JP2022514611A - コバルト基板のcmp後洗浄のための組成物及び方法 - Google Patents
コバルト基板のcmp後洗浄のための組成物及び方法 Download PDFInfo
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- JP2022514611A JP2022514611A JP2021535732A JP2021535732A JP2022514611A JP 2022514611 A JP2022514611 A JP 2022514611A JP 2021535732 A JP2021535732 A JP 2021535732A JP 2021535732 A JP2021535732 A JP 2021535732A JP 2022514611 A JP2022514611 A JP 2022514611A
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- acid
- cleaning composition
- ether
- hydroxide
- glycol
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- 230000009920 chelation Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 229910001429 cobalt ion Inorganic materials 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- XLJKHNWPARRRJB-UHFFFAOYSA-N cobalt(2+) Chemical compound [Co+2] XLJKHNWPARRRJB-UHFFFAOYSA-N 0.000 description 1
- ASKVAEGIVYSGNY-UHFFFAOYSA-L cobalt(ii) hydroxide Chemical compound [OH-].[OH-].[Co+2] ASKVAEGIVYSGNY-UHFFFAOYSA-L 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- LCUOIYYHNRBAFS-UHFFFAOYSA-N copper;sulfanylideneindium Chemical compound [Cu].[In]=S LCUOIYYHNRBAFS-UHFFFAOYSA-N 0.000 description 1
- 125000006165 cyclic alkyl group Chemical group 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 229960000633 dextran sulfate Drugs 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 1
- 229940043276 diisopropanolamine Drugs 0.000 description 1
- 235000019329 dioctyl sodium sulphosuccinate Nutrition 0.000 description 1
- SMVRDGHCVNAOIN-UHFFFAOYSA-L disodium;1-dodecoxydodecane;sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O.CCCCCCCCCCCCOCCCCCCCCCCCC SMVRDGHCVNAOIN-UHFFFAOYSA-L 0.000 description 1
- YHAIUSTWZPMYGG-UHFFFAOYSA-L disodium;2,2-dioctyl-3-sulfobutanedioate Chemical compound [Na+].[Na+].CCCCCCCCC(C([O-])=O)(C(C([O-])=O)S(O)(=O)=O)CCCCCCCC YHAIUSTWZPMYGG-UHFFFAOYSA-L 0.000 description 1
- DDXLVDQZPFLQMZ-UHFFFAOYSA-M dodecyl(trimethyl)azanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C DDXLVDQZPFLQMZ-UHFFFAOYSA-M 0.000 description 1
- JVQOASIPRRGMOS-UHFFFAOYSA-M dodecyl(trimethyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCCCC[N+](C)(C)C JVQOASIPRRGMOS-UHFFFAOYSA-M 0.000 description 1
