JP2511692Y2 - 基板の加熱装置 - Google Patents
基板の加熱装置Info
- Publication number
- JP2511692Y2 JP2511692Y2 JP12022690U JP12022690U JP2511692Y2 JP 2511692 Y2 JP2511692 Y2 JP 2511692Y2 JP 12022690 U JP12022690 U JP 12022690U JP 12022690 U JP12022690 U JP 12022690U JP 2511692 Y2 JP2511692 Y2 JP 2511692Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating plate
- heating
- stopper
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims description 64
- 239000000758 substrate Substances 0.000 title claims description 56
- 230000000694 effects Effects 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12022690U JP2511692Y2 (ja) | 1990-11-19 | 1990-11-19 | 基板の加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12022690U JP2511692Y2 (ja) | 1990-11-19 | 1990-11-19 | 基板の加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0478497U JPH0478497U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-07-08 |
JP2511692Y2 true JP2511692Y2 (ja) | 1996-09-25 |
Family
ID=31868141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12022690U Expired - Fee Related JP2511692Y2 (ja) | 1990-11-19 | 1990-11-19 | 基板の加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2511692Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1990
- 1990-11-19 JP JP12022690U patent/JP2511692Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0478497U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-07-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |