JP2022512349A5 - - Google Patents

Info

Publication number
JP2022512349A5
JP2022512349A5 JP2021532886A JP2021532886A JP2022512349A5 JP 2022512349 A5 JP2022512349 A5 JP 2022512349A5 JP 2021532886 A JP2021532886 A JP 2021532886A JP 2021532886 A JP2021532886 A JP 2021532886A JP 2022512349 A5 JP2022512349 A5 JP 2022512349A5
Authority
JP
Japan
Prior art keywords
volume
flexible substrate
processing
continuous flexible
processing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021532886A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022512349A (ja
JP7650231B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2019/063995 external-priority patent/WO2020123174A1/en
Publication of JP2022512349A publication Critical patent/JP2022512349A/ja
Publication of JP2022512349A5 publication Critical patent/JP2022512349A5/ja
Priority to JP2024210828A priority Critical patent/JP2025041660A/ja
Application granted granted Critical
Publication of JP7650231B2 publication Critical patent/JP7650231B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021532886A 2018-12-12 2019-12-02 フリースパン・コーティングシステムおよびその方法 Active JP7650231B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024210828A JP2025041660A (ja) 2018-12-12 2024-12-04 フリースパン・コーティングシステムおよびその方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862778417P 2018-12-12 2018-12-12
US62/778,417 2018-12-12
PCT/US2019/063995 WO2020123174A1 (en) 2018-12-12 2019-12-02 Free-span coating systems and methods

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024210828A Division JP2025041660A (ja) 2018-12-12 2024-12-04 フリースパン・コーティングシステムおよびその方法

Publications (3)

Publication Number Publication Date
JP2022512349A JP2022512349A (ja) 2022-02-03
JP2022512349A5 true JP2022512349A5 (https=) 2022-12-09
JP7650231B2 JP7650231B2 (ja) 2025-03-24

Family

ID=71072395

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021532886A Active JP7650231B2 (ja) 2018-12-12 2019-12-02 フリースパン・コーティングシステムおよびその方法
JP2024210828A Pending JP2025041660A (ja) 2018-12-12 2024-12-04 フリースパン・コーティングシステムおよびその方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024210828A Pending JP2025041660A (ja) 2018-12-12 2024-12-04 フリースパン・コーティングシステムおよびその方法

Country Status (6)

Country Link
US (1) US20200189874A1 (https=)
EP (1) EP3895236B1 (https=)
JP (2) JP7650231B2 (https=)
KR (1) KR20210091342A (https=)
CN (1) CN113169312B (https=)
WO (1) WO2020123174A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11384419B2 (en) 2019-08-30 2022-07-12 Micromaierials Llc Apparatus and methods for depositing molten metal onto a foil substrate
KR102833352B1 (ko) * 2019-09-06 2025-07-10 주식회사 엘지에너지솔루션 전리튬화 반응챔버 장치
US11876213B2 (en) * 2020-01-24 2024-01-16 GM Global Technology Operations LLC Manufacturing process of making negative electrodes for batteries
CA3192169A1 (en) * 2020-09-17 2022-03-24 Sunshine Lake Pharma Co., Ltd. A compound as a thyroid hormone beta receptor agonist and use thereof
US11721566B2 (en) * 2021-07-13 2023-08-08 Applied Materials, Inc. Sensor assembly and methods of vapor monitoring in process chambers
EP4531125A1 (en) 2023-09-28 2025-04-02 CUSTOMCELLS Holding GmbH A system for processing an electrode foil
EP4530240A1 (en) * 2023-09-29 2025-04-02 CUSTOMCELLS Holding GmbH A system, plant, and method for processing a bendable foil, a plant for obtaining a metalated battery electrode and a method of producing a battery cell

