JP2024501567A5 - - Google Patents
Info
- Publication number
- JP2024501567A5 JP2024501567A5 JP2023540218A JP2023540218A JP2024501567A5 JP 2024501567 A5 JP2024501567 A5 JP 2024501567A5 JP 2023540218 A JP2023540218 A JP 2023540218A JP 2023540218 A JP2023540218 A JP 2023540218A JP 2024501567 A5 JP2024501567 A5 JP 2024501567A5
- Authority
- JP
- Japan
- Prior art keywords
- crystal silicon
- weir
- cullet
- silicon ingot
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063132712P | 2020-12-31 | 2020-12-31 | |
| US202063132713P | 2020-12-31 | 2020-12-31 | |
| US63/132,712 | 2020-12-31 | ||
| US63/132,713 | 2020-12-31 | ||
| PCT/EP2021/087786 WO2022144387A1 (en) | 2020-12-31 | 2021-12-29 | Use of buffer members during growth of single crystal silicon ingots |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024501567A JP2024501567A (ja) | 2024-01-12 |
| JP2024501567A5 true JP2024501567A5 (enExample) | 2025-01-08 |
Family
ID=80001458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023540218A Pending JP2024501567A (ja) | 2020-12-31 | 2021-12-29 | 単結晶シリコンインゴットの成長中における緩衝部材の使用 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US11767610B2 (enExample) |
| EP (1) | EP4271862B1 (enExample) |
| JP (1) | JP2024501567A (enExample) |
| KR (1) | KR102939619B1 (enExample) |
| CN (1) | CN118854432B (enExample) |
| TW (1) | TWI883302B (enExample) |
| WO (1) | WO2022144387A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4219802A1 (en) * | 2020-02-20 | 2023-08-02 | GlobalWafers Co., Ltd. | Method for forming a unitized crucible assembly and crucible assembly |
| US12146236B2 (en) | 2021-06-07 | 2024-11-19 | Globalwafers Co., Ltd | Use of quartz plates during growth of single crystal silicon ingots |
| US12410538B2 (en) | 2021-11-08 | 2025-09-09 | Globalwafers Co., Ltd. | Use of arrays of quartz particles during single crystal silicon ingot production |
| US20240352616A1 (en) * | 2023-04-18 | 2024-10-24 | Globalwafers Co., Ltd. | Systems and methods for microvoid analysis in crystals grown by continuous czochralski pullers |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5669298A (en) * | 1979-11-13 | 1981-06-10 | Nec Corp | Method of growing single crystal of semiconductor |
| US6663708B1 (en) * | 2000-09-22 | 2003-12-16 | Mitsubishi Materials Silicon Corporation | Silicon wafer, and manufacturing method and heat treatment method of the same |
| JP3624827B2 (ja) * | 2000-12-20 | 2005-03-02 | 三菱住友シリコン株式会社 | シリコン単結晶の製造方法 |
| DE10250822B4 (de) * | 2002-10-31 | 2006-09-28 | Siltronic Ag | Verfahren zur Herstellung eines mit leichtflüchtigem Fremdstoff dotierten Einkristalls aus Silicium |
| US7635414B2 (en) | 2003-11-03 | 2009-12-22 | Solaicx, Inc. | System for continuous growing of monocrystalline silicon |
| JP2006273631A (ja) * | 2005-03-28 | 2006-10-12 | Komatsu Electronic Metals Co Ltd | シリコン単結晶の製造方法およびアニールウェーハおよびアニールウェーハの製造方法 |
| JP2011054821A (ja) * | 2009-09-03 | 2011-03-17 | Sumco Corp | エピタキシャルウェーハの製造方法及びエピタキシャルウェーハ |
| WO2016152057A1 (ja) * | 2015-03-25 | 2016-09-29 | 株式会社トクヤマ | 投入装置、塊状シリコン原料の供給方法、シリコン単結晶製造装置およびシリコン単結晶の製造方法 |
| US20180291524A1 (en) * | 2015-05-01 | 2018-10-11 | Corner Star Limited | Methods for producing single crystal ingots doped with volatile dopants |
| WO2016179022A1 (en) * | 2015-05-01 | 2016-11-10 | Sunedison, Inc. | Methods for producing single crystal ingots doped with volatile dopants |
| US10221500B2 (en) * | 2017-01-04 | 2019-03-05 | Corner Star Limited | System for forming an ingot including crucible and conditioning members |
| US10407797B2 (en) | 2017-05-04 | 2019-09-10 | Corner Start Limited | Crystal pulling system and method including crucible and barrier |
-
2021
- 2021-12-16 US US17/553,031 patent/US11767610B2/en active Active
- 2021-12-29 WO PCT/EP2021/087786 patent/WO2022144387A1/en not_active Ceased
- 2021-12-29 EP EP21847965.7A patent/EP4271862B1/en active Active
- 2021-12-29 JP JP2023540218A patent/JP2024501567A/ja active Pending
- 2021-12-29 CN CN202410933960.7A patent/CN118854432B/zh active Active
- 2021-12-29 KR KR1020237025636A patent/KR102939619B1/ko active Active
- 2021-12-30 TW TW110149634A patent/TWI883302B/zh active
-
2023
- 2023-01-13 US US18/154,418 patent/US12091769B2/en active Active
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