JP2511692Y2 - 基板の加熱装置 - Google Patents

基板の加熱装置

Info

Publication number
JP2511692Y2
JP2511692Y2 JP12022690U JP12022690U JP2511692Y2 JP 2511692 Y2 JP2511692 Y2 JP 2511692Y2 JP 12022690 U JP12022690 U JP 12022690U JP 12022690 U JP12022690 U JP 12022690U JP 2511692 Y2 JP2511692 Y2 JP 2511692Y2
Authority
JP
Japan
Prior art keywords
substrate
heating plate
heating
stopper
heating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP12022690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478497U (enrdf_load_stackoverflow
Inventor
亮 三浦
Original Assignee
株式会社芝浦製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社芝浦製作所 filed Critical 株式会社芝浦製作所
Priority to JP12022690U priority Critical patent/JP2511692Y2/ja
Publication of JPH0478497U publication Critical patent/JPH0478497U/ja
Application granted granted Critical
Publication of JP2511692Y2 publication Critical patent/JP2511692Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Tunnel Furnaces (AREA)
JP12022690U 1990-11-19 1990-11-19 基板の加熱装置 Expired - Fee Related JP2511692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12022690U JP2511692Y2 (ja) 1990-11-19 1990-11-19 基板の加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12022690U JP2511692Y2 (ja) 1990-11-19 1990-11-19 基板の加熱装置

Publications (2)

Publication Number Publication Date
JPH0478497U JPH0478497U (enrdf_load_stackoverflow) 1992-07-08
JP2511692Y2 true JP2511692Y2 (ja) 1996-09-25

Family

ID=31868141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12022690U Expired - Fee Related JP2511692Y2 (ja) 1990-11-19 1990-11-19 基板の加熱装置

Country Status (1)

Country Link
JP (1) JP2511692Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0478497U (enrdf_load_stackoverflow) 1992-07-08

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