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- BNKAXGCRDYRABM-UHFFFAOYSA-N ethenyl dihydrogen phosphate Chemical compound OP(O)(=O)OC=C BNKAXGCRDYRABM-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 235000011087 fumaric acid Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- WJLUBOLDZCQZEV-UHFFFAOYSA-M hexadecyl(trimethyl)azanium;hydroxide Chemical compound [OH-].CCCCCCCCCCCCCCCC[N+](C)(C)C WJLUBOLDZCQZEV-UHFFFAOYSA-M 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 150000002443 hydroxylamines Chemical class 0.000 description 1
- 229910000378 hydroxylammonium sulfate Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- PAZXUKOJTOTKBK-UHFFFAOYSA-N n,n-dibutylhydroxylamine Chemical class CCCCN(O)CCCC PAZXUKOJTOTKBK-UHFFFAOYSA-N 0.000 description 1
- VMESOKCXSYNAKD-UHFFFAOYSA-N n,n-dimethylhydroxylamine Chemical compound CN(C)O VMESOKCXSYNAKD-UHFFFAOYSA-N 0.000 description 1
- ZKXYINRKIDSREX-UHFFFAOYSA-N n,n-dipropylhydroxylamine Chemical class CCCN(O)CCC ZKXYINRKIDSREX-UHFFFAOYSA-N 0.000 description 1
- JQDZCJWPDXZTEW-UHFFFAOYSA-N n,n-ditert-butylhydroxylamine Chemical class CC(C)(C)N(O)C(C)(C)C JQDZCJWPDXZTEW-UHFFFAOYSA-N 0.000 description 1
- YHSRJRGROTVVRH-UHFFFAOYSA-N n-butyl-n-methylhydroxylamine Chemical compound CCCCN(C)O YHSRJRGROTVVRH-UHFFFAOYSA-N 0.000 description 1
- JXZCPFYRABEECK-UHFFFAOYSA-N n-butyl-n-propylhydroxylamine Chemical class CCCCN(O)CCC JXZCPFYRABEECK-UHFFFAOYSA-N 0.000 description 1
- RRUADNNEIGVWSQ-UHFFFAOYSA-N n-ethyl-n-methylhydroxylamine Chemical compound CCN(C)O RRUADNNEIGVWSQ-UHFFFAOYSA-N 0.000 description 1
- KNPVJTATSXDLPW-UHFFFAOYSA-N n-ethyl-n-propylhydroxylamine Chemical compound CCCN(O)CC KNPVJTATSXDLPW-UHFFFAOYSA-N 0.000 description 1
- ZEKHQGJLMVUSKE-UHFFFAOYSA-N n-ethylethanamine;hydrate Chemical compound [OH-].CC[NH2+]CC ZEKHQGJLMVUSKE-UHFFFAOYSA-N 0.000 description 1
- CPSHTTIOTFLGFS-UHFFFAOYSA-N n-methyl-n-propylhydroxylamine Chemical compound CCCN(C)O CPSHTTIOTFLGFS-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- RPGWZZNNEUHDAQ-UHFFFAOYSA-O phenylphosphanium Chemical compound [PH3+]C1=CC=CC=C1 RPGWZZNNEUHDAQ-UHFFFAOYSA-O 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 229960004838 phosphoric acid Drugs 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920000083 poly(allylamine) Polymers 0.000 description 1
