CN118633241A - 使用电介质悬置电极结构 - Google Patents

使用电介质悬置电极结构 Download PDF

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Publication number
CN118633241A
CN118633241A CN202380019369.4A CN202380019369A CN118633241A CN 118633241 A CN118633241 A CN 118633241A CN 202380019369 A CN202380019369 A CN 202380019369A CN 118633241 A CN118633241 A CN 118633241A
Authority
CN
China
Prior art keywords
dielectric
piezoelectric layer
acoustic wave
layer
electrode structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380019369.4A
Other languages
English (en)
Chinese (zh)
Inventor
B·布拉施克
M·霍纳尔
M·纳普
W·鲁伊莱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RF360 Singapore Pte Ltd
Original Assignee
RF360 Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RF360 Singapore Pte Ltd filed Critical RF360 Singapore Pte Ltd
Publication of CN118633241A publication Critical patent/CN118633241A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202380019369.4A 2022-02-23 2023-01-17 使用电介质悬置电极结构 Pending CN118633241A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/652,257 US20230268907A1 (en) 2022-02-23 2022-02-23 Suspending an Electrode Structure Using a Dielectric
US17/652,257 2022-02-23
PCT/EP2023/051021 WO2023160905A1 (en) 2022-02-23 2023-01-17 Suspending an electrode structure using a dielectric

Publications (1)

Publication Number Publication Date
CN118633241A true CN118633241A (zh) 2024-09-10

Family

ID=85036238

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380019369.4A Pending CN118633241A (zh) 2022-02-23 2023-01-17 使用电介质悬置电极结构

Country Status (6)

Country Link
US (1) US20230268907A1 (https=)
EP (1) EP4483490A1 (https=)
JP (1) JP2025506759A (https=)
KR (1) KR20240148342A (https=)
CN (1) CN118633241A (https=)
WO (1) WO2023160905A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12301211B2 (en) 2022-09-09 2025-05-13 Rf360 Singapore Pte. Ltd. Microacoustic filter with a cavity stack
GB202401249D0 (en) * 2024-01-31 2024-03-13 Univ Oxford Innovation Ltd Devices and method of fabrication thereof
WO2026030950A1 (en) * 2024-08-07 2026-02-12 Huawei Technologies Co., Ltd. Acoustic resonator device
US20260074671A1 (en) * 2024-09-10 2026-03-12 Rf360 Singapore Pte. Ltd. Plate mode micro-acoustic filters with suspended electrode fingers and related fabrication methods

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH036912A (ja) * 1989-06-02 1991-01-14 Fujitsu Ltd 弾性表面波素子
US5453652A (en) * 1992-12-17 1995-09-26 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
WO2005112258A1 (en) * 2004-05-17 2005-11-24 Gvr Trade Sa Saw device with suspended electrodes
JP4943787B2 (ja) * 2006-09-13 2012-05-30 太陽誘電株式会社 弾性波デバイス、共振器およびフィルタ
WO2011142850A2 (en) * 2010-01-22 2011-11-17 The Regents Of The University Of California Etchant-free methods of producing a gap between two layers, and devices produced thereby
US20130235001A1 (en) * 2012-03-06 2013-09-12 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with airgap
WO2014020876A1 (ja) * 2012-07-30 2014-02-06 パナソニック株式会社 弾性波素子とこれを用いたアンテナ共用器
US9698754B2 (en) * 2014-05-29 2017-07-04 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitive coupled resonator and filter device with comb electrodes and support frame separation from piezoelectric layer
JP6913619B2 (ja) * 2017-12-12 2021-08-04 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路及び通信装置

Also Published As

Publication number Publication date
US20230268907A1 (en) 2023-08-24
JP2025506759A (ja) 2025-03-13
KR20240148342A (ko) 2024-10-11
WO2023160905A1 (en) 2023-08-31
EP4483490A1 (en) 2025-01-01

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