JP2022548263A5 - - Google Patents

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Publication number
JP2022548263A5
JP2022548263A5 JP2022516624A JP2022516624A JP2022548263A5 JP 2022548263 A5 JP2022548263 A5 JP 2022548263A5 JP 2022516624 A JP2022516624 A JP 2022516624A JP 2022516624 A JP2022516624 A JP 2022516624A JP 2022548263 A5 JP2022548263 A5 JP 2022548263A5
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JP
Japan
Prior art keywords
light
detector according
absorbing
layer
absorbing film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022516624A
Other languages
English (en)
Japanese (ja)
Other versions
JP7675707B2 (ja
JP2022548263A (ja
Filing date
Publication date
Priority claimed from FI20195772A external-priority patent/FI20195772A1/en
Application filed filed Critical
Publication of JP2022548263A publication Critical patent/JP2022548263A/ja
Publication of JP2022548263A5 publication Critical patent/JP2022548263A5/ja
Application granted granted Critical
Publication of JP7675707B2 publication Critical patent/JP7675707B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022516624A 2019-09-16 2020-09-11 熱検出器 Active JP7675707B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20195772 2019-09-16
FI20195772A FI20195772A1 (en) 2019-09-16 2019-09-16 Thermal detector
PCT/FI2020/050582 WO2021053267A1 (en) 2019-09-16 2020-09-11 Thermal detector

Publications (3)

Publication Number Publication Date
JP2022548263A JP2022548263A (ja) 2022-11-17
JP2022548263A5 true JP2022548263A5 (enExample) 2023-04-28
JP7675707B2 JP7675707B2 (ja) 2025-05-13

Family

ID=72644269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022516624A Active JP7675707B2 (ja) 2019-09-16 2020-09-11 熱検出器

Country Status (6)

Country Link
US (1) US20220344561A1 (enExample)
EP (1) EP4031843A1 (enExample)
JP (1) JP7675707B2 (enExample)
CN (2) CN119901378A (enExample)
FI (1) FI20195772A1 (enExample)
WO (1) WO2021053267A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI130930B1 (fi) 2021-08-02 2024-05-31 Teknologian Tutkimuskeskus Vtt Oy Laite ei-invasiiviseen seurantaan
CN118251583A (zh) * 2021-11-16 2024-06-25 迈瑞迪创新科技有限公司 具有高cmos集成度的高灵敏度热电基红外探测器
WO2024263494A2 (en) * 2023-06-23 2024-12-26 The Regents Of The University Of California Holey silicon-based thermopiles for high-sensitivity broadband thermal detection

Family Cites Families (25)

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Publication number Priority date Publication date Assignee Title
JPS6177728A (ja) * 1984-09-25 1986-04-21 Matsushita Electric Ind Co Ltd 熱電堆型赤外検出素子
JP3921320B2 (ja) * 2000-01-31 2007-05-30 日本電気株式会社 熱型赤外線検出器およびその製造方法
US6690014B1 (en) * 2000-04-25 2004-02-10 Raytheon Company Microbolometer and method for forming
JP4915898B2 (ja) * 2005-07-21 2012-04-11 パナソニック株式会社 赤外線センサ
US7755048B2 (en) * 2006-05-30 2010-07-13 Ying Hsu Large format thermoelectric infrared detector and method of fabrication
JP2008082790A (ja) * 2006-09-26 2008-04-10 Matsushita Electric Works Ltd 赤外線センサ
JP2009175124A (ja) * 2007-12-27 2009-08-06 Rohm Co Ltd プラズモン共鳴検出器
CN102384789B (zh) * 2010-08-30 2013-06-26 中国科学院微电子研究所 红外焦平面阵列器件及其制作方法
WO2012031282A2 (en) * 2010-09-03 2012-03-08 Tufts University/Trustees Of Tufts College Plasmonic nanoparticle-doped silk materials
JP5214690B2 (ja) * 2010-09-13 2013-06-19 株式会社東芝 赤外線検出素子
JP2013051232A (ja) * 2011-08-30 2013-03-14 Panasonic Corp 熱電変換デバイス
JP2013186038A (ja) * 2012-03-09 2013-09-19 Panasonic Corp 赤外線検出装置
DE102012104927A1 (de) * 2012-06-06 2013-12-12 Emitec Gesellschaft Für Emissionstechnologie Mbh Thermoelektrisches Modul und Verfahren zum Betrieb
US9297700B2 (en) * 2012-12-03 2016-03-29 Analog Devices, Inc. Photonic sensor and a method of manufacturing such a sensor
JP6218070B2 (ja) * 2013-10-08 2017-10-25 パナソニックＩｐマネジメント株式会社 赤外線検出器
CN103199097B (zh) * 2013-04-08 2016-03-02 孙健 一种像元结构及基于像元结构的非致冷红外焦平面探测器
FR3009865B1 (fr) * 2013-08-22 2015-07-31 Commissariat Energie Atomique Detecteur bolometrique a bolometre de compensation a thermalisation renforcee
WO2015073694A1 (en) * 2013-11-13 2015-05-21 Ud Holdings, Llc Thermoelectric generator with minimal thermal shunting
US9465240B2 (en) * 2014-06-16 2016-10-11 Intel Corporation Optical absorption based device
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FR3045148B1 (fr) * 2015-12-15 2017-12-08 Ulis Dispositif de detection a membranes bolometriques suspendues a fort rendement d'absorption et rapport signal sur bruit
US10811585B2 (en) * 2016-03-07 2020-10-20 Teknologian Tutkimuskeskus Vtt Oy Thermoelectric device
JP7232978B2 (ja) * 2017-12-11 2023-03-06 パナソニックＩｐマネジメント株式会社 赤外線センサおよび赤外線センサのボロメータ赤外線受光部を冷却する方法
US11911877B2 (en) * 2019-03-08 2024-02-27 Canon Kabushiki Kaisha Article including inorganic compound and method of manufacturing article including inorganic compound

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