JP2025506759A - 誘電体を使用する電極構造の懸架 - Google Patents

誘電体を使用する電極構造の懸架 Download PDF

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Publication number
JP2025506759A
JP2025506759A JP2024549547A JP2024549547A JP2025506759A JP 2025506759 A JP2025506759 A JP 2025506759A JP 2024549547 A JP2024549547 A JP 2024549547A JP 2024549547 A JP2024549547 A JP 2024549547A JP 2025506759 A JP2025506759 A JP 2025506759A
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JP
Japan
Prior art keywords
dielectric
piezoelectric layer
layer
acoustic wave
electrode structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024549547A
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English (en)
Japanese (ja)
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JP2025506759A5 (https=
Inventor
ベノ・ブラシュケ
マティアス・ホナル
マティアス・クナップ
ヴェルナー・ルイル
Original Assignee
アールエフ３６０・シンガポール・ピーティーイー・リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by アールエフ３６０・シンガポール・ピーティーイー・リミテッド filed Critical アールエフ３６０・シンガポール・ピーティーイー・リミテッド
Publication of JP2025506759A publication Critical patent/JP2025506759A/ja
Publication of JP2025506759A5 publication Critical patent/JP2025506759A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2024549547A 2022-02-23 2023-01-17 誘電体を使用する電極構造の懸架 Pending JP2025506759A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/652,257 US20230268907A1 (en) 2022-02-23 2022-02-23 Suspending an Electrode Structure Using a Dielectric
US17/652,257 2022-02-23
PCT/EP2023/051021 WO2023160905A1 (en) 2022-02-23 2023-01-17 Suspending an electrode structure using a dielectric

Publications (2)

Publication Number Publication Date
JP2025506759A true JP2025506759A (ja) 2025-03-13
JP2025506759A5 JP2025506759A5 (https=) 2026-02-04

Family

ID=85036238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024549547A Pending JP2025506759A (ja) 2022-02-23 2023-01-17 誘電体を使用する電極構造の懸架

Country Status (6)

Country Link
US (1) US20230268907A1 (https=)
EP (1) EP4483490A1 (https=)
JP (1) JP2025506759A (https=)
KR (1) KR20240148342A (https=)
CN (1) CN118633241A (https=)
WO (1) WO2023160905A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12301211B2 (en) 2022-09-09 2025-05-13 Rf360 Singapore Pte. Ltd. Microacoustic filter with a cavity stack
GB202401249D0 (en) * 2024-01-31 2024-03-13 Univ Oxford Innovation Ltd Devices and method of fabrication thereof
WO2026030950A1 (en) * 2024-08-07 2026-02-12 Huawei Technologies Co., Ltd. Acoustic resonator device
US20260074671A1 (en) * 2024-09-10 2026-03-12 Rf360 Singapore Pte. Ltd. Plate mode micro-acoustic filters with suspended electrode fingers and related fabrication methods

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH036912A (ja) * 1989-06-02 1991-01-14 Fujitsu Ltd 弾性表面波素子
US5453652A (en) * 1992-12-17 1995-09-26 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
WO2005112258A1 (en) * 2004-05-17 2005-11-24 Gvr Trade Sa Saw device with suspended electrodes
JP4943787B2 (ja) * 2006-09-13 2012-05-30 太陽誘電株式会社 弾性波デバイス、共振器およびフィルタ
WO2011142850A2 (en) * 2010-01-22 2011-11-17 The Regents Of The University Of California Etchant-free methods of producing a gap between two layers, and devices produced thereby
US20130235001A1 (en) * 2012-03-06 2013-09-12 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with airgap
WO2014020876A1 (ja) * 2012-07-30 2014-02-06 パナソニック株式会社 弾性波素子とこれを用いたアンテナ共用器
US9698754B2 (en) * 2014-05-29 2017-07-04 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitive coupled resonator and filter device with comb electrodes and support frame separation from piezoelectric layer
JP6913619B2 (ja) * 2017-12-12 2021-08-04 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路及び通信装置

Also Published As

Publication number Publication date
CN118633241A (zh) 2024-09-10
US20230268907A1 (en) 2023-08-24
KR20240148342A (ko) 2024-10-11
WO2023160905A1 (en) 2023-08-31
EP4483490A1 (en) 2025-01-01

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