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT393184B (de) * 1989-06-07 1991-08-26 Jungfer Akkumulatoren Vorrichtung zur bildung von stapeln von akkumulatorplatten
JP2000307139A (ja) * 1999-04-21 2000-11-02 Fuji Electric Co Ltd 薄膜太陽電池の製造方法及び薄膜電極層形成装置
CN1155734C (zh) * 2002-05-27 2004-06-30 长沙力元新材料股份有限公司 一种组合式物理气相沉积技术生产多孔金属的方法及设备
JP2004165069A (ja) * 2002-11-15 2004-06-10 Sanyo Electric Co Ltd リチウム二次電池用電極の形成装置
JP5076305B2 (ja) * 2005-11-01 2012-11-21 パナソニック株式会社 リチウム二次電池用負極の製造方法およびリチウム二次電池の製造方法
JP5172134B2 (ja) * 2006-01-10 2013-03-27 パナソニック株式会社 非水電解質二次電池およびその製造方法
EP2000008B1 (en) * 2006-03-26 2011-04-27 Lotus Applied Technology, Llc Atomic layer deposition system and method for coating flexible substrates
DE602007002782D1 (de) * 2007-02-28 2009-11-26 Applied Materials Inc Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür
JP2009043747A (ja) * 2007-08-06 2009-02-26 Sumitomo Metal Mining Co Ltd ハイブリットキャパシタおよびその製造方法
US20090114534A1 (en) * 2007-08-31 2009-05-07 Geoffrey Green Sputtering Assembly
US20100126849A1 (en) * 2008-11-24 2010-05-27 Applied Materials, Inc. Apparatus and method for forming 3d nanostructure electrode for electrochemical battery and capacitor
JP2010140643A (ja) * 2008-12-09 2010-06-24 Panasonic Corp リチウムイオン二次電池用電極の製造方法
EP2299473A1 (en) * 2009-09-22 2011-03-23 Applied Materials, Inc. Modular substrate processing system and method
KR20110133161A (ko) * 2010-06-04 2011-12-12 삼성전기주식회사 롤투롤 공정을 이용한 전극 제조 장치 및 전극 제조 방법
KR101201755B1 (ko) * 2010-11-02 2012-11-15 삼성에스디아이 주식회사 진공 증착 장치 및 이를 이용한 진공 증착 방법
JP5894820B2 (ja) * 2012-03-13 2016-03-30 日東電工株式会社 導電性フィルムロールの製造方法
KR101674850B1 (ko) * 2012-12-21 2016-11-09 코니카 미놀타 가부시키가이샤 유기 일렉트로루미네센스 패널의 제조 방법 및 제조 장치
US20140326182A1 (en) * 2013-05-03 2014-11-06 Areesys Corporation Continuous Substrate Processing Apparatus
US20170022598A1 (en) * 2013-12-06 2017-01-26 Uwe Schüssler Depositing arrangement, deposition apparatus and methods of operation thereof
WO2015110154A1 (en) * 2014-01-22 2015-07-30 Applied Materials, Inc. Roller for spreading of a flexible substrate, apparatus for processing a flexible substrate and method of operating thereof
KR102244623B1 (ko) * 2014-04-03 2021-04-23 어플라이드 머티어리얼스, 인코포레이티드 재료를 기판 표면 상에 스퍼터링하기 위한 스퍼터링 배열체
ES2894648T3 (es) * 2015-07-03 2022-02-15 Tetra Laval Holdings & Finance Película o lámina de barrera y material de envasado laminado que comprende la película o lámina y el recipiente de envasado preparado a partir del mismo
CN105139793A (zh) 2015-08-28 2015-12-09 京东方科技集团股份有限公司 一种阵列基板、其驱动方法、显示面板及显示装置
KR102937833B1 (ko) * 2016-01-28 2026-03-10 엘리베이티드 머티어리얼스 저머니 게엠베하 보호 층 툴을 이용한 통합형 리튬 증착
CN109477203A (zh) * 2016-07-01 2019-03-15 应用材料公司 用于涂布柔性基板的沉积设备和涂布柔性基板的方法

Similar Documents

Publication Publication Date Title
JP2022512349A5 (https=)
CN102049901B (zh) 喷墨涂敷装置以及方法
TWI505982B (zh) Glass film conveying device
JP5182610B2 (ja) 薄膜太陽電池の製造装置
JP6657135B2 (ja) 電池製造用装置
JP6602505B2 (ja) 成膜装置及び成膜方法
JP2008189957A (ja) 連続成膜装置
JP2016514196A5 (https=)
JP6347662B2 (ja) 薄膜形成装置
JP4985209B2 (ja) 薄膜太陽電池の製造装置
CN104245552A (zh) 缠绕工艺薄膜
JP2008031505A (ja) 成膜装置および成膜方法
JPWO2011016471A1 (ja) 薄膜積層体の製造装置
KR101996328B1 (ko) 롤투롤 공정 기반의 전자 회로 패턴 비접촉 인쇄 장치
JP6471623B2 (ja) 成膜装置及び成膜方法
JP6782087B2 (ja) シート治具、ステージ、製造装置、及び二次電池の製造方法
KR101728805B1 (ko) 진공 롤투롤을 활용한 소재 이송 장치 및 방법
JP6209039B2 (ja) 薄膜形成装置
JP5169068B2 (ja) 薄膜太陽電池の製造装置
JP6605351B2 (ja) 電極製造装置
JP6419428B2 (ja) 差動排気システム
JP5104782B2 (ja) 薄膜光変換素子の製造装置及び製造方法
JP2017155298A (ja) 薄膜形成装置
JP2016026370A (ja) 製造システム
JP7575207B2 (ja) 基材搬送装置