DE602007002782D1 - Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür - Google Patents

Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür

Info

Publication number
DE602007002782D1
DE602007002782D1 DE602007002782T DE602007002782T DE602007002782D1 DE 602007002782 D1 DE602007002782 D1 DE 602007002782D1 DE 602007002782 T DE602007002782 T DE 602007002782T DE 602007002782 T DE602007002782 T DE 602007002782T DE 602007002782 D1 DE602007002782 D1 DE 602007002782D1
Authority
DE
Germany
Prior art keywords
chamber
application method
method therefor
network processing
lock system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007002782T
Other languages
English (en)
Inventor
Stefan Hein
Peter Sauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE602007002782D1 publication Critical patent/DE602007002782D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/02—Advancing webs by friction roller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H19/00—Changing the web roll
    • B65H19/10—Changing the web roll in unwinding mechanisms or in connection with unwinding operations
    • B65H19/14—Accumulating surplus web for advancing to machine while changing the web roll
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Replacement Of Web Rolls (AREA)
  • Advancing Webs (AREA)
  • Computer And Data Communications (AREA)
DE602007002782T 2007-02-28 2007-02-28 Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür Active DE602007002782D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07004187A EP1964943B1 (de) 2007-02-28 2007-02-28 Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür

Publications (1)

Publication Number Publication Date
DE602007002782D1 true DE602007002782D1 (de) 2009-11-26

Family

ID=38283258

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007002782T Active DE602007002782D1 (de) 2007-02-28 2007-02-28 Zugangsversperrsystem, Netzverarbeitungsanlage und Anwendungsverfahren dafür

Country Status (7)

Country Link
US (1) US20080202418A1 (de)
EP (1) EP1964943B1 (de)
JP (1) JP2008218990A (de)
KR (1) KR20080079996A (de)
AT (1) ATE445720T1 (de)
DE (1) DE602007002782D1 (de)
TW (1) TW200906700A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7923281B2 (en) * 2006-04-13 2011-04-12 Solopower, Inc. Roll-to-roll processing method and tools for electroless deposition of thin layers
US20090068344A1 (en) * 2007-07-31 2009-03-12 Vincent Cannella System and method for manufacturing thin film electrical devices
DE102008017492B4 (de) * 2008-04-04 2013-07-25 Von Ardenne Anlagentechnik Gmbh Verfahren zum Transport eines bandförmigen Substrats und Vakuumbeschichtungsanlage
RU2015155191A (ru) 2013-06-27 2017-07-28 Пикосан Ой Формирование траектории полотна подложки в реакторе атомно-слоевого осаждения
DE102013110609A1 (de) * 2013-09-26 2015-03-26 Von Ardenne Gmbh Vakuumprozesskammer, Prozessiervorrichtung, Transportvorrichtung zum Transportieren eines Bandsubstrats und Verfahren zum Betreiben einer Prozessiervorrichtung
KR101487834B1 (ko) * 2013-11-08 2015-02-03 주식회사 서남 세라믹 선재의 제조설비
GB2521645B (en) * 2013-12-24 2016-01-06 Bobst Manchester Ltd Vacuum metallizers and methods of operating vacuum metallizers
DE102018003793A1 (de) * 2018-05-03 2019-11-07 Focke & Co. (Gmbh & Co. Kg) Verfahren und Vorrichtung zum Handhaben einer Aufreißstreifenbahn
EP3569531B1 (de) * 2018-05-03 2021-09-15 Focke & Co. (GmbH & Co. KG) Verfahren und vorrichtung zum handhaben einer aufreissstreifenbahn
JP2022512349A (ja) * 2018-12-12 2022-02-03 アプライド マテリアルズ インコーポレイテッド フリースパン・コーティングシステムおよびその方法
CN111196517B (zh) * 2019-12-31 2021-04-27 北新禹王防水科技(四川)有限公司 一种充气装置
US20220112594A1 (en) * 2020-10-14 2022-04-14 Applied Materials, Inc. Device for sealing a vacuum chamber, vacuum processing system, and method of monitoring a load lock seal

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3316177A (en) * 1964-12-07 1967-04-25 Lubrizol Corp Functional fluid containing a sludge inhibiting detergent comprising the polyamine salt of the reaction product of maleic anhydride and an oxidized interpolymer of propylene and ethylene
US3367667A (en) * 1965-07-16 1968-02-06 United States Steel Corp Roll seal for vacuum strip-treating chamber
GB1187802A (en) * 1966-06-30 1970-04-15 United States Steel Corp Method of Applying a Protective Metal Coating to a Steel Base
EP0130444B1 (de) 1983-06-17 1987-09-23 Hitachi, Ltd. Apparat zur kontinuierlichen Vakuumbehandlung
DE3922187A1 (de) * 1989-07-06 1991-01-17 Leybold Ag Vorrichtung zum herstellen von metallfreien streifen bei im vakuum beschichteten folienbahnen, insbesondere fuer kondensatoren
US6273955B1 (en) * 1995-08-28 2001-08-14 Canon Kabushiki Kaisha Film forming apparatus
JP3199162B2 (ja) * 1996-03-18 2001-08-13 松下電器産業株式会社 連続真空処理装置
PT1004369E (pt) * 1998-11-26 2004-10-29 Cockerill Rech & Dev Eclusa de estanquecidade para camara de vacuo
JP4003163B2 (ja) * 2002-01-15 2007-11-07 富士フイルム株式会社 多層塗布膜の製造装置
US7132016B2 (en) * 2002-09-26 2006-11-07 Advantech Global, Ltd System for and method of manufacturing a large-area backplane by use of a small-area shadow mask
EP1479789A1 (de) * 2003-05-23 2004-11-24 Recherche Et Developpement Du Groupe Cockerill Sambre Abgedichtete Schleuse für eine in-line Vakuumbeschichtungsanlage

Also Published As

Publication number Publication date
JP2008218990A (ja) 2008-09-18
EP1964943A1 (de) 2008-09-03
ATE445720T1 (de) 2009-10-15
KR20080079996A (ko) 2008-09-02
US20080202418A1 (en) 2008-08-28
EP1964943B1 (de) 2009-10-14
TW200906700A (en) 2009-02-16

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Legal Events

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8364 No opposition during term of opposition