- 229920000333 poly(propyleneimine) Polymers 0.000 description 1
- 108010054442 polyalanine Proteins 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 108010094020 polyglycine Proteins 0.000 description 1
- 229920000232 polyglycine polymer Polymers 0.000 description 1
- 108010050934 polyleucine Proteins 0.000 description 1
- 229920000656 polylysine Polymers 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 229960003975 potassium Drugs 0.000 description 1
- ONQDVAFWWYYXHM-UHFFFAOYSA-M potassium lauryl sulfate Chemical compound [K+].CCCCCCCCCCCCOS([O-])(=O)=O ONQDVAFWWYYXHM-UHFFFAOYSA-M 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- 150000005846 sugar alcohols Chemical class 0.000 description 1
- 239000011885 synergistic combination Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 150000005622 tetraalkylammonium hydroxides Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- IJGSGCGKAAXRSC-UHFFFAOYSA-M tris(2-hydroxyethyl)-methylazanium;hydroxide Chemical compound [OH-].OCC[N+](C)(CCO)CCO IJGSGCGKAAXRSC-UHFFFAOYSA-M 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical compound OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
- 239000002888 zwitterionic surfactant Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3218—Alkanolamines or alkanolimines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0042—Reducing agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0047—Other compounding ingredients characterised by their effect pH regulated compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/0005—Other compounding ingredients characterised by their effect
- C11D3/0073—Anticorrosion compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2068—Ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2075—Carboxylic acids-salts thereof
- C11D3/2086—Hydroxy carboxylic acids-salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/28—Heterocyclic compounds containing nitrogen in the ring
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/33—Amino carboxylic acids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/34—Organic compounds containing sulfur
