JP2532487Y2 - Electrostatic relay - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an electrostatic relay.

[Conventional technology]

Conventionally, as shown in FIGS. 5 and 6, this type of electrostatic relay is composed of a movable electrode block 1, a fixed electrode block 2, a spacer frame 10, and the like.

The movable electrode block 1 includes a frame portion 1a made of a silicon film having a substantially rectangular shape, a movable electrode plate 3 made of a very thin flat plate cantilevered in the frame portion 1a, and a base portion made of a movable electrode plate 3
And the contact portions 3a and 3a integrated with each other. On the back surface of the frame portion 1a, an electrical connection portion (not shown) is integrally formed with a portion connected to an external lead portion 6e described later.

The movable electrode plate 3 has a non-illustrated movable electrode portion made of a dielectric on the back surface and a silicon film to be an insulating thin film layer provided on the surface thereof. Also, this movable electrode plate 3
The base spring 3d has a base end 3d narrower than the middle, and the base end 3d extends in a direction orthogonal to the direction in which the movable electrode plate 3 extends, and is integrally attached to the inner surface of the frame 1a. 5 is supported so as to be freely reversible.

The contact portions 3a, 3a are provided in parallel along both sides of the movable electrode plate 3, with one side of the movable electrode plate 3 cut out in a substantially U shape. On one surface (back surface) of the contact portions 3a, 3a, there is formed a movable contact layer 4 which is electrically integrally connected and has a substantially U-shape as a whole.

The spacer frame 10 is made of an insulator having a thickness of about several tens of μm and having substantially the same outer shape as the frame portion 1a. , Sandwiched between the two.

The fixed electrode block 2 has a fixed electrode portion 6 and a pair of fixed contact layers 7, 7 formed on a base material 2a made of substantially flat glass. The fixed electrode portion 6 is made of a conductive metal layer, and a silicon oxide film serving as an insulating layer (not shown) is provided on the surface thereof, and a lead portion extending from the middle to one side of the base material 2a.
6b is provided integrally. In addition, the frame portion 1a is provided on the side of the fixed electrode block 2 opposite to the side on which the lead portion 6b is provided.
Drawer section that is electrically stably connected to the electrical connection section
6e is formed.

When assembling the movable electrode block 1 on the fixed electrode block 2, after the spacer frame 10 is sandwiched between the two blocks 1 and 2, the lead portion 6b of the fixed electrode portion 6 is electrically insulated from the frame portion 1a. And the movable electrode plate 3 is provided so as to face the fixed electrode portion 6.

 Next, the operation will be briefly described.

When a high voltage is applied between the lead portion 6e electrically connected to the frame portion 1a of the movable electrode block 1 and the lead portion 6b of the fixed electrode 6, an electrostatic attractive force is generated between the movable electrode plate 3 and the fixed electrode block 2. In operation, the movable electrode plate 3 is attracted to the fixed electrode block 2 and the movable contact layer 4 conducts the conduction between the pair of fixed contacts 7, 7 when the high voltage is stopped. This is an electrostatic relay that performs a so-called monostable operation in which the electrode plate 3 returns to its original state due to its own flexibility.

[Problems to be solved by the invention]

The electrostatic relay described in the conventional example has the advantage of being able to perform a stable opening / closing operation without worrying about a malfunction due to coil disconnection since it is coilless.

However, in order to obtain an operation gap between the movable electrode plate 3 and the fixed electrode plate 2a and to maintain insulation between the blocks 1 and 2 to which a high voltage is applied, a spacer frame 10 is provided between the blocks 1 and 2. There is a need. This spacer frame
Since the thickness of the block 10 is usually very thin, several tens of μm, due to the relationship between electrostatic attraction acting between the blocks 1 and 2, the assembling work provided between the blocks 1 and 2 is provided. However, there is a problem that the operating gap of the movable electrode plate 3 greatly varies due to assembly variations, the characteristics become unstable, and the number of parts increases.

