JP2542928Y2 - マスタスライス半導体装置 - Google Patents
マスタスライス半導体装置Info
- Publication number
- JP2542928Y2 JP2542928Y2 JP1989125867U JP12586789U JP2542928Y2 JP 2542928 Y2 JP2542928 Y2 JP 2542928Y2 JP 1989125867 U JP1989125867 U JP 1989125867U JP 12586789 U JP12586789 U JP 12586789U JP 2542928 Y2 JP2542928 Y2 JP 2542928Y2
- Authority
- JP
- Japan
- Prior art keywords
- master slice
- semiconductor device
- insulating film
- cells
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125867U JP2542928Y2 (ja) | 1989-10-27 | 1989-10-27 | マスタスライス半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125867U JP2542928Y2 (ja) | 1989-10-27 | 1989-10-27 | マスタスライス半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0365259U JPH0365259U (OSRAM) | 1991-06-25 |
| JP2542928Y2 true JP2542928Y2 (ja) | 1997-07-30 |
Family
ID=31673718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989125867U Expired - Lifetime JP2542928Y2 (ja) | 1989-10-27 | 1989-10-27 | マスタスライス半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2542928Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009078112A1 (ja) * | 2007-12-19 | 2009-06-25 | Panasonic Corporation | 演算増幅器，パイプライン型ａｄ変換器 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58112323A (ja) * | 1981-12-26 | 1983-07-04 | Fujitsu Ltd | 電子ビ−ムアニ−ル方法 |
| JPS6428938A (en) * | 1987-07-24 | 1989-01-31 | Nec Corp | Semiconductor integrated circuit |
| JPH01264237A (ja) * | 1988-04-15 | 1989-10-20 | Hitachi Ltd | 半導体装置 |
-
1989
- 1989-10-27 JP JP1989125867U patent/JP2542928Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009078112A1 (ja) * | 2007-12-19 | 2009-06-25 | Panasonic Corporation | 演算増幅器，パイプライン型ａｄ変換器 |
| JPWO2009078112A1 (ja) * | 2007-12-19 | 2011-04-28 | パナソニック株式会社 | 演算増幅器，パイプライン型ａｄ変換器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0365259U (OSRAM) | 1991-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |