JP2520950Y2 - 二光束干渉用対物レンズ - Google Patents

二光束干渉用対物レンズ

Info

Publication number
JP2520950Y2
JP2520950Y2 JP1988032326U JP3232688U JP2520950Y2 JP 2520950 Y2 JP2520950 Y2 JP 2520950Y2 JP 1988032326 U JP1988032326 U JP 1988032326U JP 3232688 U JP3232688 U JP 3232688U JP 2520950 Y2 JP2520950 Y2 JP 2520950Y2
Authority
JP
Japan
Prior art keywords
objective lens
reference mirror
optical path
shaft
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988032326U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01136913U (enrdf_load_stackoverflow
Inventor
均 坂野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP1988032326U priority Critical patent/JP2520950Y2/ja
Publication of JPH01136913U publication Critical patent/JPH01136913U/ja
Application granted granted Critical
Publication of JP2520950Y2 publication Critical patent/JP2520950Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
JP1988032326U 1988-03-11 1988-03-11 二光束干渉用対物レンズ Expired - Lifetime JP2520950Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988032326U JP2520950Y2 (ja) 1988-03-11 1988-03-11 二光束干渉用対物レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988032326U JP2520950Y2 (ja) 1988-03-11 1988-03-11 二光束干渉用対物レンズ

Publications (2)

Publication Number Publication Date
JPH01136913U JPH01136913U (enrdf_load_stackoverflow) 1989-09-19
JP2520950Y2 true JP2520950Y2 (ja) 1996-12-18

Family

ID=31258750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988032326U Expired - Lifetime JP2520950Y2 (ja) 1988-03-11 1988-03-11 二光束干渉用対物レンズ

Country Status (1)

Country Link
JP (1) JP2520950Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011197534A (ja) * 2010-03-23 2011-10-06 Nikon Corp 干渉対物レンズ及びこれを有する顕微鏡装置
DE19962631B4 (de) * 1998-12-25 2012-06-14 Mitutoyo Corporation Zweistrahlinterferenzobjektivvorrichtung
DE102016200014B4 (de) 2015-01-05 2023-02-02 Mitutoyo Corporation Interferenz-Objektivlinse und Lichtinterferenzmessvorrichtung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4201693B2 (ja) * 2003-11-27 2008-12-24 株式会社ミツトヨ 光干渉ユニット、光干渉対物レンズ装置および測定装置
JP7041467B2 (ja) * 2017-03-16 2022-03-24 株式会社ミツトヨ 光学装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS533807U (enrdf_load_stackoverflow) * 1976-06-29 1978-01-13
JPS61149803A (ja) * 1984-12-24 1986-07-08 Matsushita Electric Ind Co Ltd 干渉測定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19962631B4 (de) * 1998-12-25 2012-06-14 Mitutoyo Corporation Zweistrahlinterferenzobjektivvorrichtung
JP2011197534A (ja) * 2010-03-23 2011-10-06 Nikon Corp 干渉対物レンズ及びこれを有する顕微鏡装置
DE102016200014B4 (de) 2015-01-05 2023-02-02 Mitutoyo Corporation Interferenz-Objektivlinse und Lichtinterferenzmessvorrichtung

Also Published As

Publication number Publication date
JPH01136913U (enrdf_load_stackoverflow) 1989-09-19

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