The present invention has been made to improve the present invention by focusing on the above problems, and an object of the present invention is to provide an electrostatic relay which has a small number of parts, is easy to assemble, and has a stable operation.

[Means for solving the problem]

In the electrostatic relay according to the present invention, a step portion for providing a gap between the movable electrode plate and the fixed electrode plate is provided in the frame portion.

In the electrostatic relay of claim (2), a lead portion for extracting an electrode is provided integrally with the fixed electrode portion on the fixed electrode block, and a cutout portion is provided in a frame portion intersecting the lead portion.

[Action]

In the electrostatic relay according to the present invention, a step is provided in the frame between the movable electrode plate and the fixed electrode plate to obtain a gap having a dimension necessary for the movable electrode plate to operate. Therefore, stable operation can be obtained without providing a special member.

According to the electrostatic relay of claim (2), a lead portion for extracting an electrode is provided integrally with the fixed electrode portion on the fixed electrode block, and a cutout portion is provided in a frame portion intersecting the lead portion. Insulation between the fixed electrode section to which a voltage is applied and the movable electrode block can be ensured.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS.

For the same configuration as the content described in the conventional example,
A brief description will be given.

As shown in FIG. 1, the electrostatic relay of the present invention includes a movable electrode block 1 and a fixed electrode block 2.

The movable electrode block 1 includes a frame portion 1a and a movable electrode plate 3 cantilevered in the frame portion 1a. Frame
1a is made of a dielectric thin plate such as a silicon wafer having a substantially rectangular shape, and is formed so that the inside of the frame provided with the movable electrode plate 3 is recessed by a method such as etching as shown in FIG.
The movable electrode plate 3 formed thinner than the frame portion 1a is provided integrally. A step 1c is formed on a portion of the frame 1a facing the fixed electrode block 2 by etching or the like so that a step (gap 1) is provided between the movable electrode plate 3 and a fixed electrode plate 2a to be described later. Are integrally formed.

The movable electrode plate 3 is a thin plate made of the same silicon wafer as the frame portion 1a. As shown in FIG. 3 (b), the surface thereof is integrally provided with a silicon oxide film serving as an insulating thin film layer 3c. The base 3d of the movable electrode plate 3 is formed to be thinner than the width of the intermediate portion, so that the flexibility when attracting and reversing the fixed electrode plate 2a can be increased, and the base 3d is formed.
Is attached to the inner surface of the frame portion 1a by a support spring portion 5 extending in a direction intersecting the direction in which the movable electrode plate 3 extends. In addition, the movable electrode plate 3 is provided in parallel with contact plates 3a, 3a which are notched in a substantially U shape at one end.

As shown in FIG. 3 (a), the contact plate 3a is provided with an insulating thin film layer 3c such as a silicon oxide film on the surface of a silicon wafer similarly to the movable electrode plate 3, and as shown in FIG. A movable contact layer 4 having a substantially U-shape is formed on the movable contact layer 4.

The fixed electrode block 2 includes a fixed electrode plate 2a made of a non-dielectric material such as a substantially flat glass, and the fixed electrode plate 2a
Above the fixed electrode portion 6 and an external lead-out terminal portion 6b integrated with the fixed electrode portion 6, the movable electrode block 1
A lead terminal portion 6e electrically connected to an electrode portion outside the figure formed on the back surface of the frame portion 1a is provided. The fixed electrode plate 2a is provided integrally with a pair of fixed contact layers 7, 7 which are opened and closed by the movable contact layer 3, as shown in FIG. 4 (a).

As shown in FIG. 4 (b), the fixed electrode portion 6 is made of a conductive metal layer 6a such as gold or silver integrally formed on a fixed electrode plate 2a, and has a silicon oxide film on its surface. And the like, and an insulating thin film layer 6c is integrally provided.

When assembling the electrostatic relay of the present embodiment, it is placed on the fixed electrode block 2 while grasping the frame portion 1a of the relatively thick movable electrode block 1 and disposing them so that their outer circumferences are the same. The two blocks 1, 2 by welding, bonding, etc.
Since the members are joined and assembled, and the number of constituent members is two compared to the conventional three members, each assembling operation including the joining operation can be easily performed.