- C11D3/3445—Organic compounds containing sulfur containing sulfino groups, e.g. dimethyl sulfoxide
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/36—Organic compounds containing phosphorus
- C11D3/361—Phosphonates, phosphinates or phosphonites
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/06—Hydroxides
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/265—Carboxylic acids or salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/34—Organic compounds containing sulfur
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
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- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
洗浄有効性=(洗浄前の物体の数-洗浄後の物体の数)/洗浄前の物体の数×100
特に、洗浄有効性の決定方法は、例示のためだけに提供したものであり、この方法に限定することを意図するものではない。あるいは、洗浄有効性は、粒子状物質によって覆われている全表面の割合として考えてもよい。例えば、z平面走査を実行するようAFMをプログラムして、特定の高さの閾値を上回る対象のトポグラフィー領域を識別し、次いで、当該対象領域によって覆われた総面積を計算してもよい。当業者は、洗浄後に当該対象領域によって覆われた面積が少ないほど、洗浄組成物がより効果的であることを容易に理解するであろう。好ましくは、本明細書に記載の組成物を使用して、残留物/汚染物質の少なくとも75%がマイクロ電子デバイスから除去され、より好ましくは残留物/汚染物質の少なくとも90%、さらにより好ましくは少なくとも95%、最も好ましくは少なくとも99%が除去される。
成分 重量パーセント 好ましい重量パーセント
錯化剤 約0.01重量%~約20重量% 約0.1重量%~約10重量%
洗浄添加剤 約0.01重量%~約20重量% 約0.1重量%~約10重量%
pH調整剤 約0.1重量%~約10重量% 約1重量%~約5重量%
オキシルアミン 約0.01重量%~約25重量% 約0.1重量%~約10重量%
化合物又は塩
成分の濃度が本明細書で指定される場合は常に、水が組成物の平衡量を100%にし得ることを理解されたい。洗浄組成物中の水の量は、組成物の総重量に基づいて、少なくとも80重量%、好ましくは少なくとも85重量%、より好ましくは少なくとも90重量%であり得る。
を有するヒドロキシルアミン化合物であってもよく、
又は一般式(II)
を有するアミノキシル化合物であってもよい。
R1及びR2は、互いに同じであっても異なっていてもよく、水素及びC1-C8アルキル基(例えば、メチル、エチル、プロピル、ブチル、ペンチル、ヘキシル、ヘプチル及びオクチル)を含む直鎖状アルキル基、分岐状アルキル基又は環状アルキル基からなる群から選択される。そのため、オキシルアミン化合物は、アルキルオキシルアミン(例えば、アルキルヒドロキシルアミン、特にジアルキルヒドロキシルアミン)であってもよい。好適には、オキシルアミン化合物は対称であり得、式(I)及び(II)中のR1及びR2は同じである。ヒドロキシルアミン化合物の実例としては、ヒドロキシルアミン(NH2OH)、ジメチルヒドロキシルアミン、メチルエチルヒドロキシルアミン、メチルプロピルヒドロキシルアミン、メチルブチルヒドロキシルアミン、ジエチルヒドロキシルアミン(DEHA)、エチルプロピルヒドロキシルアミン、エチルブチルヒドロキシルアミン、ジプロピルヒドロキシルアミン、プロピルブチルヒドロキシルアミン、ジブチルヒドロキシルアミン、ジ(t-ブチル)ヒドロキシルアミン、モルホリン-N-ヒドロキシド、N-ヒドロキシスクシンアミン、N-ヒドロキシマレイミド、又はそれらの塩が挙げられるが、これらに限定されない。塩の例としては、塩酸ヒドロキシルアミン、硫酸ヒドロキシルアミン、又は酢酸ヒドロキシルアミンが挙げられるが、これらに限定されない。アミノキシル化合物の実例としては、2,2,6,6-テトラメチルピペリジン-1-イル)オキシル((2,2,6,6-テトラメチルピペリジン-1-イル)オキシダニル、又はTEMPOとも呼ばれることもある)、4-アミノ-TEMPO、4-カルボキシ-TEMPO、4-ホスホノキシ-TEMPO、4-ヒドロキシ-TEMPO、共有結合したTEMPO側基又は末端基を有するポリマーが挙げられるが、これらに限定されない。他の好適な例としては、2,2,5,5-テトラメチルピロリジン-1-イル)オキシダニル(2,2,5,5-テトラメチルピロリジン-N-オキシルニトロキシド又はPROXYLとも呼ばれることもある)、3-アミノ-PROXYL、3-カルボキシ-PROXYL、3-ホスホノキシ-PROXYL、3-ヒドロキシ-PROXYL、及び共有結合したPROXYL側基又は末端基を有するポリマーが挙げられる。
