JP2024051551A5 - - Google Patents
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- Publication number
- JP2024051551A5 JP2024051551A5 JP2022157776A JP2022157776A JP2024051551A5 JP 2024051551 A5 JP2024051551 A5 JP 2024051551A5 JP 2022157776 A JP2022157776 A JP 2022157776A JP 2022157776 A JP2022157776 A JP 2022157776A JP 2024051551 A5 JP2024051551 A5 JP 2024051551A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- region
- oxide
- layer
- oxide semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022157776A JP2024051551A (ja) | 2022-09-30 | 2022-09-30 | 半導体装置 |
| TW112133070A TWI851391B (zh) | 2022-09-30 | 2023-08-31 | 半導體裝置 |
| KR1020230123124A KR102843075B1 (ko) | 2022-09-30 | 2023-09-15 | 반도체 장치 |
| CN202311207996.9A CN117810268A (zh) | 2022-09-30 | 2023-09-19 | 半导体装置 |
| DE102023209319.7A DE102023209319A1 (de) | 2022-09-30 | 2023-09-25 | Halbleitervorrichtung |
| US18/476,910 US20240113227A1 (en) | 2022-09-30 | 2023-09-28 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022157776A JP2024051551A (ja) | 2022-09-30 | 2022-09-30 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024051551A JP2024051551A (ja) | 2024-04-11 |
| JP2024051551A5 true JP2024051551A5 (https=) | 2025-07-02 |
Family
ID=90246246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022157776A Pending JP2024051551A (ja) | 2022-09-30 | 2022-09-30 | 半導体装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240113227A1 (https=) |
| JP (1) | JP2024051551A (https=) |
| KR (1) | KR102843075B1 (https=) |
| CN (1) | CN117810268A (https=) |
| DE (1) | DE102023209319A1 (https=) |
| TW (1) | TWI851391B (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118695682B (zh) * | 2024-08-27 | 2024-11-01 | 武汉华星光电技术有限公司 | 阵列基板及其制备方法以及显示面板 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW480554B (en) * | 1999-07-22 | 2002-03-21 | Semiconductor Energy Lab | Semiconductor device and manufacturing method thereof |
| JP4127466B2 (ja) | 2000-07-31 | 2008-07-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP6035195B2 (ja) * | 2012-05-01 | 2016-11-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| EP2880690B1 (en) | 2012-08-03 | 2019-02-27 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device with oxide semiconductor stacked film |
| TWI761605B (zh) | 2012-09-14 | 2022-04-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102220279B1 (ko) | 2012-10-19 | 2021-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법 |
| JP6345023B2 (ja) * | 2013-08-07 | 2018-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
| US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US9929279B2 (en) * | 2014-02-05 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| KR102298775B1 (ko) * | 2015-01-21 | 2021-09-07 | 에스케이하이닉스 주식회사 | 싱글 폴리 비휘발성 메모리 소자 및 그 제조방법 |
| US9647116B1 (en) * | 2015-10-28 | 2017-05-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for fabricating self-aligned contact in a semiconductor device |
| CN109121438B (zh) | 2016-02-12 | 2022-02-18 | 株式会社半导体能源研究所 | 半导体装置以及包括该半导体装置的显示装置 |
| JP7194122B2 (ja) * | 2018-01-05 | 2022-12-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| KR102797576B1 (ko) * | 2018-03-23 | 2025-04-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
-
2022
- 2022-09-30 JP JP2022157776A patent/JP2024051551A/ja active Pending
-
2023
- 2023-08-31 TW TW112133070A patent/TWI851391B/zh active
- 2023-09-15 KR KR1020230123124A patent/KR102843075B1/ko active Active
- 2023-09-19 CN CN202311207996.9A patent/CN117810268A/zh active Pending
- 2023-09-25 DE DE102023209319.7A patent/DE102023209319A1/de active Pending
- 2023-09-28 US US18/476,910 patent/US20240113227A1/en active Pending
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