓷预热塞的制备方法 |
| AT16524U1 (de) * | 2018-06-04 | 2019-12-15 | Epcos Ag | Heizelement |
| DE102020203166B4 (de) | 2020-03-12 | 2024-07-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Sensoraufbau zur Bestimmung hoher Temperaturen |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4035613A (en) * | 1976-01-08 | 1977-07-12 | Kyoto Ceramic Co., Ltd. | Cylindrical ceramic heating device |
| JPS5952324B2 (ja) * | 1978-02-15 | 1984-12-19 | 日本特殊陶業株式会社 | グロ−プラグ用セラミツクヒ−タ− |
| JPS55126989A (en) * | 1979-03-24 | 1980-10-01 | Kyoto Ceramic | Ceramic heater |
| DE3307109A1 (de) * | 1982-08-14 | 1984-03-15 | Robert Bosch Gmbh, 7000 Stuttgart | Einrichtung zum einspritzen von kraftstoff in brennraeume von insbesondere selbstzuendenen brennkraftmaschinen |
| JPS5960126A (ja) * | 1982-09-29 | 1984-04-06 | Toshiba Corp | グロ−プラグ |
| DE3335144A1 (de) * | 1982-09-30 | 1984-04-05 | Isuzu Motors Ltd., Tokyo | Einlassbrenner |
| US4499366A (en) * | 1982-11-25 | 1985-02-12 | Nippondenso Co., Ltd. | Ceramic heater device |
| JPS6029518A (ja) * | 1983-07-27 | 1985-02-14 | Hitachi Ltd | グロ−プラグ用ヒ−タ |
| JPS60216484A (ja) * | 1984-04-09 | 1985-10-29 | 株式会社日本自動車部品総合研究所 | セラミツクヒ−タ |
| DE3608326A1 (de) * | 1986-03-13 | 1987-09-17 | Kempten Elektroschmelz Gmbh | Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln |
| JPS61235613A (ja) * | 1986-03-20 | 1986-10-20 | Kyocera Corp | グロープラグ |
-
1989
- 1989-01-20 DE DE3901545A patent/DE3901545A1/de active Granted
-
1990
- 1990-01-16 IT IT01907590A patent/IT1237957B/it active IP Right Grant
- 1990-01-19 JP JP2008560A patent/JP2792981B2/ja not_active Expired - Fee Related
- 1990-01-22 FR FR9000684A patent/FR2642116A1/fr active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102729300A (zh) * | 2011-04-06 | 2012-10-17 | 勃兰特边角技术有限公司 | 粘合剂输送设备 |
| CN108530021A (zh) * | 2018-04-16 | 2018-09-14 | 广东金意陶陶瓷集团有限公司 | 一种高导热的电热瓷砖及制作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2642116A1 (fr) | 1990-07-27 |
| FR2642116B1 (enrdf_load_stackoverflow) | 1995-02-10 |
| IT9019075A1 (it) | 1991-07-16 |
| JPH03196484A (ja) | 1991-08-27 |
| DE3901545A1 (de) | 1990-08-02 |
| IT9019075A0 (it) | 1990-01-16 |
| DE3901545C2 (enrdf_load_stackoverflow) | 1991-04-18 |
| IT1237957B (it) | 1993-06-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
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| R250 | Receipt of annual fees |
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| R250 | Receipt of annual fees |
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| LAPS | Cancellation because of no payment of annual fees |