JP2024053987A5 - - Google Patents
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- Publication number
- JP2024053987A5 JP2024053987A5 JP2022160543A JP2022160543A JP2024053987A5 JP 2024053987 A5 JP2024053987 A5 JP 2024053987A5 JP 2022160543 A JP2022160543 A JP 2022160543A JP 2022160543 A JP2022160543 A JP 2022160543A JP 2024053987 A5 JP2024053987 A5 JP 2024053987A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- oxide
- region
- layer
- oxide insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022160543A JP2024053987A (ja) | 2022-10-04 | 2022-10-04 | 半導体装置及びその製造方法 |
| TW112133067A TWI875169B (zh) | 2022-10-04 | 2023-08-31 | 半導體裝置及其製造方法 |
| KR1020230124709A KR102874839B1 (ko) | 2022-10-04 | 2023-09-19 | 반도체 장치 및 그 제조 방법 |
| CN202311224445.3A CN117855287A (zh) | 2022-10-04 | 2023-09-21 | 半导体装置及其制造方法 |
| DE102023209380.4A DE102023209380A1 (de) | 2022-10-04 | 2023-09-26 | Halbleitervorrichtung und verfahren zum herstellen einer halbleitervorrichtung |
| US18/479,934 US20240113228A1 (en) | 2022-10-04 | 2023-10-03 | Semiconductor device and method for manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022160543A JP2024053987A (ja) | 2022-10-04 | 2022-10-04 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024053987A JP2024053987A (ja) | 2024-04-16 |
| JP2024053987A5 true JP2024053987A5 (https=) | 2025-07-01 |
Family
ID=90246437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022160543A Pending JP2024053987A (ja) | 2022-10-04 | 2022-10-04 | 半導体装置及びその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240113228A1 (https=) |
| JP (1) | JP2024053987A (https=) |
| KR (1) | KR102874839B1 (https=) |
| CN (1) | CN117855287A (https=) |
| DE (1) | DE102023209380A1 (https=) |
| TW (1) | TWI875169B (https=) |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011027656A1 (en) * | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
| US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| US9960278B2 (en) * | 2011-04-06 | 2018-05-01 | Yuhei Sato | Manufacturing method of semiconductor device |
| EP2880690B1 (en) | 2012-08-03 | 2019-02-27 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device with oxide semiconductor stacked film |
| TWI761605B (zh) | 2012-09-14 | 2022-04-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102220279B1 (ko) | 2012-10-19 | 2021-02-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 반도체막을 포함하는 다층막 및 반도체 장치의 제작 방법 |
| JP6345023B2 (ja) * | 2013-08-07 | 2018-06-20 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
| US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US9640669B2 (en) * | 2014-03-13 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
| CN109121438B (zh) * | 2016-02-12 | 2022-02-18 | 株式会社半导体能源研究所 | 半导体装置以及包括该半导体装置的显示装置 |
| JP7194122B2 (ja) * | 2018-01-05 | 2022-12-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| KR102797576B1 (ko) * | 2018-03-23 | 2025-04-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| KR102925791B1 (ko) * | 2021-01-27 | 2026-02-09 | 삼성전자 주식회사 | 열전 소자를 구비한 수직형 비휘발성 메모리 소자, 그 메모리 소자를 구비한 반도체 패키지, 및 그 메모리 소자의 방열 방법 |
-
2022
- 2022-10-04 JP JP2022160543A patent/JP2024053987A/ja active Pending
-
2023
- 2023-08-31 TW TW112133067A patent/TWI875169B/zh active
- 2023-09-19 KR KR1020230124709A patent/KR102874839B1/ko active Active
- 2023-09-21 CN CN202311224445.3A patent/CN117855287A/zh active Pending
- 2023-09-26 DE DE102023209380.4A patent/DE102023209380A1/de active Granted
- 2023-10-03 US US18/479,934 patent/US20240113228A1/en active Pending
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