JP2532487Y2 - 静電リレー - Google Patents
静電リレーInfo
- Publication number
- JP2532487Y2 JP2532487Y2 JP10030490U JP10030490U JP2532487Y2 JP 2532487 Y2 JP2532487 Y2 JP 2532487Y2 JP 10030490 U JP10030490 U JP 10030490U JP 10030490 U JP10030490 U JP 10030490U JP 2532487 Y2 JP2532487 Y2 JP 2532487Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- fixed electrode
- movable electrode
- frame
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 9
- 230000003068 static effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000005530 etching Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Push-Button Switches (AREA)
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10030490U JP2532487Y2 (ja) | 1990-09-25 | 1990-09-25 | 静電リレー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10030490U JP2532487Y2 (ja) | 1990-09-25 | 1990-09-25 | 静電リレー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0458934U JPH0458934U (enrdf_load_html_response) | 1992-05-20 |
| JP2532487Y2 true JP2532487Y2 (ja) | 1997-04-16 |
Family
ID=31842852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10030490U Expired - Lifetime JP2532487Y2 (ja) | 1990-09-25 | 1990-09-25 | 静電リレー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2532487Y2 (enrdf_load_html_response) |
-
1990
- 1990-09-25 JP JP10030490U patent/JP2532487Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0458934U (enrdf_load_html_response) | 1992-05-20 |
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