以下の実施例は、少なくとも1つのヒドロキシルアミンの洗浄組成物への添加の効率を実証する。
以下の実施例は、少なくとも1つのヒドロキシルアミンを含み、高いコバルト適合性を有する本開示の洗浄組成物を実証する。
実施例2:18.2%水酸化コリン(46.7%水溶液として添加)、1.13%MEA、0.05%システイン、4.9%DEHA、及び75.625%脱イオン水。組成物のpHは13.5であった。
実施例3:2.09%KOH(45%水溶液として添加)、1.25%MEA、0.1%システイン、0.8%HEDP(60%水溶液として添加)、5.3%モルホリン、1%1-ブトキシ-2-プロパノール、3%DMSO、0.9%DEHA、及び85.56%脱イオン水。
すべての数値は、総組成に基づく重量%を指し、合計100%に対するあらゆる不足は、四捨五入によるものに過ぎない。
以下の実施例は、コバルト基板からシリカスラリーを除去するための少なくとも1つのヒドロキシルアミンを含む本開示の様々な洗浄組成物の効率を実証する。
Claims (20)
- 残留物及び汚染物質を、それらを表面に有するマイクロ電子デバイスから除去するための洗浄組成物であって、洗浄組成物が、少なくとも1つの錯化剤と、少なくとも1つの洗浄添加剤と、少なくとも1つのpH調整剤と、水と、少なくとも1つのオキシルアミン化合物又はその塩とを含む、洗浄組成物。
- 錯化剤が、アミノエチルエタノールアミン、N-メチルアミノエタノール、アミノエトキシエタノール、ジメチルアミノエトキシエタノール、ジエタノールアミン、N-メチルジエタノールアミン、モノエタノールアミン(MEA)、トリエタノールアミン(TEA)、イソプロパノールアミン、ジイソプロパノールアミン、アミノプロピルジエタノールアミン、N,N-ジメチルプロパノールアミン、N-メチルプロパノールアミン、1-アミノ-2-プロパノール、2-アミノ-1-ブタノール、イソブタノールアミン、トリエチレンジアミン、4-(2-ヒドロキシエチル)モルホリン(HEM)、1,2-シクロヘキサンジアミン-N,N,N’,N’-四酢酸(CDTA)、エチレンジアミン四酢酸(EDTA)、m-キシレンジアミン(MXDA)、イミノ二酢酸(IDA)、2-(ヒドロキシエチル)イミノ二酢酸(HIDA)、ニトリロ三酢酸、チオ尿素、1,1,3,3-テトラメチル尿素、尿素、尿素誘導体、尿酸、アラニン、アルギニン、アスパラギン、アスパラギン酸、システイン、グルタミン酸、グルタミン、ヒスチジン、イソロイシン、ロイシン、リジン、メチオニン、フェニルアラニン、プロリン、セリン、スレオニン、トリプトファン、チロシン、バリン、1-ヒドロキシエチリデン-1,1-ジホスホン酸(HEDP)、1,5,9-トリアザシクロドデカン-N,N’,N’’-トリス(メチレンホスホン酸)(DOTRP)、1,4,7,10-テトラアザシクロドデカン-N,N’,N’’,N’’’-テトラキス(メチレンホスホン酸)(DOTP)、ニトリロトリス(メチレン)トリホスホン酸、ジエチレントリアミンペンタキス(メチレンホスホン酸)(DETAP)、アミノトリ(メチレンホスホン酸)、ビス(ヘキサメチレン)トリアミンペンタメチレンホスホン酸、1,4,7-トリアザシクロノナン-N,N’,N’’-トリス(メチレンホスホン酸)(NOTP)、ヒドロキシエチルジホスホネート、ニトリロトリス(メチレン)ホスホン酸、2-ホスホノ-ブタン-1,2,3,4-テトラカルボン酸、カルボキシエチルホスホン酸、アミノエチルホスホン酸、グリホサート、エチレンジアミンテトラ(メチレンホスホン酸)フェニルホスホン酸、シュウ酸、コハク酸、マレイン酸、リンゴ酸、マロン酸、アジピン酸、フタル酸、クエン酸、クエン酸ナトリウム、クエン酸カリウム、クエン酸アンモニウム、トリカルバリル酸、トリメチロールプロピオン酸、酒石酸、グルクロン酸、2-カルボキシピリジン、4,5-ジヒドロキシ-1,3-ベンゼンジスルホン酸二ナトリウム塩、及びそれらの組み合わせからなる群から選択される種を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、約0.1重量%~約10重量%の錯化剤を含む、請求項1に記載の洗浄組成物。