A cutout portion 1b is provided in a portion of the frame portion 1a that intersects with the external lead terminal portion 6b of the fixed electrode portion 6 in order to maintain insulation when a high voltage is applied.

Now, the external lead-out terminal 6 of the fixed electrode block 2
When a high DC voltage (for example, DC100V) is applied to b and 6e,
Positive and negative charges are respectively charged between the insulating thin film layer 3c of the movable electrode plate 3 and the insulating thin film layer 6c on the fixed electrode portion 6, and the static electricity is charged between the two by the gap 1 provided by the step portion 1c of the frame portion 1a. Electric attraction works. Due to this electrostatic attraction, the movable electrode plate 3
Is attracted to the fixed electrode plate 2a, and the contact plate 3
a, 3a are also displaced so that the movable contact layer 4 provided on the contact plate 3a conducts between the pair of fixed contact layers 7, 7, and the gap 1 in which the movable electrode plate 3 operates is etched. Since the step 1c obtained with good dimensional accuracy by processing is managed with high precision, the occurrence of variation in the gap 1 is extremely low. When the application of the DC high voltage is stopped, the movable electrode plate 3 returns due to its own flexibility, and the movable contact layer 4 is separated from the fixed contact layers 7,7.

[Effect of the invention]

In the electrostatic relay according to the present invention, a step is provided in the frame between the movable electrode plate and the fixed electrode plate to obtain a gap having a dimension necessary for the movable electrode plate to operate. Therefore, there is no need to provide special members as in the related art, the number of parts is small, assembly and manufacture are easy, and stable operation can be obtained.

According to the electrostatic relay of claim (2), a lead portion for extracting an electrode is provided integrally with the fixed electrode portion on the fixed electrode block, and a cutout portion is provided in a frame portion intersecting the lead portion. High insulation between the fixed electrode portion to which a voltage is applied and the movable electrode block can be ensured, and high insulation resistance can be achieved.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an embodiment of the present invention, FIG. 2 is a side sectional view of the same, FIG. 3 (a) is a sectional view of the same contact plate, and FIG. 3 (b). FIG. 4A is a cross-sectional view of the same fixed contact portion, and FIG. 4B is a cross-sectional view of the same fixed electrode portion, and FIG. FIG. 6 is an exploded perspective view showing a conventional example, and FIG. 6 is a side sectional view of the same. 1 movable electrode block, 1a frame, 1b notch, 1c step, 2 fixed electrode block, 2a fixed electrode plate, 2b insulating thin film layer, 3 Movable electrode plate, 6 ...
Fixed electrode part, 6b, 6e ... External lead-out part.

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Keiji Kakitate 1048 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Works Co., Ltd. (72) Inventor Hitoshi Kanagawa 1048 Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Works, Ltd. (56) References JP-A-2-100224 (JP, A) JP-A-4-133225 (JP, A) JP Hei 3-141533 (JP, A)

Claims (2)

(57) [Scope of request for utility model registration] 1. A movable electrode comprising a substantially rectangular frame made of a dielectric and a movable electrode plate made of a dielectric having one end supported in the frame and one end provided with an insulating thin film layer on one surface. An electrostatic member comprising a fixed electrode block having a fixed electrode portion having an insulating thin film layer on a surface facing one surface of the movable electrode plate, wherein the static member is generated by a high voltage applied between the two electrode blocks. In the electrostatic relay in which the movable electrode plate is driven by the electrostatic attraction and the contact is opened and closed, a step forming a gap between the movable electrode plate and the fixed electrode plate is provided in the frame portion. Characteristic electrostatic relay. 2. The electrostatic relay according to claim 1, wherein a lead-out portion for leading out the electrode is provided integrally with the fixed electrode portion on the fixed electrode block, and a cut-out portion is formed in a frame portion intersecting with the lead-out portion. .