JP2535564Y2 - 縦型反応炉 - Google Patents

縦型反応炉

Info

Publication number
JP2535564Y2
JP2535564Y2 JP10969190U JP10969190U JP2535564Y2 JP 2535564 Y2 JP2535564 Y2 JP 2535564Y2 JP 10969190 U JP10969190 U JP 10969190U JP 10969190 U JP10969190 U JP 10969190U JP 2535564 Y2 JP2535564 Y2 JP 2535564Y2
Authority
JP
Japan
Prior art keywords
quartz tube
receiving member
furnace body
peripheral portion
upper bottom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10969190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467328U (enExample
Inventor
陽一 水品
芳郎 小島
勝 糠塚
Original Assignee
株式会社デンコーシステムズ
株式会社エムビー・ケイマイクロテック
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社デンコーシステムズ, 株式会社エムビー・ケイマイクロテック, 神鋼電機株式会社 filed Critical 株式会社デンコーシステムズ
Priority to JP10969190U priority Critical patent/JP2535564Y2/ja
Publication of JPH0467328U publication Critical patent/JPH0467328U/ja
Application granted granted Critical
Publication of JP2535564Y2 publication Critical patent/JP2535564Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP10969190U 1990-10-22 1990-10-22 縦型反応炉 Expired - Lifetime JP2535564Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10969190U JP2535564Y2 (ja) 1990-10-22 1990-10-22 縦型反応炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10969190U JP2535564Y2 (ja) 1990-10-22 1990-10-22 縦型反応炉

Publications (2)

Publication Number Publication Date
JPH0467328U JPH0467328U (enExample) 1992-06-15
JP2535564Y2 true JP2535564Y2 (ja) 1997-05-14

Family

ID=31856931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10969190U Expired - Lifetime JP2535564Y2 (ja) 1990-10-22 1990-10-22 縦型反応炉

Country Status (1)

Country Link
JP (1) JP2535564Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5304068B2 (ja) * 2008-07-15 2013-10-02 信越半導体株式会社 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0467328U (enExample) 1992-06-15

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