- 洗浄添加剤が、2-ピロリジノン、1-(2-ヒドロキシエチル)-2-ピロリジノン(HEP)、グリセロール、1,4-ブタンジオール、テトラメチレンスルホン(スルホラン)、ジメチルスルホン、エチレングリコール、プロピレングリコール、ジプロピレングリコール、テトラグリム、ジグリム、メチルイソブチルケトン、メチルエチルケトン、アセトン、イソプロパノール、オクタノール、エタノール、ブタノール、メタノール、イソホロン、グリコールエーテル(例えば、ジエチレングリコールモノメチルエーテル、トリエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、トリエチレングリコールモノエチルエーテル、エチレングリコールモノプロピルエーテル、エチレングリコールモノブチルエーテル、ジエチレングリコールモノブチルエーテル(DEGBE)、トリエチレングリコールモノブチルエーテル(TEGBE)、エチレングリコールモノヘキシルエーテル(EGHE)、ジエチレングリコールモノヘキシルエーテル(DEGHE)、エチレングリコールフェニルエーテル、ジエチレングリコールフェニルエーテル、ヘキサエチレングリコールモノフェニルエーテル、プロピレングリコールメチルエーテル、ジプロピレングリコールメチルエーテル(DPGME)、トリプロピレングリコールメチルエーテル(TPGME)、ジプロピレングリコールジメチルエーテル、ジプロピレングリコールエチルエーテル、プロピレングリコールn-プロピルエーテル、ジプロピレングリコールn-プロピルエーテル(DPGPE)、トリプロピレングリコールn-プロピルエーテル、プロピレングリコールn-ブチルエーテル(DOWANOL PnBなど)、ジプロピレングリコールn-ブチルエーテル、トリプロピレングリコールn-ブチルエーテル、ジプロピレングリコールフェニルエーテル、プロピレングリコールフェニルエーテル(PPh、DOWANOL PPhなど)、4-メチル-2-ペンタノン、2,4-ジメチル-3-ペンタノン、シクロヘキサノン、5-メチル-3-ヘプタノン、3-ペンタノン、5-ヒドロキシ-2-ペンタノン、2,5-ヘキサンジオン、4-ヒドロキシ-4-メチル-2-ペンタノン、アセトン、ブタノン、2-メチル-2-ブタノン、3,3-ジメチル-2-ブタノン、4-ヒドロキシ-2-ブタノン、シクロペンタノン、2-ペンタノン、3-ペンタノン、1-フェニルエタノン、アセトフェノン、ベンゾフェノン、2-ヘキサノン、3-ヘキサノン、2-ヘプタノン、3-ヘプタノン、4-ヘプタノン、2,6-ジメチル-4-ヘプタノン、2-オクタノン、3-オクタノン、4-オクタノン、ジシクロヘキシルケトン、2,6-ジメチルシクロヘキサノン、2-アセチルシクロヘキサノン、2,4-ペンタンジオン、メントン、ジメチルスルホキシド(DMSO)、ジメチルホルムアミド(DMF)、N-メチルピロリドン、N-エチルピロリドン、ヒドロキシプロピルセルロース、ヒドロキシエチルセルロース、カルボキシメチルセルロース、カルボキシメチルセルロースナトリウム(NaCMC)、ドデシル硫酸ナトリウム(SDS);Surfynol 104、ポリビニルピロリドン(PVP)、ポリアミノ酸、ポリアミドヒドロキシウレタン、ポリラクトン、ポリアクリルアミド、キサンタンガム、キトサン、ポリエチレンオキシド、ポリビニルアルコール、ポリ酢酸ビニル、ポリアクリル酸、ポリエチレンイミン、ソルビトールエステル、キシリトール、無水ソルビトールのエステル、第二級アルコールエトキシレート、アルギン酸カリウム、アルギン酸アンモニウム、ポリ(エチレングリコールメタクリレート)、及びそれらの組み合わせからなる群から選択される種を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、約0.01重量%~約10重量%の洗浄添加剤を含む、請求項1に記載の洗浄組成物。
- pH調整剤が、アルカリ金属水酸化物、アルカリ土類金属水酸化物、水酸化アンモニウム、水酸化テトラメチルアンモニウム(TMAH)、水酸化テトラエチルアンモニウム(TEAH)、水酸化テトラプロピルアンモニウム(TPAH)、水酸化テトラブチルアンモニウム(TBAH)、水酸化トリブチルメチルアンモニウム(TBMAH)、水酸化ベンジルトリメチルアンモニウム(BTMAH)、水酸化コリン、水酸化エチルトリメチルアンモニウム、水酸化トリス(2-ヒドロキシエチル)メチルアンモニウム、水酸化ジエチルジメチルアンモニウム、水酸化テトラブチルホスホニウム(TBPH)、水酸化テトラメチルホスホニウム、水酸化テトラエチルホスホニウム、水酸化テトラプロピルホスホニウム、水酸化ベンジルトリフェニルホスホニウム、水酸化メチルトリフェニルホスホニウム、水酸化エチルトリフェニルホスホニウム、水酸化N-プロピルトリフェニルホスホニウム、及びそれらの組み合わせからなる群から選択される種を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、約1重量%~約5重量%のpH調整剤を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、少なくとも約80重量%の水を含む水性洗浄組成物である、請求項1に記載の洗浄組成物。
- ヒドロキシルアミン化合物が、N,N-ジエチルヒドロキシルアミン又はその塩を含む、請求項9に記載の洗浄組成物。
