JP2025506759A5 - - Google Patents
Info
- Publication number
- JP2025506759A5 JP2025506759A5 JP2024549547A JP2024549547A JP2025506759A5 JP 2025506759 A5 JP2025506759 A5 JP 2025506759A5 JP 2024549547 A JP2024549547 A JP 2024549547A JP 2024549547 A JP2024549547 A JP 2024549547A JP 2025506759 A5 JP2025506759 A5 JP 2025506759A5
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- wave filter
- dielectric
- piezoelectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/652,257 US20230268907A1 (en) | 2022-02-23 | 2022-02-23 | Suspending an Electrode Structure Using a Dielectric |
| US17/652,257 | 2022-02-23 | ||
| PCT/EP2023/051021 WO2023160905A1 (en) | 2022-02-23 | 2023-01-17 | Suspending an electrode structure using a dielectric |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2025506759A JP2025506759A (ja) | 2025-03-13 |
| JP2025506759A5 true JP2025506759A5 (https=) | 2026-02-04 |
Family
ID=85036238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024549547A Pending JP2025506759A (ja) | 2022-02-23 | 2023-01-17 | 誘電体を使用する電極構造の懸架 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230268907A1 (https=) |
| EP (1) | EP4483490A1 (https=) |
| JP (1) | JP2025506759A (https=) |
| KR (1) | KR20240148342A (https=) |
| CN (1) | CN118633241A (https=) |
| WO (1) | WO2023160905A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12301211B2 (en) | 2022-09-09 | 2025-05-13 | Rf360 Singapore Pte. Ltd. | Microacoustic filter with a cavity stack |
| GB202401249D0 (en) * | 2024-01-31 | 2024-03-13 | Univ Oxford Innovation Ltd | Devices and method of fabrication thereof |
| WO2026030950A1 (en) * | 2024-08-07 | 2026-02-12 | Huawei Technologies Co., Ltd. | Acoustic resonator device |
| US20260074671A1 (en) * | 2024-09-10 | 2026-03-12 | Rf360 Singapore Pte. Ltd. | Plate mode micro-acoustic filters with suspended electrode fingers and related fabrication methods |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH036912A (ja) * | 1989-06-02 | 1991-01-14 | Fujitsu Ltd | 弾性表面波素子 |
| US5453652A (en) * | 1992-12-17 | 1995-09-26 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same |
| WO2005112258A1 (en) * | 2004-05-17 | 2005-11-24 | Gvr Trade Sa | Saw device with suspended electrodes |
| JP4943787B2 (ja) * | 2006-09-13 | 2012-05-30 | 太陽誘電株式会社 | 弾性波デバイス、共振器およびフィルタ |
| WO2011142850A2 (en) * | 2010-01-22 | 2011-11-17 | The Regents Of The University Of California | Etchant-free methods of producing a gap between two layers, and devices produced thereby |
| US20130235001A1 (en) * | 2012-03-06 | 2013-09-12 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with airgap |
| WO2014020876A1 (ja) * | 2012-07-30 | 2014-02-06 | パナソニック株式会社 | 弾性波素子とこれを用いたアンテナ共用器 |
| US9698754B2 (en) * | 2014-05-29 | 2017-07-04 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Capacitive coupled resonator and filter device with comb electrodes and support frame separation from piezoelectric layer |
| JP6913619B2 (ja) * | 2017-12-12 | 2021-08-04 | 株式会社村田製作所 | マルチプレクサ、高周波フロントエンド回路及び通信装置 |
-
2022
- 2022-02-23 US US17/652,257 patent/US20230268907A1/en active Pending
-
2023
- 2023-01-17 JP JP2024549547A patent/JP2025506759A/ja active Pending
- 2023-01-17 WO PCT/EP2023/051021 patent/WO2023160905A1/en not_active Ceased
- 2023-01-17 KR KR1020247026641A patent/KR20240148342A/ko active Pending
- 2023-01-17 CN CN202380019369.4A patent/CN118633241A/zh active Pending
- 2023-01-17 EP EP23701287.7A patent/EP4483490A1/en active Pending
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