JP2024039361A5 - - Google Patents
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- Publication number
- JP2024039361A5 JP2024039361A5 JP2022143864A JP2022143864A JP2024039361A5 JP 2024039361 A5 JP2024039361 A5 JP 2024039361A5 JP 2022143864 A JP2022143864 A JP 2022143864A JP 2022143864 A JP2022143864 A JP 2022143864A JP 2024039361 A5 JP2024039361 A5 JP 2024039361A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- region
- oxide
- layer
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022143864A JP2024039361A (ja) | 2022-09-09 | 2022-09-09 | 半導体装置 |
| TW112131134A TWI857754B (zh) | 2022-09-09 | 2023-08-18 | 半導體裝置 |
| US18/456,832 US20240097043A1 (en) | 2022-09-09 | 2023-08-28 | Semiconductor device |
| KR1020230112808A KR102895613B1 (ko) | 2022-09-09 | 2023-08-28 | 반도체 장치 |
| CN202311098309.4A CN117690975A (zh) | 2022-09-09 | 2023-08-29 | 半导体器件 |
| DE102023208538.0A DE102023208538B4 (de) | 2022-09-09 | 2023-09-05 | Halbleitervorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022143864A JP2024039361A (ja) | 2022-09-09 | 2022-09-09 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024039361A JP2024039361A (ja) | 2024-03-22 |
| JP2024039361A5 true JP2024039361A5 (https=) | 2025-06-05 |
Family
ID=90054481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022143864A Pending JP2024039361A (ja) | 2022-09-09 | 2022-09-09 | 半導体装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240097043A1 (https=) |
| JP (1) | JP2024039361A (https=) |
| KR (1) | KR102895613B1 (https=) |
| CN (1) | CN117690975A (https=) |
| DE (1) | DE102023208538B4 (https=) |
| TW (1) | TWI857754B (https=) |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP6035195B2 (ja) * | 2012-05-01 | 2016-11-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| EP2880690B1 (en) | 2012-08-03 | 2019-02-27 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device with oxide semiconductor stacked film |
| TWI761605B (zh) | 2012-09-14 | 2022-04-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102220279B1 (ko) | 2012-10-19 | 2021-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법 |
| US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US9985139B2 (en) * | 2014-11-12 | 2018-05-29 | Qualcomm Incorporated | Hydrogenated p-channel metal oxide semiconductor thin film transistors |
| CN109121438B (zh) | 2016-02-12 | 2022-02-18 | 株式会社半导体能源研究所 | 半导体装置以及包括该半导体装置的显示装置 |
| JP2017162852A (ja) * | 2016-03-07 | 2017-09-14 | 株式会社ジャパンディスプレイ | 半導体装置および表示装置 |
| JP2017224676A (ja) * | 2016-06-14 | 2017-12-21 | 株式会社ジャパンディスプレイ | 半導体装置及び表示装置 |
| JP7194122B2 (ja) | 2018-01-05 | 2022-12-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| CN111788664B (zh) | 2018-03-01 | 2024-04-16 | 株式会社半导体能源研究所 | 半导体装置的制造方法 |
| KR102797576B1 (ko) * | 2018-03-23 | 2025-04-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| JP7344869B2 (ja) * | 2018-06-29 | 2023-09-14 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US11121263B2 (en) * | 2019-08-27 | 2021-09-14 | Apple Inc. | Hydrogen trap layer for display device and the same |
-
2022
- 2022-09-09 JP JP2022143864A patent/JP2024039361A/ja active Pending
-
2023
- 2023-08-18 TW TW112131134A patent/TWI857754B/zh active
- 2023-08-28 US US18/456,832 patent/US20240097043A1/en active Pending
- 2023-08-28 KR KR1020230112808A patent/KR102895613B1/ko active Active
- 2023-08-29 CN CN202311098309.4A patent/CN117690975A/zh active Pending
- 2023-09-05 DE DE102023208538.0A patent/DE102023208538B4/de active Active
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