- 洗浄組成物が、約0.01重量%~約10重量%のオキシルアミン化合物又はその塩を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、少なくとも1つのエッチャントをさらに含み、エッチャントが、モルホリン、ジグリコールアミン、3-ブトキシプロピルアミン、プロピレングリコールモノブチルエーテル(DOWANOL PnB)、ヒドロキシエチルモルホリン、ヒドロキシプロピルモルホリン、アミノエチルモルホリン、アミノプロピルモルホリン、ペンタメチルジエチレントリアミン(PMDETA)、ピペラジン、N,N-ジメチルプロパノールアミン、エタノールアミン、ジエタノールアミン、ジエチルアミン、エチレンジアミン、ジエチレントリアミン、テトラエチレンペンタミン、トリエチレンテトラミン、トリメチルアミノエチルエタノールアミン、トリメチルアミノプロピルエタノールアミン、及びそれらの組み合わせからなる群から選択される種を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、少なくとも1つの腐食防止剤をさらに含み、腐食防止剤が、酢酸、アセトンオキシム、アクリル酸、アジピン酸、アラニン、アルギニン、アスパラギン、アスパラギン酸、ベタイン、ジメチルグリオキシム、ギ酸、フマル酸、グルコン酸、グルタミン酸、グルタミン、グルタル酸、グリセリン酸、グリセン、グリコール酸、グリオキシル酸、ヒスチジン、イミノ二酢酸、イソフタル酸、イタコン酸、乳酸、ロイシン、リジン、マレイン酸、無水マレイン酸、リンゴ酸、マロン酸、マンデル酸、2,4-ペンタンジオン、フェニル酢酸、フェニルアラニン、フタル酸、プロリン、プロピオン酸、ピロカテコール、ピロメリット酸、キナ酸、セリン、ソルビトール、コハク酸、酒石酸、テレフタル酸、トリメリット酸、トリメシン酸、チロシン、バリン、キシリトール、シュウ酸、タンニン酸、ピコリン酸、1,3-シクロペンタンジオン、カテコール、ピロガロール、レゾルシノール、ヒドロキノン、シアヌル酸、バルビツール酸、1,2-ジメチルバルビツール酸、ピルビン酸、プロパンチオール、ベンゾヒドロキサム酸、2,5-ジカルボキシプリジン、4-(2-ヒドロキシエチル)モルホリン(HEM)、N-アミノエチルピペラジン(N-AEP)、エチレンジアミン四酢酸(EDTA)、1,2-シクロヘキサンジアミン-N,N,N’,N’-四酢酸(CDTA)、N-(ヒドロキシエチル)-エチレンジアミン三酢酸(HEdTA)、イミノ二酢酸(IDA)、2-(ヒドロキシエチル)イミノ二酢酸(HIDA)、ニトリロ三酢酸、チオ尿素、1,1,3,3-テトラメチル尿素、尿素、尿素誘導体、グリシン、システイン、グルタミン酸、イソロイシン、メチオニン、ピペラジン、N-(2-アミノエチル)ピペラジン、ピロリジン、スレオニン、トリプトファン、サリチル酸、p-トルエンスルホン酸、サリチルヒロキサム酸、5-スルホサリチル酸、トリアゾール、アミノトリアゾール、ジメチルプロパルギルアルコール、ラウロイルサルコシン、ステロイルサルコシン、サッカリン、及びそれらの組み合わせからなる群から選択される種を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、少なくとも1つの還元剤をさらに含み、還元剤が、アスコルビン酸、L(+)-アスコルビン酸、イソアスコルビン酸、アスコルビン酸誘導体、亜硫酸、亜硫酸アンモニウム、亜硫酸カリウム、亜硫酸ナトリウム、ドーパミンHCl、亜リン酸、ホスフィン酸、メタ重亜硫酸カリウム、メタ重亜硫酸ナトリウム、メタ重亜硫酸アンモニウム、ヒドロキシルアミン、ピルビン酸カリウム、ピルビン酸ナトリウム、ピルビン酸アンモニウム、ギ酸、ギ酸ナトリウム、ギ酸カリウム、ギ酸アンモニウム、ドーパミン、二酸化硫黄溶液、及びそれらの組み合わせからなる群から選択される種を含む、請求項1に記載の洗浄組成物。
- 洗浄組成物が、フッ化物含有源、研磨材、及び水酸化テトラメチルアンモニウムを実質的に含まない、請求項1に記載の洗浄組成物。
- 洗浄組成物が、約10~約14の範囲のpHを有する、請求項1に記載の洗浄組成物。
- 洗浄組成物が、残留物及び汚染物質をさらに含み、残留物が、CMP後残留物、エッチング後残留物、アッシング後残留物、又はそれらの組み合わせを含む、請求項1に記載の洗浄組成物。
- 残留物及び汚染物質を、残留物及び汚染物質を表面に有するマイクロ電子デバイスから除去する方法であって、マイクロ電子デバイスから残留物及び汚染物質を少なくとも部分的に除去するのに十分な時間、マイクロ電子デバイスを洗浄組成物と接触させることを含み、洗浄組成物が、少なくとも1つの錯化剤と、少なくとも1つの洗浄添加剤と、少なくとも1つのpH調整剤と、水と、少なくとも1つのオキシルアミン化合物又はその塩とを含む、方法。
- マイクロ電子デバイスがコバルト含有材料を含み、洗浄組成物がコバルト含有材料と接触する、請求項19に記載の方法。
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PCT/US2019/063016 WO2020131313A1 (en) | 2018-12-21 | 2019-11-25 | Compositions and methods for post-cmp cleaning of cobalt substrates |
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